Micro Electro Mechanical System Design - James J Allen Part 6 ppsx

... 10 –10 –10 –4 Immunoassays 10 –17 –10 6 Chemical, organisms, DNA analyses 10 –22 –10 –17 C s 10 0 10 0 10 -3 10 -3 10 -6 10 -6 10 -9 10 -9 10 -1 2 10 -1 2 10 -1 5 10 -1 5 10 -1 8 10 -1 8 10 -2 1 10 -2 1 C - (M) = moles/liter Molar ... size) 10 -6 10 -5 10 -4 10 -3 10 -2 10 -1 1 Ultra-Precision Machining Precision Ma...

Ngày tải lên: 10/08/2014, 05:20

... Cataloging-in-Publication Data Allen, James J. Micro electro mechanical system design / James J. Allen. p. cm. (Mechanical engineering ; 192) Includes bibliographical references and index. ISBN 0-8 24 7-5 82 4-2 ... Preben W. Jensen 56. Solid-State AC Motor Controls: Selection and Application , Sylvester Campbell © 2005 by Taylor & Francis Group, LLC James J...

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... Polycrystalline silicon micromechanical beams, J. Electrochem. Soc.: Solid-State Sci. Technol., 130 (6) , 1420–1423, June 1983. 23. L-S. Fan, Y-C Tai, R.S. Muller, Integrated movable micromechanical structures for ... W Melting point ( °° °° C) 66 0 1900 1410 1 063 166 8 1774 262 2 29 96 3382 Temperature ( °° °° C) to produce a P v = 10 –3 torr 889 1090 1223 13 16 1570 1904 2295 2820 30...

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... assembly limited) Integral on-chip microelectronics Yes (on SOI wafers) Yes No © 2005 by Taylor & Francis Group, LLC 42 Micro Electro Mechanical System Design electronics or MEMS devices. ... LLC 44 Micro Electro Mechanical System Design Lithography is the most critical process in microelectronics and MEMS processes, and the equipment is generally the most costly in...

Ngày tải lên: 10/08/2014, 05:20

... MEMS–microelectronic process inte- gration. Al Bond Pad Si 3 N 4 Passivation TiN 2-ply poly-Si Poly 2 TiN Anchor Point N-tub P-tub Tungsten/TiN 2 µm arsenic-doped epitaxial layer N + antimony-doped ... Francis Group, LLC 84 Micro Electro Mechanical System Design layers have their roots in the microelectronics industry. The etches of the structural layers define the shape of the me...

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... LLC 114 Micro Electro Mechanical System Design 71. A.E. Franke, J. M. Heck, T .J. King, Polycrystalline silicon-germanium films for integrated microsystems, J. Microelectromech. Syst., 12(2), 160 –171, ... micromachining of electro- thermal-compliant micro devices, J. Micromech. Microeng., 11, 38–47, 2001. 10. T. Moulton, G.K. Ananthasuresh, Micromechanical devices with embedde...

Ngày tải lên: 10/08/2014, 05:20

... Integrated measurement-modeling approaches for evaluating residual stress using microma- chined fixed-fixed beams, J. Microelectromechanical Syst., 11 (6) , 743–753, December 2002. 8. K.S .J. Pister, M.W. Judy, S.R. ... Fearing, Microfabricated hinges, Sensors Actuators A, 33, 249–2 56, 1992. 9. R. Yeh, E .J. J. Kruglick, K.S .J. Pister, Surface micromachined components for articulated microro...

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... C                       = 11 122 13 14 15 16 12 22 23 24 25 26 13 23 33 3 C C C C C C C C C C C C C C 44 35 36 14 24 34 44 45 46 15 25 35 45 55 5 C C C C C C C C C C C C C C 66 16 26 36 46 56 66 C C C C C C x                     σ σ yy z xy yz zx σ τ τ τ                       © ... B.P. Johnson, S. Kim, K. Nabors, M....

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... 6 Micro Electro Mechanical System Design the microelectronic fabrication tools and materials. LIGA can be used to make parts or molds from electroplateable materials ... Boundary © 2005 by Taylor & Francis Group, LLC James J. Allen Micro Electro Mechanical System Design Boca Raton London New York Singapore A CRC title, part of the Taylor & Francis imprint,...

Ngày tải lên: 05/03/2014, 15:20