MEMS Mechanical Sensors - Stephen Beeby Part 12 potx
MEMS Mechanical Sensors stephen beeby ppt
... Publication Data Beeby, Stephen. MEMS mechanical sensors. — (Artech House MEMS library) 1. Microelectricalmechanical systems—Design and construction 2. Transducers I. Beeby, Stephen 621.3’81 ISBN ... review here, but merely to indicate the various features and functionality ix MEMS Mechanical Sensors Stephen Beeby Graham Ensell Michael Kraft Neil White Artech House, Inc...
Ngày tải lên: 27/06/2014, 18:20
Friction and Lubrication in Mechanical Design Episode 2 Part 12 potx
... data: h2 = 0.000 6in. , m = 0.000 9in. /in. , 18 spm, SAE 5 oil, 25 °C. at four different instances in time, as indicated by (a), (b), (c), and (d) in Fig. 13 .20 . The corresponding instantaneous ... sures ranging from 125 0 to 21 40 MPa (1.8 1 x 10’ - 3.10 x 10’ psi) and slid- ing speeds from 0.4 to 1.3 m/sec (943-3 1 42 in. /min). Temperature...
Ngày tải lên: 05/08/2014, 09:20
MEMS Mechanical Sensors - Stephen Beeby Part 1 potx
... 10 7 5.6.4 Magnetic 10 9 5.7 Smart Sensors 10 9 References 11 2 CHAPTER 6 Pressure Sensors 11 3 6 .1 Introduction 11 3 6.2 Physics of Pressure Sensing 11 4 6.2 .1 Pressure Sensor Specifications 11 7 6.2.2 Dynamic ... Data Beeby, Stephen. MEMS mechanical sensors. — (Artech House MEMS library) 1. Microelectricalmechanical systems—Design and construction 2. Transducers I....
Ngày tải lên: 10/08/2014, 05:20
MEMS Mechanical Sensors - Stephen Beeby Part 2 doc
... Techniques Table 2. 4 Properties of CVD Silicon Dioxide PECVD APCVD LPCVD LPCVD LPCVD Process gases used SiH 4 +O 2 (or N 2 O) SiH 4 +O 2 SiH 4 +O 2 TEOS+O 2 SiCl 2 H 2 +N 2 O Deposition temp. (°C) 25 0 400 ... 1.44 1.44 1.46 1.46 Density (gcm –3 ) 2. 3 1 2 2.1 2. 2 2. 2 Vertically etched step in deposited layer Deposition of PSG or BPSG Reflow at high temperature Figure...
Ngày tải lên: 10/08/2014, 05:20
MEMS Mechanical Sensors - Stephen Beeby Part 4 pdf
... packaged MEMS mechanical sensor. Finally, Section 4. 4 .4 discusses the latest developments and looks towards future packaging trends. 4. 4.1 Protection of the Sensor from Environmental Effects MEMS mechanical ... pressure was determined. 3.2.2 .4 MEMS Pro /MEMS Xplorer (MEMScAP) MEMS Pro and MEMS Xplorer are PC and Unix-based CAD tools, respectively, and are supplied throu...
Ngày tải lên: 10/08/2014, 05:20
MEMS Mechanical Sensors - Stephen Beeby Part 5 docx
... Vol. 50 , 2000, pp. 51 5 52 3. [36] Germer, W., and G. Kowalski, Mechanical Decoupling of Monolithic Pressure Sensors in Small Plastic Encapsulants,” Sensors and Actuators, Vol. A23, 1990, pp. 10 65 1069. [37] ... 200 35 14 Glass Pb glass 450 –800 0. 25 2 60 Anodic Pyrex/ Borofloat 33 250 50 0 1.09 63 Epoxy Epoxy (Ag loaded) 150 1.2 0.2–27 Thermoplastic Thermoplastic 150 3 0.41 RTV si...
Ngày tải lên: 10/08/2014, 05:20
MEMS Mechanical Sensors - Stephen Beeby Part 7 pot
... Microstructures,” Proc MEMS ’93, 1993, pp. 272 – 277 . [13] Walker,J. A., K. J. Gabriel, and M. Mehregany, “Thin-Film Processing of TiNi Shape Mem - ory Alloy,” Sensors and Actuators, Vol. A21–23, 1990, ... in more detail particular aspects relating to MEMS pressure sensors. This review of traditional diaphragm theory is particularly relevant in the packaging of MEMS technology p...
