Micro Electro Mechanical System Design - James J. Allen Part 8 pps
Micro Electro Mechanical System Design© 2005 potx
... Publisher
Journal of Microelectromechanical Systems IEEE/ASME
Journal of Micromechanics and Microengineering Institute of Physics
Sensors and Actuators Elsevier Science Ltd
Microsystem Technologies ... 6 Micro Electro Mechanical System Design
the microelectronic fabrication tools and materials. LIGA can be used to make
parts or molds from electroplateable materials ... 51
2.8 Annealin...
Handbook of Mechanical Engineering Calculations ar Episode 2 Part 8 ppsx
... required area of 1363.6
ϫ 27 ft
3
/yd
3
ϭ
36 ,81 7 .2 ft
3
/20 ft high ϭ 184 0 .8 ft
2
(171.0 m
2
), or 184 0.9 ft
2
/43,560 ft
2
/acre ϭ
0.0 42 acre (169.9 m
2
; 0.017 ha) per year. With a 10-year life ... reduction. Federal agencies (e.g. EPA, Department of Defense, De-
partment of Energy, and Department of Interior) are actively supporting research and
development o...
DESIGN OF MASONRY STRUCTURES Part 8 pps
... weight of
masonry is 21kN/m
3
. Design the beam for serviceability condition
(
␥
f
=1).
Solution
(clause 29.1, BS 56 28: Part 2)
(clause 29.2, BS 56 28: Part 2)
Assume M
i
is 30% of ... 10.9 mm diameter stabilized strands of
characteristic strength of 1700 N/mm
2
. The area of steel provided is
288 mm
2
. The initial modulus of elasticity of the steel is...
Micro Electro Mechanical System Design - James J. Allen Part 1 pot
... Diamond 10 8
3.6.4 SU-8 10 9
3.7 Summary 10 9
Questions 11 0
References 11 0
Chapter 4 Scaling Issues for MEMS 11 5
4 .1 Scaling of Physical Systems 11 5
4 .1. 1 Geometric Scaling 11 5
4 .1. 2 Mechanical System ... Group, LLC
10 .4 .1 Operational Failure Mechanisms 388
10 .4 .1. 1 Wear 388
10 .4 .1. 2 Fracture 390
10 .4 .1. 3 Fatigue 3 91
10.4 .1. 4 Charging 3 91
10.4 .1....
Micro Electro Mechanical System Design - James J. Allen Part 2 pot
... 1774 26 22 2996 33 82
Temperature (
°°
°°
C)
to produce a P
v
= 10
–3
torr
889 1090 122 3 1316 1570 1904 22 95 28 20 3016
J
P
kTM
v
=
2
2
â 20 05 by Taylor & Francis Group, LLC
28 Micro Electro Mechanical ... Introduction to Microelectromechanical Systems Engineering,
Artech House Inc., Boston, 20 00.
â 20 05 by Taylor & Francis Group, LLC
32 Micro Electro Mec...
Micro Electro Mechanical System Design - James J. Allen Part 3 docx
...
assembly limited)
Integral on-chip
microelectronics
Yes (on SOI wafers) Yes No
â 2005 by Taylor & Francis Group, LLC
42 Micro Electro Mechanical System Design
electronics or MEMS devices. ... 0.1
= 0.2
= 0 .3
= 0.2
= 0 .3
D
t
D
t
D
t
D
t
D
t
D
t
â 2005 by Taylor & Francis Group, LLC
44 Micro Electro Mechanical System Design
Lithography is the most critical pr...
Micro Electro Mechanical System Design - James J. Allen Part 4 pdf
... MEMS–microelectronic process inte-
gration.
Al Bond
Pad
Si
3
N
4
Passivation
TiN
2-ply poly-Si
Poly 2
TiN Anchor Point
N-tub
P-tub
Tungsten/TiN
2 àm arsenic-doped epitaxial layer
N
+
antimony-doped ... & Francis Group, LLC
88 Micro Electro Mechanical System Design
3.3.1 SUMMIT
SUMMiT (Sandia ultraplanar, multilevel MEMS technology) is a state-of-the-art
surface micromac...
Micro Electro Mechanical System Design - James J. Allen Part 5 pps
... Francis Group, LLC
114 Micro Electro Mechanical System Design
71. A.E. Franke, J.M. Heck, T .J. King, Polycrystalline silicon-germanium films for
integrated microsystems, J. Microelectromech. Syst., ... National
Laboratories,
http://mems.sandia.gov.
35. K.H. Chau, R.E. Sulouff, Technology for the high-volume manufacturing of inte-
grated surface-micromachined accelerometer produ...
Micro Electro Mechanical System Design - James J. Allen Part 6 ppsx
... 10
–10
–10
–4
Immunoassays 10
–17
–10
6
Chemical, organisms, DNA analyses 10
–22
–10
–17
C
s
10
0
10
0
10
-3
10
-3
10
-6
10
-6
10
-9
10
-9
10
-1 2
10
-1 2
10
-1 5
10
-1 5
10
-1 8
10
-1 8
10
-2 1
10
-2 1
C - (M) = moles/liter
Molar ... presented in Chap-
â 2005 by Taylor & Francis Group, LLC
134 Micro Electro Mechanical System...
Micro Electro Mechanical System Design - James J. Allen Part 7 pptx
... cross-sections for the plate-to-plate hinge.
A
A
B B
(a) composite masks for plate-to-plate hinge
(b) cross-section A-A after MMPOLY2 etch
(c) cross-section A-A after release etch
(d) cross-section ... 2005 by Taylor & Francis Group, LLC
176 Micro Electro Mechanical System Design
5.3 DESIGN RULES
The term design rules originally comes from the microelectronics industry. The...
Micro Electro Mechanical System Design - James J. Allen Part 8 pps
... Kim, K. Nabors, M.A. Shulman, J.K.
White, A computer-aided design system for microelectromechanical systems
(MEMCAD), J. Microelectromech. Syst., 1(1), 3–13, 1992.
33. J.R. Gilbert, P.M. Osterberg, ... and design of microsystems: a 10-year perspective,
Sensors Actuators A, 67, 1–7, 19 98.
36. S.D. Senturia, CAD challenges for microsensors, microactuators, and microsys-
tems, Proc. IE...
Theory and Design of CNC Systems Part 8 ppsx
... methods and the
method of designing a soft PLC system will be described together with design of
Soft-NC in the later in this textbook. In Soft-NC, a PC is used as the hardware plat-
form and all CNC ... Soft NC, Soft NC and
Soft PLC can be regarded as the same system. Soft PLC which is made by a user
interface and the PLC kernel based on the IEC1131-3 can be regarded as partia...
MEMS (micro electro mechanical system)
... MEMSVIETNAM
CẢM BIẾN GIA TỐC
Tóm tắt:
Bài báo này trình bày về việc thiết kế, chế tạo và một số áp dụng của cảm biến gia tốc
áp điện trở trên cơ sở công nghệ vi cơ điện tử (MEMS) . Vật ... 1.5ì1.5ì0.5 mm3 nờn cú th hng ti nhiều
ứng dụng đo gia tốc khác nhau.
2. Cảm biến gia tốc áp điện trở
MEMSVIETNAM
Hình 1: Cấu hình cảm biến gia tốc
3 chiều
Hình 2: Chồng lấp các mặt nạ sử
dụng phần ......