Real time monitoring and control of critical dimensions in lithography

... the concept of the real- time photoresist properties monitoring and control through the lithography process is introduced and developed by researchers An exploration of the real- time control system ... ideal for the next incoming wafers To solve this problem, the in- situ real- time control technologies are necessary 1.2.3 Real- time control The essence of...

Ngày tải lên: 08/09/2015, 19:26

... run in open-loop with very little real-time process control utilizing in situ sensors In this thesis, in- situ measurement and real-time control is applied to some aspects of lithography including ... Real-time control requires in- situ measurement [6, 15] The shift of metrology from off-line towards in- situ sensors, provides in- time data for active proces...

Ngày tải lên: 14/09/2015, 12:50

... Control of cooling water inhibitor dosage is one of the critical issues in achieving good results as to control of scale, corrosion and deposition; minimization of water management ... development of an on-line UV florescent monitor/controller This unique tracer and control method allows automatic monitoring and control of inhibitor dosage and is currentl...

Ngày tải lên: 16/01/2014, 22:20

... Koutsouris, A S Andreou, C Pattichis, and C Schizas, “Multipurpose health care telemedicine system,” in Proceedings of the 23rd Annual International Conference of the IEEE Engineering in Medicine and Biology ... TESTING AND RESULTS The described system was implemented to be used in two main test applications: telemedicine in emergency handling and remote health ca...

Ngày tải lên: 22/06/2014, 19:20

... Real-time imaging and analysis of differences in cadmium dynamics in rice cultivars (Oryza sativa) using positron-emitting 107Cd tracer Satoru Ishikawa1*§, Nobuo ... to grains in typical rice cultivars that differed in grain Cd concentrations We used positron-emitting 107Cd tracer and an innovative imaging technique, the positron-emitting tr...

Ngày tải lên: 11/08/2014, 11:21

... determine and remove any (suspected) contaminants as much as possible out of the water system Estimating and locating contaminant sources and then applying the control to flush them out of the water ... strategy consists of the injection of clean water from a reservoir at a nearby point into the river in order to dilute the contaminant in the water up to a certa...

Ngày tải lên: 09/09/2015, 10:06

... biological/physiological and engineering perspectives Proficient skills in handling cells and chip In our case, we need to integrate cell culture, ATP release measurement and Ca2+ imaging into the one system The main ... identifying the structure of the mechano-sensor in VECs membrane, finding signaling pathway given certain type of mechanical stimulus and investigating the...

Ngày tải lên: 09/09/2015, 18:48

... PST in a Spin Chain with Engineering Couplings 26 2.1.3 Entanglement Generation in a Spin Chain 27 2.2 Entanglement generation with pre-engineered couplings 28 2.3 A physical interpretation ... solutions of PST in a chain containing an odd number of spins The proof will be presented in the Appendix B and C 29 Chapter Entanglement generation in a spin chain In E...

Ngày tải lên: 10/09/2015, 15:48

... importance of controlling develop step since it is one of the crucial steps in lithography that determines the final CD Their efforts include determining the best time to switch from developing to rinsing ... medium instead of air Morton et al (1999) has mentioned the difficulty of estimating film thickness during dissolution of photoresist in developer solution In general, disso...

Ngày tải lên: 12/09/2015, 08:19

... treat each variable as a separate time series due to the lack of suitable methods for analyzing the dynamical properties of multidimensional data sets We would encourage our mathematical colleagues ... relative phases of the two waves Fast oscillations There is at least one fast oscillatory component with a period of $ which, like the circahoralian rhythm, appears, disappears and...

Ngày tải lên: 07/03/2014, 10:20

... Outline IMS PTR-MS SIFT-MS Application of IMS IMS-TOF IMS-IMS-TOF Application of PTR-MS PIT-MS Real-time Monitoring Mass spectrometry Environmental science Biochemical and medical ... mass spectrometry for no-line trace gas analysis David Smith and Patrik Spanel Reference : Mass Spectrometry Reviews, 2005, 24, 661– 700 Application of IMS IMS/TOF IMS/IMS/TOF Ion Mobility/...

Ngày tải lên: 28/04/2014, 13:18

... Analysis of HA and quantitative real-time PCR data employed for the determination of JC viral load A – C: Analysis of HA and quantitative real-time PCR data employed for the determination of JC viral ... G, Fischer S, Major EO: Comparison of PCR- southern hybridization and quantitative real-time PCR for the detection of JC and BK viral nucleotide Page...

Ngày tải lên: 19/06/2014, 08:20

... Analysis of HA and quantitative real-time PCR data employed for the determination of JC viral load A – C: Analysis of HA and quantitative real-time PCR data employed for the determination of JC viral ... microtiter and transwell plates Semiquantitative polymerase chain reaction (PCR) and quantitative real-time PCR have been recently developed and employed fo...

Ngày tải lên: 20/06/2014, 04:20