The MEMS Handbook MEMS Applications (2nd Ed) - M Gad el Hak Episode 1 Part 8 docx

... (19 67) Schewe (19 83 ) Blake (19 86 ) Lauchle (19 87 ) Spalart (19 88 ) Choi & Moin (19 90) Farabee (19 91) p rms /␶ w Re u 8 7 6 5 4 3 2 1 0 10 2 10 3 10 4 10 5 1 333 19 33 66 7.2 21. 6 40 18 0 256 FIGURE ... even very complex systems. The analog model relies on the fact that there is a relation- ship between the geometry of the mechano-acoustical ele...

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... Group, LLC 12 Microchannel Heat Sinks Yitshak Zohar 1 2 -1 13 Flow Control Mohamed Gad- el- Hak 1 3 -1 14 Reactive Control for Skin-Friction Reduction Haecheon Choi 1 4 -1 15 Toward MEMS Autonomous Control ... in Sigma Gamma Tau and Pi Tau Sigma, and a member-at-large in Sigma Xi. From 19 88 to 19 91, Dr. Gad- el- Hak served as Associate Editor for AIAA Journal. He...

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... In monolithically integrated technology, the 2-2 2 MEMS: Applications 0 5 10 15 20 10 0 11 0 12 0 13 0 14 0 15 0 Damping Ratio ξ = 0.0 ξ = 0 .1 ξ = 1. 0 ξ = 1. 5 Beam length ( m) Maximum deflection ( m) FIGURE ... transferred from the drive mass to the sense mass in an efficient way; yet the feed- back from the motion of the sense mass to the drive mass is kep...

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... 13 8 .1 11. 7 ⍀ cm, n-type 10 2.2 53.4 13 .6 0 0 0.5 1. 0 1. 5 10 16 10 16 10 17 10 18 10 19 10 20 10 17 10 18 10 19 10 20 0.5 1. 0 1. 5 N (cm −3 ) N (cm −3 ) P(N,T) P(N,T) p-Si n-Si T = −75°C T = −50°C T ... system. It can then be stated that: π l ϭ π 11 ϩ 2( π 44 ϩ π 12 Ϫ π 11 )(l 2 1 m 2 1 ϩ l 2 1 n 2 1 ϩ n 2 1 m 2 1 ) (3. 21) π t ϭ π 1...

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... actua- tors are shown in Figure 4. 21. 8. 854 ϫ 10 12 F /m ϫ 1 ϫ 40 ϫ 10 Ϫ6 m ϫ (80 V) 2 ᎏᎏᎏᎏᎏ 2 ϫ 1 ϫ 10 Ϫ6 m ε 0 ε r zV 2 ᎏ 2y dW ᎏ dx 8. 854 ϫ 10 Ϫ 12 F /m ϫ 1 10 ϫ 10 Ϫ 6 m ϫ 6 ϫ 10 Ϫ 6 m ϫ (80 ... and the mirror. 1 ᎏᎏᎏᎏ ΂ 6 ϫ (45 m) 2 Ϫ 3 ϫ (45 m) 2 ΃ 17 m ᎏ 545 m 2.5 m ϫ (1. 5 m) 3 ᎏᎏᎏ 12 tw 3 ᎏ 12 P ᎏ 6EI 17 m ᎏ 545 m dy ᎏ dx P ᎏ 6EI...

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... magnetic field. In 18 65, James Clerk Maxwell ( 18 65) developed the first com- prehensive theory on electromagnetic field, introducing the modern concepts of electromagnetic waves. Microactuators 5 -1 5 (a) ... models, and thermodynamical mod- els. Some models are directly structured to describe the behavior of SMA fibers (a one-dimensional prob- lem), while other models are develope...

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... [e.g.Wilkinson, 19 90; Gad- el- Hak, 19 94; Moin and Bewley, 19 94], and in the books by Gad- el- Hak et al. (19 98) , Gad- el- Hak (2000) and Gad- el- Hak and Tsai (2005). The topic is also detailed in Chapters 13 , 14 ... method (or more correctly thermal-element method) are both well suited for MEMS fabri- cation. Figure 6 . 18 shows a schematic of the principl...

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... M. C., Sen, M. , and Gad- el- Hak, M. (19 97) “Navier–Stokes Simulations of a Novel Viscous Pump,” J. Fluids Eng., 11 9, pp. 372– 382 . Sharatchandra, M. C., Sen, M. , and Gad- el- Hak, M. (19 98a) “Thermal ... pp. 12 8 13 1, 4–7 February, Travemunde, Germany. Gad- el- Hak, M. (19 94) “Interactive Control of Turbulent Boundary Layers: A Futuristic Overview,” AIAA J., 32, pp...

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... Capture Pumps 8. 4 Pump-Down and Ultimate Pressures for MEMS Vacuum Systems 8 -1 4 8. 5 Operating Pressures and N . Requirements in MEMS Instruments 8 -1 4 8. 6 Summary of Scaling Results 8 -1 5 8. 7 Alternative ... (19 92) “Piezoelectric Micromotors for Microrobots,” IEEE J. MEMS, 1( 1 (March)), pp. 44– 51. Frank, T. (19 98) “Two-Axis Electrodynamic Micropositioning Devices...

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... amplitude 0 1 4 8 1 9 2 13 5 22.5° Axisymmetric Helical (m= 1) m 0 500 10 00 15 00 2000 2500 3000 5 10 15 Helical mode phase 1 4 8 φ 1 (deg.) Device # m Slope = 22.2 Slope = 91. 2 Slope = 17 9.2 1 9 2 13 5 22.5° Device ... desired. Towards MEMS Autonomous Control of Free-shear Flows 1 5 -1 5 –20 10 0 10 20 30 40 0 20 40 60 80 10 0 12 0 14 0 2 .10 × 1...

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