MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 8 doc

... 9 (3), 345, 1997. Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c0 08 Final Proof page 180 1.9.2005 12:05pm 180 MEMS and Microstructures in Aerospace Applications © 2006 ... selecting surface materials, spacecraft thermal Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c009 Final Proof page 190 1.9.2005...

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... Course, IEEE, 1992.) Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c005 Final Proof page 98 25 .8. 2005 3:39pm 98 MEMS and Microstructures in Aerospace Applications © 2006 ... certain devices, such as Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c005 Final Proof page 96 25 .8. 2005 3:39pm 96 MEMS...

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... health and safety. Both critical and Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c016 Final Proof page 360 1.9.2005 12:56pm 360 MEMS and Microstructures in Aerospace Applications © ... vehicle interfaces and drivers Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c016 Final Proof page 3 58 1.9.200...

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... trademarks, and are used only for identification and explanation without intent to infringe. Library of Congress Cataloging -in- Publication Data Osiander, Robert. MEMS and microstructures in aerospace applications ... Microelectromechanical Systems and Microstructures in Aerospace 347 M. Ann Garrison Darrin and Dawnielle Farrar Osiander / MEMS and microstru...

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... Directional etching of crystalline silicon. Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c003 Final Proof page 42 1.9.2005 8: 59pm 42 MEMS and Microstructures in Aerospace Applications features ... such as electromagnetic or Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c002 Final Proof page 28 1.9.20...

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... micromachining etches with techniques such as etch stops and Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c003 Final Proof page 62 1.9.2005 9:00pm 62 MEMS and Microstructures in ... functional material for MEMS applications, Journal of Micromechanical Microengineering, 12, pp. 3 68 374, 2002. Osiander / MEMS and microstructures in...

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... August 1991. ESA SP-320. Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c004 Final Proof page 82 25 .8. 2005 3:40pm 82 MEMS and Microstructures in Aerospace Applications © 2006 ... effects, and dendrite growth. Internal moisture-related failure Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c004 Final...

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... shift between the input and output. Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c0 08 Final Proof page 160 1.9.2005 12:05pm 160 MEMS and Microstructures in Aerospace Applications © ... Center and from Mihailovich, R. E., et al. ) Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c0 08 Final Proof...

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... 14th Micro- mecahnics Europe Workshop (MM‘03) 14 (9), 82 , 2004. Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c010 Final Proof page 2 28 1.9.2005 12:13pm 2 28 MEMS and Microstructures ... Conference Proceedings 3, 31565, 2001. Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c010 Final Proof page 226 1.9.2005...

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... potential particulates from integration and Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c012 Final Proof page 281 1.9.2005 9:13pm MEMS Packaging for Space Applications 281 © ... package substrate. Osiander / MEMS and microstructures in Aerospace applications DK3 181 _c012 Final Proof page 2 78 1.9.2005 9:13pm 2 78 MEMS and M...

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