The Materials Science of Thin Films 2011 Part 1 ppt
The Materials Science of Thin Films 2011 Part 1 ppt
... and be
oxidized in the process. Further consideration of Eqs. 1- 12 and 1- 15b indicates
that
)2/3
AG
=
exp
-
(
aAl,03
K=
(aAl
Y3pO2
RT
(1- 17)
The A1,0, and A1 may be considered ...
Equation 1- 12
is
one of the most frequently used equations in chemical
thermodynamics and will be helpful in analyzing
CVD
reactions.
Combining Eqs. 1- 10 and 1- 11 gives...
The Materials Science of Thin Films 2011 Part 4 ppt
... view
of
the
MOS
field effect transistor structure
in
Fig.
4 -1
indicates the extent to which the technology is employed. Above the plane of
the base P-Si wafer, all
of
the films with the ...
-10 0-
-1
20
-1
40
I
0
.
and, therefore,
-
-
-
-
IIIII
(3
number of moles of C1
=
15 9
the perfect gas law,
Similarly, for all other terms in th...
The Materials Science of Thin Films 2011 Part 12 pptx
...
+
n2).
Therefore,
n,=
Jnonz.
(1
1- 20)
Since
6
=
4nn,d,/X
=
a,
3a,
5~, etc,
x
3x
5x
n,d=
-
-
-
,
etc.
4’
4’4
(1
1- 21)
Equations 11 -20 and 11 - 21 represent the amplitude ... factor
of 1
/e
occurs when the film is continuous. Therefore, the use of Eq. 11 -3 with
I/Zo
=
1
/e
yields
4
a
kd
/
X
=
1, or
d
=
X/4
a
k.
It is clea...
The Materials Science of Thin Films 2011 Part 13 ppt
... Coatings
9.
*
10 .
11 .
12 .
13 .
14 .
15 .
16 .
17 .
18 .
19 .
20.
21.
22.
23.
24.
25.
26.
27.
28.
R.
F.
Bunshah and
C.
Deshpandey, in
Physics
of
Thin Films,
Vol.
13 ,
eds. M. ...
(19 78).
S.
Stecura,
Thin Solid
Films
13 6,
2 41 (19 86).
R.
A. Miller and
C.
C.
Berndt,
Thin Solid Films
11 9,
19 5 (19 84).
G. Johner and
K.
K.
Schwei...
The Materials Science of Thin Films 2011 Part 15 ppt
... applications, 79
hysteresis, 12 6
magnetron,
11 6,
11 8,
12 5
reactive, 11 8, 12 6
RF,
10 3,
11 8,
12 1
stoichiometry,
11 4
table, 13 2
targets, 11 8
targets (table), 11 9 -12 0
YBa,Cu,O,,
644
zone ...
sputter yield,
11 3
Sputter yield, 11 1 -11 2, 11 3
Sputter-ion pump, 70
Sputtered
films, stress, 427
Sputtering, 10 9, 13 1
metals, 11 3
schematic, 71
a...
The Materials Science of Thin Films 2011 Part 2 ppsx
... continuous
state of random motion, which is intimately dependent on the temperature
of
the gas. During their motion the gas particles collide with each other as well as
with the walls of the confining ... field.
logarithm of the rate is plotted on the ordinate and the reciprocal of the
absolute temperature is plotted along the abscissa. The slope of the...
The Materials Science of Thin Films 2011 Part 5 docx
...
513
613
613
613
613
293- 413
<
313
313
10 13 -12 13
313 - 513
523
523
12 13
523 -11 3
413 - 613
513 -11 3
12 13
813
523 -12 13
613 - 913
633- 613
413 -11 3
613 - 813
673
10 -8 -10
-
10 -~ -10 -~ ...
10 -~ -10 -~
10 - 8 -10 -
10 -~ -10 -~
10 -* -10 -
10 -~
10 -~ -10 -~
10 -~
10 -8 -10
-6
10 -8 -10 -6
3
x
10 -4
10
-
8 -10 -
10 -8
10...
The Materials Science of Thin Films 2011 Part 6 doc
... keV-30 keV
500
eV- 10 keV
10 0-400 keV
10 0-400
keV
10 0-400 keV
0.5
-2.0 keV
1- 15 keV
1- 15 eV
1
keV and up
5-20 keV
>
1 MeV
Photon
>
1 keV
>
1 keV
>
1 keV
Laser
Laser ...
3,
15 6 (19 66).
11 .
D.
Kashchiev,
Surface Science
86,
14 (19 79).
12 .
K.
L. Chopra,
Thin- Film Phenomena,
McGraw-Hill, New York
(19 69).
13 .
G.
E.
Rhead,...
The Materials Science of Thin Films 2011 Part 8 pps
...
2558 (19 89).
19 .*
A. Y. Cho,
Thin Solid Films
10 0,
2 91 (19 83).
20.*
K. Ploog,
Ann. Rev. Mater. Sci.
11 ,
17 1 (19 81) .
21
.*
M. B. Panish and
H.
Temkin,
Ann. Rev. Mater. Sci.
19 , ... array of Fig.
7-26a
reflects the sixfold symmetry of
the (11 1) plane, and the six fainter spots in between are the result of the
(7
x
7)
surface reconstructio...
The Materials Science of Thin Films 2011 Part 9 pot
... in Thin Films
-
;
A
k
;I
Ib
I;
b.
10 4
200
17 5
15 0
12 5
10 0
75
I I
I
I
u
I
t:
'022.0 212
2.4
2.6
2.8
10 3/ToK
Figure
8 -13 b. Arrhenius plots
for
the kinetics of ... requires that
Ef
=
E,;
therefore, the thermal mismatch
force is
If
d,E,/ (1
-
v,)
S
dfEf/(l
-
vf),
the thermal stress in the film is
(9 -16 )
(9 -17 )
Note that...
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