Micro Electro Mechanical System Design - James J Allen Part 1 pot

... Diamond 10 8 3.6.4 SU-8 10 9 3.7 Summary 10 9 Questions 11 0 References 11 0 Chapter 4 Scaling Issues for MEMS 11 5 4 .1 Scaling of Physical Systems 11 5 4 .1. 1 Geometric Scaling 11 5 4 .1. 2 Mechanical System ... Group, LLC 10 .4 .1 Operational Failure Mechanisms 388 10 .4 .1. 1 Wear 388 10 .4 .1. 2 Fracture 390 10 .4 .1. 3 Fatigue 3 91 10.4 .1. 4 Charging 3 91 10.4 .1....

Ngày tải lên: 10/08/2014, 05:20

... ( °° °° C) to produce a P v = 10 –3 torr 889 10 90 12 23 13 16 15 70 19 04 2295 2820 3 016 J P kTM v = 2 2π © 2005 by Taylor & Francis Group, LLC 28 Micro Electro Mechanical System Design proper diameter. ... 420–457, May 19 82. 22. R.T. Howe and R.S. Muller, Polycrystalline silicon micromechanical beams, J. Electrochem. Soc.: Solid-State Sci. Technol., 13 0(6), 14...

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... LLC 58 Micro Electro Mechanical System Design FIGURE 2.36 Solution of Frick’s equation solutions for case 1 and case 2. 10 0 10 1 10 0 0 0.5 1 Depth–micron (a) Case 1 (b) Case 2 = 0 .1 Depth–micron Concentration/Initial ... of x-ray lithography, Microelectron. Eng., 30 (1 4), 17 1 17 8, January 19 96. 8. R. DeJule, E-beam lithography, the debate continues, Semiconducto...

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... the Institute for Microtechnology, Mainz, Ger- many [13 ], have jointly developed an electromagnetic motor with an outer diameter of only 1. 9 mm [14 16 ]. Figure 3 .13 shows the 1. 9-mm motor and an ... & Francis Group, LLC 88 Micro Electro Mechanical System Design 3.3 .1 SUMMIT  SUMMiT (Sandia ultraplanar, multilevel MEMS technology) is a state-of-the-art surface microm...

Ngày tải lên: 10/08/2014, 05:20

... LLC 11 4 Micro Electro Mechanical System Design 71. A.E. Franke, J. M. Heck, T .J. King, Polycrystalline silicon-germanium films for integrated microsystems, J. Microelectromech. Syst., 12 (2), 16 0 17 1, ... silicon micromechanical beams, J. Elec- trochem. Soc.: Solid-State Sci. Technol., 13 0(6), 14 20 14 23, June 19 83. 21. R.T. Howe, Surface micromachining for microsens...

Ngày tải lên: 10/08/2014, 05:20

... 10 10 10 –4 Immunoassays 10 17 10 –6 Chemical, organisms, DNA analyses 10 –22 10 17 C s 10 0 10 0 10 -3 10 -3 10 -6 10 -6 10 -9 10 -9 10 -1 2 10 -1 2 10 -1 5 10 -1 5 10 -1 8 10 -1 8 10 -2 1 10 -2 1 C - (M) = moles/liter Molar ... size /part size) 10 -6 10 -5 10 -4 10 -3 10 -2 10 -1 1...

Ngày tải lên: 10/08/2014, 05:20

... Actu- ators A, 67, 1 7, 19 98, and Proc. IEEE, 86(8), 16 11 16 26, 19 98.) Detailed Design Models Large number of degrees of freedom 3-D Simulation FEM or BEM models Design Synthesis Models System ... Integrated measurement-modeling approaches for evaluating residual stress using microma- chined fixed-fixed beams, J. Microelectromechanical Syst., 11 (6), 743–753, December 2002. 8. K...

Ngày tải lên: 10/08/2014, 05:20

... B.P. Johnson, S. Kim, K. Nabors, M.A. Shulman, J. K. White, A computer-aided design system for microelectromechanical systems (MEMCAD), J. Microelectromech. Syst., 1( 1), 3 13 , 19 92. 33. J. R. Gilbert, ... factor-M 10 1 10 0 10 1 10 1 10 0 Frequency ratio-r = ω ω n 1 2ζ M max = Q = 1 Q 2ζ = M max 2 Half power level Bandwidth © 2005 by Taylor & Francis Group, LLC E...

Ngày tải lên: 10/08/2014, 05:20

... Group, LLC 10 .4 .1 Operational Failure Mechanisms 388 10 .4 .1. 1 Wear 388 10 .4 .1. 2 Fracture 390 10 .4 .1. 3 Fatigue 3 91 10.4 .1. 4 Charging 3 91 10.4 .1. 5 Creep 3 91 10.4 .1. 6 Stiction and Adhesion 3 91 10.4.2 ... orientations of silicon wafers. ( ) ( ) ( ) 45° 90° n-type (11 1) p-type (11 1) p-type (10 0) n-type (10 0) primary ( 011 ) primary ( 011 ) primary ( 011 ) prim...

Ngày tải lên: 05/03/2014, 15:20