Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 12 pps

microsensors mems and smart devices gardner varadhan and awadelkarim pot

microsensors mems and smart devices gardner varadhan and awadelkarim pot

... methacrylate)-co- ethylacrylate] (COP) Dichloropropyl acrylate and glycidyl methacrylate-co-ethyl acrylate (DCOPA) Lithography Optical Optical Optical E-beam and X ray E-beam and X ray Xray Type Negative Positive Positive Positive Negative Negative vi ... Isotropic and Orientation-Dependent Wet Etching 118 5.3 Etch-Stop Techniques 124 5.3.1 Doping-Selective Etching (DSE)...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 1 pdf

Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 1 pdf

... Distripark, Singapore 129 809 Library of Congress Cataloguing-in-Publication Data Gardner, J. W. (Julian W.), 195 8- Microsensors, MEMS, and smart devices / Julian W. Gardner, Vijay K. ... soild-state device physics, micro- electronics, material science, MEMS/ Smart structures, and mechanics. Prior to joining About the Authors INTRODUCTION Dimension of...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 2 ppt

Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 2 ppt

... etc. 0, 1,2,3, ,(n- 1) -l,-l + 1, -l + 2, ,-! , 0, l, l-2,l- 1,l + ior-I number m s , which takes two values +| and — |. Therefore, four quantum numbers n, l, m, and m s are required ... methacrylate)-co- ethylacrylate] (COP) Dichloropropyl acrylate and glycidyl methacrylate-co-ethyl acrylate (DCOPA) Lithography Optical Optical Optical E-beam and X ray E-bea...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 3 pdf

Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 3 pdf

... (ºC) 1150 122 5 102 5-1 100 1100–1175 95 0-1 050 Dopant type n n P Deposition rate L(um/min) 0. 2-1 .0 0. 1-1 .0 0. 2-2 .0 0. 1-0 .25 N/A N/A N/A A number of different sources of both silicon and the ... structure Zinc-blende structure Zinc-blende structure Zinc-blende structure Zinc-blende structure Zinc-blende structure Zinc-blende structure Zinc-blende structu...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 4 pdf

Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 4 pdf

... test Reworkability Die attach and wire bond 1 30 0-5 00 2 0-1 00 2. 0-3 .5 4-7 Excellent DC Poor TAB >2 50 0-7 00 3-4 4. 0-5 .0 3-4 Fair AC Poor/Fair Flip TAB >2 50 0-7 00 3-4 4. 0-5 .0 3-4 Fair AC Fair Flip Chip 0.8 1000 10 <1.0 10 Poor AC Poor basic ... 102 COP PMMA PBS Lithography Optical Optical Optical Optical E-beam and X-ray E-beam...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 5 pdf

Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 5 pdf

... c [ p-S'i s etc ^^\ I**,: , , ,| , i ::::•:•:• •:• !&*( )Wth | :!:|R:j: - Mi )n /!!!!! hed m m •^ - - - -= ^ Oxide growth S] on p-Si and IE passivation m ^-4 -_ _-_ _-_ ^fllrSSvt f_ ... film MCM-D Polyimide 3.5 25 25 Cu (Al, Au) 5 1 0-2 5 5 0-1 25 100 4-to 10 1. 3-3 .4 3.4 62 1.25 Laminate MCM-L Epoxy-glass 4.8 120 300 Cu 25 7 5...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 9 ppt

Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 9 ppt

... types of MEMS RADIATION SENSORS 241 Radition sensors Number particles X ray X ray - Plastic film - Thermoluminescent - Solid-state -Photoconductive -Photovoltaic -Photoconductive - Photovoltaic " ... wavelengths from the ultraviolet-to-near-infrared (UV-NIR) region, which includes visible, through the NIR and thermal-infrared region and into the micr...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 10 docx

Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 10 docx

... density (mg/Hz) Package" Price(€)* Motorola XMMAS4 01G1D 1 ±40 g 20 g -4 0 to 105 5 400 0.5 N/A 7.8 16-pin DIP, SIP 11 Bosch SMB050 1 ±35 g - - 7 400 0.5 N/A - 28-pin PLCC N/A Bosch SMB060 2 ±35 g - - 12 400 0.5 1 - 28-pin PLCC N/A Analog devices ADXL50JH 1 ±50 ... control 9 9 9 9 n/a 7 9 30 100 3.3 97 455 14 19 0-1 05 5 0-1 05 0-1 05 0-1 05 500 200...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 11 pps

Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 11 pps

... SnO 2 Undoped oxide Undoped oxide Measurand Methane Hydrogen sulfide Air quality (smoke) Toxic gas - CO Hydrocarbons Chlorine Ozone Range (PPM) 50 0-1 0000 5-1 00 <10 1 0-1 000 1 0-1 000 0-5 0-0 .3 (Power mW) 835 660 660 120 400 650 800 Cost a (euro) 13 50 13 13 15 25 25 a Price ... either in-line or at-line — this is extremely demanding and rules out co...
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Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 12 pps

Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 12 pps

... operation Device type Love SAW Rayleigh SAW SH-SAW SH-APM FPW Substrate Typical frequency (MHz) ST-quartz ST-quartz LiTaO 3 ST-quartz Si x N y /ZnO 9 5-1 30 8 0-1 000 9 0-1 50 160 1-6 Ua U b t Media Transverse Parallel Ice ... Surface-Wave Devices for Signal Processing, Elsevier, The Netherlands. Nakamura, N., Kazumi, M. and Shimizu, H. (1977). "SH-type and R...
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