The MEMS Handbook MEMS Applications (2nd Ed) - M Gad el Hak Episode 1 Part 10 ppsx
The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 10 ppsx
... (19 92)
“Piezoelectric Micromotors for Microrobots,” IEEE J. MEMS, 1( 1 (March)), pp. 44– 51.
Frank, T. (19 98) “Two-Axis Electrodynamic Micropositioning Devices,” J. Micromech. Microeng., 8,
pp. 11 4 11 8.
Fujita, ... Capture
Pumps
8.4 Pump-Down and Ultimate Pressures for MEMS
Vacuum Systems 8 -1 4
8.5 Operating Pressures and N
.
Requirements in MEMS
Instruments 8 -1 4
8.6 Summary...
The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 9 ppsx
... M. C., Sen, M. , and Gad- el- Hak, M. (19 97) “Navier–Stokes Simulations of a Novel Viscous
Pump,” J. Fluids Eng., 11 9, pp. 372–382.
Sharatchandra, M. C., Sen, M. , and Gad- el- Hak, M. (19 98a) “Thermal ... term MEMS- based microrobot”is introduced and used .The term MEMS-
based microrobot” differs from the notation originally used by Dario et al., but the content is the...
The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 1 ppt
... Group, LLC
12 Microchannel Heat Sinks Yitshak Zohar 1 2 -1
13 Flow Control Mohamed Gad- el- Hak 1 3 -1
14 Reactive Control for Skin-Friction Reduction Haecheon Choi 1 4 -1
15 Toward MEMS Autonomous Control ... Fan-Gang Tseng 1 0 -1
11 Micro Heat Pipes and Micro Heat Spreaders G. P. Peterson
and Choondal B. Sobhan 1 1- 1
xi
© 2006 by Taylor & Francis Group, LLC
v...
The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 2 pot
... In monolithically integrated technology, the
2-2 2 MEMS: Applications
0
5
10
15
20
10 0 11 0 12 0 13 0 14 0 15 0
Damping Ratio
ξ = 0.0
ξ = 0 .1
ξ = 1. 0
ξ = 1. 5
Beam length ( m)
Maximum deflection ( m)
FIGURE ... operation.
2mgh
ᎏ
k
2-2 0 MEMS: Applications
0
0.05
0 .1
0 .15
0.2
1 −0.5
0 0.5 1
Temperature
T = 90°C
T = 25°C
T = −40°C
Distance from die center...
The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 3 pot
... 13 8 .1
11. 7 ⍀ cm, n-type 10 2.2 53.4 13 .6
0
0
0.5
1. 0
1. 5
10
16
10
16
10
17
10
18
10
19
10
20
10
17
10
18
10
19
10
20
0.5
1. 0
1. 5
N (cm
−3
)
N (cm
−3
)
P(N,T)
P(N,T)
p-Si
n-Si
T = −75°C
T = −50°C
T ... system. It can then be
stated that:
π
l
ϭ
π
11
ϩ 2(
π
44
ϩ
π
12
Ϫ
π
11
)(l
2
1
m
2
1
ϩ l
2
1
n
2
1
ϩ n
2
1
m
2
1
) (3. 21)
π
t...
The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 5 potx
... actua-
tors are shown in Figure 4. 21.
8.854 ϫ 10
12
F /m ϫ 1 ϫ 40 ϫ 10
Ϫ6
m ϫ (80V)
2
ᎏᎏᎏᎏᎏ
2 ϫ 1 ϫ 10
Ϫ6
m
ε
0
ε
r
zV
2
ᎏ
2y
dW
ᎏ
dx
8.854 ϫ 10
Ϫ
12
F /m ϫ 1 10 ϫ 10
Ϫ
6
m ϫ 6 ϫ 10
Ϫ
6
m ϫ (80 ... links the spoked wheel to the mirror
π
2
ϫ 15 5 ϫ 10
9
N /m
2
ϫ 3.3 ϫ 10
Ϫ25
m
4
ᎏᎏᎏᎏᎏ
4 ϫ (300 ϫ 10
Ϫ6
m)
2
π
2
EI
ᎏ
4L
2
4 ϫ 10
Ϫ6...
The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 6 ppt
... models, and thermodynamical mod-
els. Some models are directly structured to describe the behavior of SMA fibers (a one-dimensional prob-
lem), while other models are developed for more complex ... magnetic field. In 18 65, James Clerk Maxwell (18 65) developed the first com-
prehensive theory on electromagnetic field, introducing the modern concepts of electromagnetic waves.
Microactu...
The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 7 pptx
... [e.g.Wilkinson, 19 90; Gad-
el- Hak, 19 94; Moin and Bewley, 19 94], and in the books by Gad- el- Hak et al. (19 98), Gad- el- Hak (2000) and
Gad- el- Hak and Tsai (2005). The topic is also detailed in
Chapters 13 , 14 ... method (or more correctly thermal-element method) are both well suited for MEMS fabri-
cation. Figure 6 .18 shows a schematic of the principle...
The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 8 docx
... (19 67)
Schewe (19 83)
Blake (19 86)
Lauchle (19 87)
Spalart (19 88)
Choi & Moin (19 90)
Farabee (19 91)
p
rms
/
w
Re
u
8
7
6
5
4
3
2
1
0
10
2
10
3
10
4
10
5
1
333
19
33
66
7.2
21. 6
40
18 0
256
FIGURE ... even very complex systems. The analog model relies on the fact that there is a relation-
ship between the geometry of the mechano-acoustical elements a...
The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 2 ppsx
... Ϫ
ᎏ
͙
1
2
ෆ
ᎏ
)
L, will then be driven by this sur-
face flow above the electrodes.
͙
2
ෆ
ᎏ
2
9 -1 2 MEMS: Applications
−20 10 0 10 20
−20
10
0
10
20
(b)
−20 10 0 10 20
−30
−20
10
0
10
20
30
(a)
−20 ... the bubble
1 0 -1 0 MEMS: Applications
FIGURE 10 .11 (See color insert following page 2 -1 2.)Bubble volume variation versus time for three different heat...
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