Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 1 pdf

... ones are as follows: 30 0- 25 0- I 20 0- I 15 0- S 10 0- 5 0- 0 19 90 19 92 19 94 19 96 Year 19 98 2000 2002 Figure 1. 4 World market for ICs and microsensors from 19 90 to 2000. From various ... (um) 0. 1- 1 0 0. 3 -1 00 0. 1- 0 .5 0. 1- 0 .3 Bake temperature (°C) 9 0 -1 50 35 0-4 50 50 0-9 00 650 Solvent Weak base Weak base HF HNO 3...

Ngày tải lên: 27/06/2014, 18:20

... past 30 years 10 ' 10 ' I 10 01 1 10 7 a E 10 5 o 10 10 5 10 ' 10 J 19 70 19 75 19 80 19 85 19 90 19 95 2000 2005 Year introduced Figure 1. 2 Size of memory chips (DRAM) and minimum ... 408 14 .5 Wireless Readout 412 14 .6 Hybrid Accelerometers and Gyroscopes 414 14 .7 Concluding Remarks 416 References 416 15 Smart Sensors an...

Ngày tải lên: 10/08/2014, 05:20

... wafer la 1 H 2 .1 3 Li 1. 0 11 Na 0.9 19 K 0.8 37 Rb 0.8 55 Cs 0.7 87 Fr 0.7 2a 4 Be 1. 5 12 Mg 1. 2 20 Ca 1. 0 38 Sr 1. 0 57 Ba 0.9 88 Ra 0.9 3b 21 Sc 1. 3 39 Y 1. 2 5 7-7 1 La-Lu 1. 1 1. 2 8 9 -1 03 Ac-Lr 1. 1 1. 7 4b 22 Ti 1. 5 40 Zr 1. 4 72 Hf 1. 3 10 4 (Rf) 5b 23 V 1. 6 41 Nb 1. 6 73 Ta 1. 5 10 5 (Ha) 6b 24 Cr 1. 6 42 Mo 1. 8 74 W 1. 7 7b 25 Mn...

Ngày tải lên: 10/08/2014, 05:20

... (ºC) 11 50 12 25 10 2 5 -1 10 0 11 00 11 75 95 0 -1 050 Dopant type n n P Deposition rate L(um/min) 0. 2 -1 .0 0. 1- 1 .0 0. 2-2 .0 0. 1- 0 .25 N/A N/A N/A A number of different sources of both silicon and the ... thickness variation (u,m) Surface orientation 0.5 0-0 .55 3 0-3 5 1 6-2 0 0.6 0-0 .65 4 0-4 5 2 5-3 0 70 65 0.6 5-0 .70 5 5-6 0 3 5-4 0 6...

Ngày tải lên: 10/08/2014, 05:20

... attach and wire bond 1 30 0-5 00 2 0 -1 00 2. 0-3 .5 4-7 Excellent DC Poor TAB >2 50 0-7 00 3-4 4. 0-5 .0 3-4 Fair AC Poor/Fair Flip TAB >2 50 0-7 00 3-4 4. 0-5 .0 3-4 Fair AC Fair Flip Chip 0.8 10 00 10 < ;1. 0 10 Poor AC Poor basic ... 81 (a) (b) (c) Top view Side view 1 I m i I 1 \ 1 I u S \I\ F3 1 yd 1 1 fit 1 1 p^i 1 4...

Ngày tải lên: 10/08/2014, 05:20

... conductivity Units % - 1 0- 6 /°C g/cm 3 - 10 –3 kV/mm GPa ft-cm J/g.°K W/m.°K AI 2 O 3 99.5 White 7.6 3.87 9.9 0 .1 24 400 10 14 - 2 0-3 5 AI 2 O 3 96 White 7 .1 3.7 9.5 0.4 26 250 10 14 - 2 0-3 5 BeO 99.5 White 9.0 3. 01 6.5 0.4 9.5 17 0-2 40 10 15 - 25 0-2 60 A1N 9 8-9 9.8 Dark grey 4.4 3.255 8. 8-8 .9 0. 7-2 .0 1 0 -1 4 28 0-3 20 &g...

Ngày tải lên: 10/08/2014, 05:20

... Pyroelectric - Microantenna (SAW) — Wire antenna Energy increasing L.2GeV -1 . 2MeV(x ray) 1. 2MeV- 1. 2keV(;r ray) 1. 2keV -1 . 2eV 1. 2eV -1 . 2MeV 1. 2MeV- 1. 2 1. 2jieV -1 . 2MeV(RW) Figure 8 .13 Classification ... urn) Vis-NIR (0.90 jim) NIR (0.86 jim) IR (7 to 15 ^m) Supplier/ Part NORP12 IPL1002 0BW Siemens SFH206 OSI5K Siemens SFH 309 Sentel DP- 210 1- 1 0...

Ngày tải lên: 10/08/2014, 05:20

... vans ABS a Suspension Total 19 91 21 0 0 21 1992 55 8 6 69 19 93 89 8 13 11 0 19 94 88 16 18 12 2 19 95 15 1 24 26 2 01 1996 12 7 31 19 17 7 19 97 12 9 50 19 19 8 19 98 13 1 52 20 203 19 99 13 3 54 21 208 2000 13 5 56 22 213 a Automatic ... control 9 9 9 9 n/a 7 9 30 10 0 3.3 97 455 14 19 0 -1 05 5 0 -1 05 0 -1 05 0 -1 05 500 20000 5 0 -1 05 Curren...

Ngày tải lên: 10/08/2014, 05:20

... - CO Hydrocarbons Chlorine Ozone Range (PPM) 50 0 -1 0000 5 -1 00 < ;10 1 0 -1 000 1 0 -1 000 0-5 0-0 .3 (Power mW) 835 660 660 12 0 400 650 800 Cost a (euro) 13 50 13 13 15 25 25 a Price for 1 to 9 units 1 euro is $1. 1 here part of ... properties and theory of piezo- electricity. The first practical applications using piezoelectric devices...

Ngày tải lên: 10/08/2014, 05:20

... for wide band pulse compres- sion," Trans. Sonics Ultrasonics, SU -1 6 , 10 7 11 7. Varadan, V. K. and Varadan, V. V. (19 97). "IDT, SAW and MEMS sensors for measuring deflec- tion, ... displacements u 1x2 and u 2x2 in the plane Jt3 = 0 (Ewing et al. 19 57; Slobodnik 19 76). INTRODUCTION TO ACOUSTICS 3 21 y-polarized x-polarized z-polarized x-propa z-pola...

Ngày tải lên: 10/08/2014, 05:20