Micro Electro Mechanical System Design - James J. Allen Part 7 pptx

... Publisher Journal of Microelectromechanical Systems IEEE/ASME Journal of Micromechanics and Microengineering Institute of Physics Sensors and Actuators Elsevier Science Ltd Microsystem Technologies ... 6 Micro Electro Mechanical System Design the microelectronic fabrication tools and materials. LIGA can be used to make parts or molds from electroplateable materials ... 51 2.8 Annealin...

Ngày tải lên: 05/03/2014, 15:20

... AR049-19 Annu. Rev. Fluid Mech. 1998. 30:579–612 Copyright c  1998 by Annual Reviews Inc. All rights reserved MICRO-ELECTRO-MECHANICAL- SYSTEMS (MEMS) AND FLUID FLOWS Chih-Ming Ho Mechanical and Aerospace ... Turbulence Research, Parviz Moin, Krishnan Mahesh 539 Micro-Electro-Mechanical -Systems (MEMS) and Fluid Flows, Chih- Ming Ho, Yu-Chong Tai 579 Fluid Mech...

Ngày tải lên: 09/03/2014, 00:20

... previous design again. The CAD system is an interactive design system; the operator can repeatedly alternate between design change and evaluation. The details of the above-mentioned design systems ... selection y n n y fundamental mechanism designinner mechanism design n y deatained structure design 6) 11) 17) 8596Ch21Frame Page 542 Tuesday, November 6, 2001 9:51 PM â 2002 by C...

Ngày tải lên: 21/06/2014, 21:20

... Page 643 Tuesday, November 6, 2001 9:43 PM â 2002 by CRC Press LLC in the loop, systems with elements of learning and self-organization, systems that sometimes do not allow for representation ... Compliance Control Design in Industrial Robotic Systems, Ph.D. Thesis, Univer- sity of Nis ˇ , Yugoslavia, 2001. 54. Craig, J.J., Hsu, P., and Sastry, S.S., Adaptive control of mechanic...

Ngày tải lên: 21/06/2014, 21:20

... It creates condence that encourages its use 28.3.3.2 Systems Design Planning and design of service robot systems involves systematic design of mechatronic products (Schraft and Hägele, 18 ... 1999. 8596Ch27Frame Page 775 Tuesday, November 6, 2001 9:37 PM â 2002 by CRC Press LLC 28 Present State and Future Trends in Mechanical Systems Design for Robot Applicatio...

Ngày tải lên: 21/06/2014, 21:20

... Diamond 10 8 3.6.4 SU-8 10 9 3.7 Summary 10 9 Questions 11 0 References 11 0 Chapter 4 Scaling Issues for MEMS 11 5 4 .1 Scaling of Physical Systems 11 5 4 .1. 1 Geometric Scaling 11 5 4 .1. 2 Mechanical System ... Group, LLC 10 .4 .1 Operational Failure Mechanisms 388 10 .4 .1. 1 Wear 388 10 .4 .1. 2 Fracture 390 10 .4 .1. 3 Fatigue 3 91 10.4 .1. 4 Charging 3 91 10.4 .1....

Ngày tải lên: 10/08/2014, 05:20

... 1774 26 22 2996 33 82 Temperature ( °° °° C) to produce a P v = 10 –3 torr 889 1090 122 3 1316 1570 1904 22 95 28 20 3016 J P kTM v = 2 2 â 20 05 by Taylor & Francis Group, LLC 28 Micro Electro Mechanical ... Introduction to Microelectromechanical Systems Engineering, Artech House Inc., Boston, 20 00. â 20 05 by Taylor & Francis Group, LLC 32 Micro Electro Mec...

Ngày tải lên: 10/08/2014, 05:20

... assembly limited) Integral on-chip microelectronics Yes (on SOI wafers) Yes No â 2005 by Taylor & Francis Group, LLC 42 Micro Electro Mechanical System Design electronics or MEMS devices. ... 0.1 = 0.2 = 0 .3 = 0.2 = 0 .3 D t D t D t D t D t D t â 2005 by Taylor & Francis Group, LLC 44 Micro Electro Mechanical System Design Lithography is the most critical pr...

Ngày tải lên: 10/08/2014, 05:20

... MEMS–microelectronic process inte- gration. Al Bond Pad Si 3 N 4 Passivation TiN 2-ply poly-Si Poly 2 TiN Anchor Point N-tub P-tub Tungsten/TiN 2 àm arsenic-doped epitaxial layer N + antimony-doped ... & Francis Group, LLC 88 Micro Electro Mechanical System Design 3.3.1 SUMMIT  SUMMiT (Sandia ultraplanar, multilevel MEMS technology) is a state-of-the-art surface micromac...

Ngày tải lên: 10/08/2014, 05:20

... Francis Group, LLC 114 Micro Electro Mechanical System Design 71. A.E. Franke, J.M. Heck, T .J. King, Polycrystalline silicon-germanium films for integrated microsystems, J. Microelectromech. Syst., ... National Laboratories, http://mems.sandia.gov. 35. K.H. Chau, R.E. Sulouff, Technology for the high-volume manufacturing of inte- grated surface-micromachined accelerometer produ...

Ngày tải lên: 10/08/2014, 05:20

... 10 –10 –10 –4 Immunoassays 10 –17 –10 6 Chemical, organisms, DNA analyses 10 –22 –10 –17 C s 10 0 10 0 10 -3 10 -3 10 -6 10 -6 10 -9 10 -9 10 -1 2 10 -1 2 10 -1 5 10 -1 5 10 -1 8 10 -1 8 10 -2 1 10 -2 1 C - (M) = moles/liter Molar ... presented in Chap- â 2005 by Taylor & Francis Group, LLC 134 Micro Electro Mechanical System...

Ngày tải lên: 10/08/2014, 05:20

... cross-sections for the plate-to-plate hinge. A A B B (a) composite masks for plate-to-plate hinge (b) cross-section A-A after MMPOLY2 etch (c) cross-section A-A after release etch (d) cross-section ... 2005 by Taylor & Francis Group, LLC 176 Micro Electro Mechanical System Design 5.3 DESIGN RULES The term design rules originally comes from the microelectronics industry. The...

Ngày tải lên: 10/08/2014, 05:20

... Kim, K. Nabors, M.A. Shulman, J.K. White, A computer-aided design system for microelectromechanical systems (MEMCAD), J. Microelectromech. Syst., 1(1), 3–13, 1992. 33. J.R. Gilbert, P.M. Osterberg, ... and design of microsystems: a 10-year perspective, Sensors Actuators A, 67, 1–7, 19 98. 36. S.D. Senturia, CAD challenges for microsensors, microactuators, and microsys- tems, Proc. IE...

Ngày tải lên: 10/08/2014, 05:20

... MEMSVIETNAM CẢM BIẾN GIA TỐC Tóm tắt: Bài báo này trình bày về việc thiết kế, chế tạo và một số áp dụng của cảm biến gia tốc áp điện trở trên cơ sở công nghệ vi cơ điện tử (MEMS) . Vật ... 1.5ì1.5ì0.5 mm3 nờn cú th hng ti nhiều ứng dụng đo gia tốc khác nhau. 2. Cảm biến gia tốc áp điện trở MEMSVIETNAM Hình 1: Cấu hình cảm biến gia tốc 3 chiều Hình 2: Chồng lấp các mặt nạ sử dụng phần ......

Ngày tải lên: 25/12/2014, 09:47