The MEMS Handbook MEMS Applications (2nd Ed) - M Gad el Hak Episode 1 Part 5 potx

... and the mirror. 1 ᎏᎏᎏᎏ ΂ 6 ϫ ( 45 m) 2 Ϫ 3 ϫ ( 45 m) 2 ΃ 17 m ᎏ 54 5 m 2 .5 m ϫ (1. 5 m) 3 ᎏᎏᎏ 12 tw 3 ᎏ 12 P ᎏ 6EI 17 m ᎏ 54 5 m dy ᎏ dx P ᎏ 6EI 1 ᎏ 3.6 N m 1 ᎏ 97 N m 1 ᎏ k 2 1 ᎏ k 1 1 ᎏ k eq 15 5 ... links the spoked wheel to the mirror π 2 ϫ 15 5 ϫ 10 9 N /m 2 ϫ 3.3 ϫ 10 Ϫ 25 m 4 ᎏᎏᎏᎏᎏ 4 ϫ (300 ϫ 10 Ϫ6 m) 2 π 2 EI ᎏ 4L 2 4 ϫ 10...

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... corresponding 1 2-2 0 MEMS: Applications 75 70 65 60 55 50 45 40 35 1 10 10 0 10 00 T (°C) q (W/cm 2 ) (b) 250 200 15 0 10 0 50 0 5 10 15 20 25 30 0 T (°C) q (W) (a) q T Plateau 0. 25 mL/min (80 kPa), device I 1. 1 ... pattern. Microchannel Heat Sinks 1 2 -1 9 0 50 10 0 15 0 200 250 300 0 10 15 20 x (mm) T (°C) 0 mL/min (0 kPa) 0. 25 mL/min (80 k...

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... Group, LLC 12 Microchannel Heat Sinks Yitshak Zohar 1 2 -1 13 Flow Control Mohamed Gad- el- Hak 1 3 -1 14 Reactive Control for Skin-Friction Reduction Haecheon Choi 1 4 -1 15 Toward MEMS Autonomous Control ... Plummer 4 -1 5 Microactuators Alberto Borboni 5 -1 6 Sensors and Actuators for Turbulent Flows Lennart Löfdahl and Mohamed Gad- el- Hak 6 -1 7 Microrobo...

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... In monolithically integrated technology, the 2-2 2 MEMS: Applications 0 5 10 15 20 10 0 11 0 12 0 13 0 14 0 15 0 Damping Ratio ξ = 0.0 ξ = 0 .1 ξ = 1. 0 ξ = 1. 5 Beam length ( m) Maximum deflection ( m) FIGURE ... operation. 2mgh ᎏ k 2-2 0 MEMS: Applications 0 0. 05 0 .1 0 . 15 0.2 1 −0 .5 0 0 .5 1 Temperature T = 90°C T = 25 C T = −40°C Distance from...

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... n-type 10 2.2 53 .4 13 .6 0 0 0 .5 1. 0 1. 5 10 16 10 16 10 17 10 18 10 19 10 20 10 17 10 18 10 19 10 20 0 .5 1. 0 1. 5 N (cm −3 ) N (cm −3 ) P(N,T) P(N,T) p-Si n-Si T = − 75 C T = 50 °C T = − 25 C T = ... system. It can then be stated that: π l ϭ π 11 ϩ 2( π 44 ϩ π 12 Ϫ π 11 )(l 2 1 m 2 1 ϩ l 2 1 n 2 1 ϩ n 2 1 m 2 1 ) (3. 21) π t ϭ π 12...

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... 45 ÷ 95 45 ÷ 95 55 .1 ÷ 55 .5 Ni H Ͼ 95 95 ÷ 11 5 55 .0 Ni TABLE 5 .11 Some Common Commercial SMA Components Treatment Description Characteristics Cold processed The client execute thermal treatment ... micromechanical models, and thermodynamical mod- els. Some models are directly structured to describe the behavior of SMA fibers (a one-dimensional prob- lem), while other m...

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... [e.g.Wilkinson, 19 90; Gad- el- Hak, 19 94; Moin and Bewley, 19 94], and in the books by Gad- el- Hak et al. (19 98), Gad- el- Hak (2000) and Gad- el- Hak and Tsai (20 05) . The topic is also detailed in Chapters 13 , 14 ... method (or more correctly thermal-element method) are both well suited for MEMS fabri- cation. Figure 6 .18 shows a schematic of the principl...

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... (19 67) Schewe (19 83) Blake (19 86) Lauchle (19 87) Spalart (19 88) Choi & Moin (19 90) Farabee (19 91) p rms /␶ w Re u 8 7 6 5 4 3 2 1 0 10 2 10 3 10 4 10 5 1 333 19 33 66 7.2 21. 6 40 18 0 256 FIGURE ... 50 m/ s 6,7 207 21. 0 2 31 Parallel Configuration at 50 m/ s 5. 6 19 2 17 .3 16 0 Thermal capacity, (µJ/K) 1. 2 37 — — Thermal time-constant at zero...

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... M. C., Sen, M. , and Gad- el- Hak, M. (19 97) “Navier–Stokes Simulations of a Novel Viscous Pump,” J. Fluids Eng., 11 9, pp. 372–382. Sharatchandra, M. C., Sen, M. , and Gad- el- Hak, M. (19 98a) “Thermal ... varying the channel height 6-6 4 MEMS: Applications 30 m Cured polyimide Heater  Silicon plate Bonding pads Metal ( 1- e)b ( 1- e)a Silicon a b 50 0 m 600 m...

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... Capture Pumps 8.4 Pump-Down and Ultimate Pressures for MEMS Vacuum Systems 8 -1 4 8 .5 Operating Pressures and N . Requirements in MEMS Instruments 8 -1 4 8.6 Summary of Scaling Results 8 -1 5 8.7 Alternative ... (19 92) “Piezoelectric Micromotors for Microrobots,” IEEE J. MEMS, 1( 1 (March)), pp. 44– 51 . Frank, T. (19 98) “Two-Axis Electrodynamic Micropositioning Devices,” J....

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