Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 2 ppt
microsensors mems and smart devices gardner varadhan and awadelkarim pot
... SiO2
in
two
steps:
Si
2+
+
2( OH)
>
Si(OH)
2
(2. 11)
and
Si(OH)
2
>
SiO
2
+ H
2
(2. 12)
SiO
2
dissolves
in HF
acid according
to the
reaction
SiO
2
+ 6HF »
H
2
SiF
6
+
2H
2
O ... °C
Deposited
by
SiHj
+ O
2
at
450 °C
Deposited
by
TEOS
at
700 °C
Deposited
by
SiCl
2
H
2
+
N
2
Oat900°C
Si0
2
SiO
2
(H)
SiO
2
SiO
2
2 .2
Nonconformal
2...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 1 pdf
... 22 4
References
22 5
8
Microsensors
22 7
8.1
Introduction
22 7
8 .2
Thermal Sensors
23 0
8 .2. 1 Resistive Temperature Microsensors
23 1
8 .2. 2 Microthermocouples
23 2
8 .2. 3 Thermodiodes
and
Thermotransistors
... 15
2. 3.1
The
Lithographic Process
15
2. 3 .2
Mask Formation
18
2. 3.3 Resist
18
2. 3.4
Lift-off
Technique
21
2. 4
Etching Electronic Materials...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 2 ppt
... table
z
1
2
3
4
5
6
7
8
9
10
Element
Hydrogen
Helium
Lithium
Beryllium
Boron
Carbon
Nitrogen
Oxygen
Fluorine
Neon
Notation
Is
1
Is
2
Is
2
2s
1
Is
2
2s
2
Is
2
2s
2
2p
1
Is
2
2s
2
2p
2
Is
2
2s
2
2p
3
Is
2
2s
2
2p
4
Is
2
2s
2
2p
5
Is
2
2s
2
2p
6
n
1
1
2
2
2
2
2
2
2
2
/
0
0
0
0
1
1
1
]
1
1
m
0
0
0
0
-1 , or 0, or ... 1.7
4b
22
Ti
1.5
40
Zr
1.4
72...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 3 pdf
... (ß)
FCC
HCP
FCC
FCC
FCC
FCC
2. 86
2. 90
2. 49
2. 71
2. 48
2. 52
2.49
2. 51
2. 49
2. 49
2. 55
2. 66
2. 97
2. 77
2. 88
3.49
Metals are,
in
general, good thermal
and
electrical
conductors. They
are
somewhat
strong
and
ductile
... Interatomic
number
(Z) (A)
structure distance
(A)
13
22
24
26
27
28
29
30
47
78
79
82
Al
Ti
Cr
Fe
Co
Ni
Cu
Zn
Ag
Pt
Au
Pb
.43
.47...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 4 pdf
... test
Reworkability
Die
attach
and
wire
bond
1
30 0-5 00
2 0-1 00
2. 0-3 .5
4-7
Excellent
DC
Poor
TAB
> ;2
50 0-7 00
3-4
4. 0-5 .0
3-4
Fair
AC
Poor/Fair
Flip
TAB
> ;2
50 0-7 00
3-4
4. 0-5 .0
3-4
Fair
AC
Fair
Flip
Chip
0.8
1000
10
<1.0
10
Poor
AC
Poor
basic
... 1 02
COP
PMMA
PBS
Lithography
Optical
Optical
Optical
Optical
E-beam
and
X-ray...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 5 pdf
... 10+
0. 2- 0 .3
3.0
90
4.3
HTCC
MCM-C
Alumina
9.5
10 0-7 50
10 0 -2 00
W(Co)
15
10 0-1 25
25 0-6 25
20 0-3 00
50+
0. 8-1
10.0
1 02
2.1
Adapted
from
Doane
and
Franzon
Thin
film
MCM-D
Polyimide
3.5
25
25
Cu
... film
MCM-D
Polyimide
3.5
25
25
Cu
(Al,
Au)
5
1 0 -2 5
5 0-1 25
100
4-to
10
1. 3-3 .4
3.4
62
1 .25
Laminate
MCM-L
Epoxy-glass
4.8
120
300
Cu...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 9 ppt
... Photovoltaic
"
Pyroelectric
-
Microantenna
(SAW)
—
Wire
antenna
Energy
increasing
L.2GeV-1.2MeV(x
ray)
1.2MeV-
1.2keV(;r ray)
1.2keV-1.2eV
1.2eV-1.2MeV
1.2MeV-
1 .2
1.2jieV-1.2MeV(RW)
Figure
8.13 ... types
of
MEMS
RADIATION
SENSORS
24 1
Radition
sensors
Number
particles
X
ray
X
ray
-
Plastic
film
-
Thermoluminescent
-
Solid-state
-Photoconductive
-Photov...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 10 docx
... density
(mg/Hz)
Package"
Price(€)*
Motorola
XMMAS4
01G1D
1
±40 g
20 g
-4 0 to 105
5
400
0.5
N/A
7.8
16-pin
DIP,
SIP
11
Bosch
SMB050
1
±35 g
-
-
7
400
0.5
N/A
-
28 -pin
PLCC
N/A
Bosch
SMB060
2
±35 g
-
-
12
400
0.5
1
-
28 -pin
PLCC
N/A
Analog
devices
ADXL50JH
1
±50 ... vans
ABS
a
Suspension
Total
1991
21
0
0
21
19 92
55
8
6
69
1993
89
8
13
110
1994
88
1...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 11 pps
... quality
(smoke)
Toxic
gas -
CO
Hydrocarbons
Chlorine
Ozone
Range
(PPM)
50 0-1 0000
5-1 00
<10
1 0-1 000
1 0-1 000
0-5
0-0 .3
(Power
mW)
835
660
660
120
400
650
800
Cost
a
(euro)
13
50
13
13
15
25
25
a
Price
for ... (UK)
Capteur (UK)
Model
TGS8 42
TGS 825
TGS800
SB5000
SP1100
LGS09
LGS21
Material
Doped SnO
2
Doped SnO
2
Doped
SnO
2
Doped SnO
2
Doped SnO...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 12 pps
... (10 .29 )
can now be
written
in the
following
way
(Varadan
and
Varadan 1999):
jkx\
u
2x2
= (B
1
+ B
2
) exp
(jcot
-
jkx
1
+
a
2
x
3
)
(10. 32)
where
-
c
2
/4i
< *2
= -k\ -
c
2
/v
2
T2
... easily
obtained
from Equation
(10.35).
"1x2
= A
COS[(X
2
(h
-
X
3
)]
,,ni-n
u
2x2
=
A
-
-
-
exp[y(wf
-
kx\)] (10.37)
cos a2 n
w...
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