MEMS Mechanical Sensors - Stephen Beeby Part 1 potx
MEMS Mechanical Sensors - Stephen Beeby Part 1 potx
... 10 7
5.6.4 Magnetic 10 9
5.7 Smart Sensors 10 9
References 11 2
CHAPTER 6
Pressure Sensors 11 3
6 .1 Introduction 11 3
6.2 Physics of Pressure Sensing 11 4
6.2 .1 Pressure Sensor Specifications 11 7
6.2.2 Dynamic ... Data
Beeby, Stephen.
MEMS mechanical sensors. — (Artech House MEMS library)
1. Microelectricalmechanical systems—Design and construction 2. Transducers
I....
MEMS Mechanical Sensors - Stephen Beeby Part 12 potx
... —
Kaltsas et al.
[52]; 19 99
0. 41 40 cm/s 6.0 (mV/W)/(m/s) — Nitrogen 1. 1 × 1. 5 mm
2
de Bree et al.
[68]; 19 99
10 0 µm/s to 1
m/s
— A few
milliseconds
Air —
Ashauer et al.
[ 41] ; 19 99
0 .1 15 0 mm/s — 2 ms ... is made of
10 0-nm-thick and 5 0- m-long chrome/nickel, suspended above the wafer plane by two 0.4-mm-
long beams. (After: [65].) (d) A gold or platinum thin-film is en...
MEMS Mechanical Sensors - Stephen Beeby Part 2 doc
... tensile 1 tensile
Density (gcm
1
) 2.4–2.8 2.9–3 .1
Refractive index 1. 85–2.5 2. 01
Dielectric constant 6–9 6–7
Dielectric strength (10
6
Vcm
1
)5 10
Resistivity (Ω-cm) 10
6
10
15
10
16
Energy ... 4.6
Thermal expansion coefficient (10
–6
K
1
) 0.55 3.25
Thermal conductivity (Wm
1
K
1
) 1. 38 1. 13
Specific heat (Jg
1
K
1
) 0.787 0.726
Refractive index 1. 54...
MEMS Mechanical Sensors - Stephen Beeby Part 4 pdf
... 3 .10 Typical ANSYS routine.
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1...
MEMS Mechanical Sensors - Stephen Beeby Part 5 docx
... Transducers ’ 01/ Eurosensors XV, 11 th
International Conference on Solid State Sensors and Actuators, Munich, Germany, June
10 14 , 20 01, Digest of Technical Papers, Vol. 1, pp. 518 –5 21.
[ 21] Renard, ... Relief,” J. Micromech. Microeng., Vol. 3, 19 93, pp.
243–246.
[ 41] Vaganov, V. L., “Construction Problems in Sensors, ” Sensors and Actuators, Vol. A28,
19 91, pp. 16 1 17 2...
MEMS Mechanical Sensors - Stephen Beeby Part 7 pot
... Instrum., Vol. 18 , 19 85,
pp. 10 3 11 5.
[5] Greenwood, J. C., “Silicon in Mechanical Sensors, ” J. Phys. E: Sci. Instrum., Vol. 21, 19 88,
pp. 11 14 11 28.
[6] Stemme, G., “ Resonant Silicon Sensors, ” J. ... Sensors and Materials, Vol. 5, No. 3, 19 93,
pp. 14 3 18 1.
[9] Newell, W. E., “Miniaturization of Tuning Forks,” Science, Vol. 16 1, September 19 68, pp.
13 20 13 26....
MEMS Mechanical Sensors - Stephen Beeby Part 8 doc
... polysili
-
con, both flat [11 1, 11 2] and corrugated [11 3, 11 4], nitride (as shown in Fig
-
ure 6.28), and boron-doped silicon [11 5]. Other examples can be found in the
literature [10 6, 10 9, 11 6] including ... 19 90, pp. 10 03 10 06.
[36] von-Berg, J., et al., “A Piezoresistive Low-Pressure Sensor Fabricated Using Silicon-on-
Insulator (SOI) for Harsh Environments,” TRANS...
MEMS Mechanical Sensors - Stephen Beeby Part 9 pot
... Nuremberg, Germany, May 13 15 , 19 97, Vol. A5 .1, pp. 7 12 .
[18 ] Greenwood, J. C., “Silicon in Mechanical Sensors, ” J. Phys. E: Sci. Instrum., Vol. 21, 19 88,
pp. 11 14 11 28.
[19 ] Greenwood, J. C., ... Conference Optoelectronic and Elec
-
tronic Sensors II, Szczyrk, Poland, May 13 16 , 19 96, SPIE, Vol. 3054, 19 96, pp. 10 4 11 0.
[11 ] Gass, V., et al., “Micro-Torqu...
MEMS Mechanical Sensors - Stephen Beeby Part 10 pptx
... systems
0 10 0Hz
0 10 0Hz
< ;1 /sec
<0 .1 /sec
10 0°/sec
10 0°/sec
Inertial navigation 0 10 Hz < ;10
–4
°/sec 10 °/sec
Platform stabilization
(e.g., for video camera)
0 10 0 Hz <0 .1 /sec 10 0°/sec
Virtual ... microgravity
measurements
0 10 Hz < ;1 µG ±1G
Medical applications
(patient monitoring)
0 10 0 Hz < ;10 mG 10 0G
Vibration monitoring 1 10 0 kHz < ;10 0 mG 10 kG
Vi...
MEMS Mechanical Sensors - Stephen Beeby Part 11 pps
... IEEE J. Solid-State Circuits, Vol. 30, No. 12 , 19 95, pp. 13 67 13 73.
[11 ] Allen, H. V., S. C. Terry, and W. Knutti, “Understanding Silicon Accelerometers,” Sensors,
19 89, pp. 1 6.
[12 ] Barth, P. ... Orlando, FL, 19 99, pp. 326–3 31.
[27] Hierold, C., et al., “A Pure CMOS Surface-Micromachined Integrated Accelerometer,” Sen
-
sors and Actuators, Vol. A57, 19 96, pp. 11 1...
Từ khóa:
- sửa chữa và quấn lại động cơ điện part 1 potx
- bài tập dài điều khiển robot công nghiệp part 1 potx
- thực tế tốt nghiệp tại cộng đồng nội part 1 potx
- thiết kế bài giảng vật lý 10 tập 1 part 5 potx
- thiết kế bài giảng vật lý 10 tập 1 part 6 potx
- hướng dẫn học pom part 1
- bài giảng lập trình web lâm nhựt khang part 1
- 50 harvard essays part 1
- toefl cbt book part 1