Tài liệu Mems Mechanical Sensors pptx
Tài liệu Mems Mechanical Sensors pptx
... Age for Sili
-
con Sensors and Actuators,” Sensors and Actuators, Vol. A46, 1995, pp. 8–16.
[35] Diem, B., et al., “‘SIMOX’: A Technology for High-Temperature Silicon Sensors, ” Sensors
and Actuators, ... MEMS Technology Pressure Sensors 139
Diaphragm
Nitride seal
Metal contact
Sacrifical oxide
Figure 6.24 Cross-section through SOI capacitive pressure sensor.
Preface
The field of m...
Tài liệu MEMS Mechanical Sensors ppt
... resonant frequency. Density sensors and level sensors are examples of
mass coupled resonant sensors. Coating the resonator in a chemically sensitive
material is used in gas sensors. The sensitive ... electric field
mV
charge dens
()
ity
applied mechanical stress
CN
(5.14)
90 Mechanical Transduction Techniques
and
g =
open circuit electric field
applied mechanical str
() ()
ess
VmN...
Tài liệu MEMS Sensors for Biomedical Applications pptx
... MEMS Sensors for Biomedical
Applications
Yu-Chong Tai
Professor of EE
Member of NSF/CNSE
California Institute of Technology
(NSF/ERC Industry Day, May 16-17, 2001)
MEMS Mass Flow ... Facility
0
1
2
sec
monocytes
0
1
2
sec
What is MEMS?
• In US: Microdynamics
• In Europe: Micro Systems (Technology)
• In Japan: Micromachines, MicroRobots
A Micro-Electro -Mechanical System (MEMS) is a...
Tài liệu Applications Mechanical Seals -Sealing Technology in Pulp and Paper Production pptx
... water
without any impairment to the safe and
reliable operation of the mechanical
seals.
Major potential for savings
Mechanical seals, single seals with or
without flushing and/or a quench, ... application and easy to install.
LP-D for
“non-flow” operation
4
Mechanical pulp
production
Groundwood pulp is mostly produced
by mechanical means, with up to 95 %
of the wood input being...
Tài liệu Human Resources Management pptx
... this publication may not be reproduced or transmitted in any form or by any means -
- electronic, mechanical, photocopying, recording or other without prior permission of the U.S.
Small Business
