... DESIGN, MODELING AND FABRICATION OF THERMAL ACTUATED MICROMIRROR FOR FINE- TRACKING MECHANISM OF HIGH- DENSITY OPTICAL DATA STORAGE DENG XIAOCHONG (B Eng., Huazhong Univ of Sci & Tech, ... micromirror for fine- tracking mechanism of high- density optical data storage International Journal of Computational Engineering Science, Vol 4, No 2, pp.413-416 2003 J P Yang, X C Deng and T C Chong ... 3-1: Fine- tracking optical disk drive 20 Fig 3-2: Schematic plot of thermal actuated micromirror as a fine tracking device in ODS 20 Fig 3-3: The structure of the thermal...