... Sci. Instrum. 63 (1) , (19 92) 14 . R. Signorato, M. Sanchez del Rio, in Proceedings of SPIE, vol. 315 2, 19 97, p. 13 68 Volume Effects in Zone Plates 16 50 20406080 10 0 12 0 14 0 16 0x-axis / nm4080 12 0 16 0200240280zone ... according to (8.9)with the theory of thin gratings only 11 .6% diffraction efficiency is obtainedat 256 nm height for L:S = 10 nm:30 nm and L:S = 30 nm :10 nm. Note thatthe theory of thin gratings ... 8479.H.Lammert,T.Noll,T.Schlegel,F.Siewert,T.Zeschke,inPatentschriftDE10303659 B4 2005.07.28 10 . I. Weing¨artner,M.Schulz,C.Elster,inProceedings of SPIE, vol. 3782, 19 99,p. 306 11 . C. Elster, I. Weing¨artner, Appl. Opt. 38, 5024 (19 99) 12 . V.V. Yashchuk,...