Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 15 pps

... methacrylate)-co- ethylacrylate] (COP) Dichloropropyl acrylate and glycidyl methacrylate-co-ethyl acrylate (DCOPA) Lithography Optical Optical Optical E-beam and X ray E-beam and X ray Xray Type Negative Positive Positive Positive Negative Negative vi ... (MST); the main ones are as follows: 30 0- 25 0- I 20 0- I 15 0- S 10 0- 5 0- 0 1990 1992 1994 1996...

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... Accelerometers and Gyroscopes 414 14.7 Concluding Remarks 416 References 416 15 Smart Sensors and MEMS 417 15. 1 Introduction 417 15. 2 Smart Sensors 421 15. 3 MEMS Devices 434 15. 4 Concluding ... soild-state device physics, micro- electronics, material science, MEMS/ Smart structures, and mechanics. Prior to joining About the Authors INTRODUCTION Dimension...

Ngày tải lên: 10/08/2014, 05:20

... etc. 0, 1,2,3, ,(n- 1) -l,-l + 1, -l + 2, ,-! , 0, l, l-2,l- 1,l + ior-I number m s , which takes two values +| and — |. Therefore, four quantum numbers n, l, m, and m s are required ... methacrylate)-co- ethylacrylate] (COP) Dichloropropyl acrylate and glycidyl methacrylate-co-ethyl acrylate (DCOPA) Lithography Optical Optical Optical E-beam and X ray E-bea...

Ngày tải lên: 10/08/2014, 05:20

... (ºC) 1150 –1225 102 5-1 100 1100–1175 95 0-1 050 Dopant type n n P Deposition rate L(um/min) 0. 2-1 .0 0. 1-1 .0 0. 2-2 .0 0. 1-0 .25 N/A N/A N/A A number of different sources of both silicon and the ... Electronics and Optoelec- tronics, Chapman and Hall, London, p. 351. Culshaw, B. (1996). Smart Structures and Materials, Artech House, Boston, p....

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... test Reworkability Die attach and wire bond 1 30 0-5 00 2 0-1 00 2. 0-3 .5 4-7 Excellent DC Poor TAB >2 50 0-7 00 3-4 4. 0-5 .0 3-4 Fair AC Poor/Fair Flip TAB >2 50 0-7 00 3-4 4. 0-5 .0 3-4 Fair AC Fair Flip Chip 0.8 1000 10 <1.0 10 Poor AC Poor basic ... 102 COP PMMA PBS Lithography Optical Optical Optical Optical E-beam and X-ray E-beam...

Ngày tải lên: 10/08/2014, 05:20

... c [ p-S'i s etc ^^\ I**,: , , ,| , i ::::•:•:• •:• !&*( )Wth | :!:|R:j: - Mi )n /!!!!! hed m m •^ - - - -= ^ Oxide growth S] on p-Si and IE passivation m ^-4 -_ _-_ _-_ ^fllrSSvt f_ ... conductivity Units % - 1 0- 6 /°C g/cm 3 - 10 –3 kV/mm GPa ft-cm J/g.°K W/m.°K AI 2 O 3 99.5 White 7.6 3.87 9.9 0.1 24 400 10 14 - 2 0-3 5...

Ngày tải lên: 10/08/2014, 05:20

... types of MEMS RADIATION SENSORS 241 Radition sensors Number particles X ray X ray - Plastic film - Thermoluminescent - Solid-state -Photoconductive -Photovoltaic -Photoconductive - Photovoltaic " ... microfluidic devices, " Sensors and Actuators A, 70, 15 3-1 58. Sun, C., Jiang, X. N. and Zhang, X. (1999). "Experimental and numerical...

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... density (mg/Hz) Package" Price(€)* Motorola XMMAS4 01G1D 1 ±40 g 20 g -4 0 to 105 5 400 0.5 N/A 7.8 16-pin DIP, SIP 11 Bosch SMB050 1 ±35 g - - 7 400 0.5 N/A - 28-pin PLCC N/A Bosch SMB060 2 ±35 g - - 12 400 0.5 1 - 28-pin PLCC N/A Analog devices ADXL50JH 1 ±50 ... control 9 9 9 9 n/a 7 9 30 100 3.3 97 455 14 19 0-1 05 5 0-1 05 0-1 05 0-1 05 500 20000...

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... SnO 2 Undoped oxide Undoped oxide Measurand Methane Hydrogen sulfide Air quality (smoke) Toxic gas - CO Hydrocarbons Chlorine Ozone Range (PPM) 50 0-1 0000 5-1 00 <10 1 0-1 000 1 0-1 000 0-5 0-0 .3 (Power mW) 835 660 660 120 400 650 800 Cost a (euro) 13 50 13 13 15 25 25 a Price ... Shurmer, H. V. and Gardner, J. W. (1993). "Integrated tin oxide sen...

Ngày tải lên: 10/08/2014, 05:20

... operation Device type Love SAW Rayleigh SAW SH-SAW SH-APM FPW Substrate Typical frequency (MHz) ST-quartz ST-quartz LiTaO 3 ST-quartz Si x N y /ZnO 9 5-1 30 8 0-1 000 9 0-1 50 160 1-6 Ua U b t Media Transverse Parallel Ice ... Surface-Wave Devices for Signal Processing, Elsevier, The Netherlands. Nakamura, N., Kazumi, M. and Shimizu, H. (1977). "SH-type and R...

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