Ngày tải lên: 10/08/2014, 05:20
MEMS Mechanical Sensors - Stephen Beeby Part 8 doc
... Digest 1 985 Int. Conf. on Solid State Sensors and Actuators (Transducers 85 ), June 11–14, 1 985 , Philadelphia, PA, pp. 186 – 188 . [55] Catling, D. C., “High-Sensitivity Silicon Capacitive Sensors ... Micromachined Reso - nant Pressure Sensor,” Proc. 8th Int. Conf. on Solid State Sensors and Actuators (Transduc - ers ’95) and Eurosensors IX, Stockholm, Sweden, June 25–29, 199...
Ngày tải lên: 10/08/2014, 05:20
MEMS Mechanical Sensors - Stephen Beeby Part 9 pot
... 151 [99 ] Buff, W., et al., “Universal Pressure and Temperature SAW Sensor for Wireless Applica - tions,” Proc. 199 7 Ultrasonics Symp., Toronto, Canada, October 5–8, 199 7, Vol. 1, pp. 3 59 362. [100] ... Mastrangelo, “A Low-Voltage Force Balanced Pressure Sensor with Hermetically Sealed Servomechanism,” Proc. 12th IEEE Intl. Workshop on MEMS, Orlando, FL, January 17–21, 199 9, pp. 49...
Ngày tải lên: 10/08/2014, 05:20
MEMS Mechanical Sensors - Stephen Beeby Part 10 pptx
... monitoring) 0 100 Hz < ;10 mG 100 G Vibration monitoring 1 100 kHz < ;100 mG 10 kG Virtual reality (head-mounted displays and data gloves) 0 100 Hz <1mG ±10G Smart ammunition 10 Hz to 100 kHz 1 G 100 ... systems 0 100 Hz 0 100 Hz <1°/sec <0.1°/sec 100 °/sec 100 °/sec Inertial navigation 0 10 Hz < ;10 –4 °/sec 10 /sec Platform stabilization (e.g., for video camera) 0 10...
Ngày tải lên: 10/08/2014, 05:20
MEMS Mechanical Sensors - Stephen Beeby Part 11 pps
... in-plane axis (x-axis), which allows relatively large drive amplitudes. Any angular rate signal about the out-of-plane axis (z-axis) excites a secondary motion along the other in-plane axis (y-axis). ... Conf. Solid-State Sensors and Actuators (Transducer ’93), Yokohama, Japan, 1993, pp. 832–835. [9] Smith, T., et al., “Electro -Mechanical Sigma-Delta Converter for Acceleration Measure -...
Ngày tải lên: 10/08/2014, 05:20
MEMS Mechanical Sensors - Stephen Beeby Part 12 potx
... made of 100-nm-thick and 5 0- m-long chrome/nickel, suspended above the wafer plane by two 0.4-mm- long beams. (After: [65].) (d) A gold or platinum thin-film is enclosed in a 2. 4- m-thick polyimide membrane. ... wire Figure 9.6 Schematics of anemometers: (a) The sensing part is a 400 ì 30 0- m 2 area suspended at the end of a 3 0- m-thick and 1.6-mm-long silicon beam, thermally is...
Ngày tải lên: 10/08/2014, 05:20
MEMS Mechanical Sensors - Stephen Beeby Part 13 pot
... the shear force act- ing on the plate. (After: [119].) (b) Drawing of the surface fence sensor for wall shear stress measurements (5-mm-long, 10 0- to 30 0- m-high, and 7- to 1 0- m-thick silicon fence). (After: ... turbine wheel of 15.8-mm diameter in a channel. (c) Torque sensor; the two sides of the sensor are identical. The torque-sensing element is a 30 0- m-thick, 2-mm-wide,...
Ngày tải lên: 10/08/2014, 05:20
Microengineering MEMs and Interfacing - Danny Banks Part 12 potx
... Francis Group, LLC 214 Microengineering, MEMS, and Interfacing: A Practical Guide With plastic packages, a similar attach-to-base/bond-wires/seal-with-lid pro- cess may be used. After wire ... Obviously, if microsystems consisting of many microscopic parts have to be assem- bled by hand, this can be a costly and time-consuming process. Hand assembly may be acceptable for device d...
Ngày tải lên: 10/08/2014, 05:20