The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 3 pot

... Saint-Exupộry, 19 0 019 44, in Citadelle [The Wisdom of the Sands]) â 2006 by Taylor & Francis Group, LLC 12 Microchannel Heat Sinks Yitshak Zohar 1 2 -1 13 Flow Control Mohamed Gad- el- Hak 1 3 -1 14 ... States of America on acid-free paper 10 9 8 7 6 5 4 3 2 1 International Standard Book Number -1 0 : 0-8 49 3-9 13 9-3 (Hardcover) International Standard Book...

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... future technology applications. In monolithically integrated technology, the 2- 2 2 MEMS: Applications 0 5 10 15 20 10 0 11 0 12 0 13 0 14 0 15 0 Damping Ratio ξ = 0.0 ξ = 0 .1 ξ = 1. 0 ξ = 1. 5 Beam length ... Solid-State Sensors and Actuators (Transducers ’97), pp. 28 3–86, IEEE, New York. 2- 2 8 MEMS: Applications â 20 06 by Taylor & Francis Group, LLC 0 40...

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... 42–49 Resistivity π 11 π 12 π 44 7.8 ⍀ cm, p-type 6.6 1. 1 13 8 .1 11. 7 ⍀ cm, n-type 10 2.2 53. 4 13 .6 0 0 0.5 1. 0 1. 5 10 16 10 16 10 17 10 18 10 19 10 20 10 17 10 18 10 19 10 20 0.5 1. 0 1. 5 N (cm 3 ) N (cm 3 ) P(N,T) P(N,T) p-Si n-Si T ... transformation of the coordinate system. It can then be stated that: π l ϭ π 11 ϩ 2( π 44 ϩ π 12 Ϫ π 11 )...

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... and the mirror. 1 6 ( 45 àm) 2 3 ( 45 àm) 2 17 àm 54 5 àm 2 .5 àm (1. 5 àm) 3 12 tw 3 12 P 6EI 17 àm 54 5 µm dy ᎏ dx P ᎏ 6EI 1 ᎏ 3.6 Nրm 1 ᎏ 97 Nրm 1 ᎏ k 2 1 ᎏ k 1 1 ᎏ k eq 15 5 GPa ϫ (2 .5 ... of thermal actua- tors are shown in Figure 4. 21. 8. 854 ϫ 10 12 F/m ϫ 1 ϫ 40 ϫ 10 Ϫ6 m ϫ (80V) 2 ᎏᎏᎏᎏᎏ 2 ϫ 1 ϫ 10 Ϫ6 m ε 0 ε r zV 2 ᎏ 2y dW ᎏ dx 8...

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... magnetic field. In 18 65 , James Clerk Maxwell (18 65 ) developed the first com- prehensive theory on electromagnetic field, introducing the modern concepts of electromagnetic waves. Microactuators 5 -1 5 (a) ... magnet — the presence of two poles and the attraction of oppo- site poles. In 17 50, John Michell (17 51) and then in 17 85, Charles Coulomb (17 85 17 89) developed a q...

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... Gad- el- Hak, 19 94; Moin and Bewley, 19 94], and in the books by Gad- el- Hak et al. (19 98), Gad- el- Hak (2000) and Gad- el- Hak and Tsai (2005). The topic is also detailed in Chapters 13 , 14 and 15 ... correctly thermal-element method) are both well suited for MEMS fabri- cation. Figure 6 .18 shows a schematic of the principle of operation of the two method...

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... (19 67) Schewe (19 83 ) Blake (19 86 ) Lauchle (19 87 ) Spalart (19 88 ) Choi & Moin (19 90) Farabee (19 91) p rms /␶ w Re u 8 7 6 5 4 3 2 1 0 10 2 10 3 10 4 10 5 1 333 19 33 66 7.2 21. 6 40 18 0 256 FIGURE ... 6-3 3 0 0.2 0.4 0.6 0 .8 1 0.6 0 .8 1 1.2 1. 4 20 40 60 80 10 0 x/L Pe 1- 0 .7Pe −0.5 ␶ w 1/ 3 ␶ w 1/ 3 0.5Pe −0.5 FIGURE 6.20 Pedley’s (...

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... 323–330. Sharatchandra, M.C., Sen, M., and Gad- el- Hak, M. ( 19 97 ) “Navier–Stokes Simulations of a Novel Viscous Pump,” J. Fluids Eng., 11 9, pp. 372–382. Sharatchandra, M.C., Sen, M., and Gad- el- Hak, M. ( 19 98 a) “Thermal ... pick-and-place systems can be achieved by microrobotic devices in the form of microtweez- ers and microgrippers [Kim et al., 19 92 ; Keller an...

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... “Electromagnetic Micro-Parts Conveyer with Coil-Diod Modules,” Tech. Digest, 10 th Int. Conf. Solid-State Sensors and Actuators (Transducers ’99), pp. 11 92 11 95, June 7 10 , Sendai, Japan. Ok, J., Chu, M., and ... wafers at the same time (several- devices-at-a-time process) originally developed for the IC industry but now also commonly used for MEMS fabrication. Serial manufactur...

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... Applications SP PER RB CL RV DR 1. E+00 1. E+ 02 1. E+04 1. E+06 1. E+08 1. E +10 1. E+ 12 1. E 22 1. E 21 1. E 20 1. E 19 1. E 16 1. E 17 1. E 18 1. E 15 1. E 14 1. E 13 1. E− 12 Q N DDP (1 stage) DDP(30 stages) DIA TM-4 DIF SCL -2 TM -2 T/DR ORB SCL SCW Isentropic Reversible ... 9) 0 .1 7.6E5 1. 4E- 12 7.8E- 12 7.6E6 1. 0 7.6E5 9E -1 5 5.2E -1 4 7.6E5 10...

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... MEMS: Applications 20 −10 0 10 20 20 −10 0 10 20 (b) 20 −10 0 10 20 −30 20 −10 0 10 20 30 (a) 20 −10 0 10 20 5 10 15 20 25 30 (d) 20 −10 0 10 20 5 10 15 20 25 30 − 3.0655 − 2. 2991 − 1.5 327 − 0.76636 0 0.766 36 1.5 327 2. 2991 3.0655 (c) FIGURE ... Suspensions,” J. Chem. Phys., 100, p. 4674. Hughes, M.P. (20 02) “Strategies for Dielectrophoretic Separation in L...

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... ϩ ΂ ΃ Ma 2 v ΅ Ϫ1 /2 Turbulent-incompressible Re v Ͼ 23 00, M v Ͻ 0 .2 (f v Re v ) ϭ 0. 038 ΂ ΃ 3/ 4 (11 .20 ) C ϭ 1.00 Turbulent-compressible Re v Ͼ 23 00, Ma v Ͼ 0 .2 (f v Re v ) ϭ 0. 038 ΂ ΃ 3/ 4 C ϭ ΄ 1 ... of the Fluid Dynamics of Drop-On Demand Jets,” IBM J. Res. Dev., 28 , pp. 32 2 33 . Fuller, S., and Jacobson, J. (20 00) “Ink Jet Fabricated Nanoparticle MEMS, ” Proc. I...

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... 1 2- 3 L W H Heat flux Forced convection Microchannels FIGURE 12. 1 Typical microchannel heat sink. â 20 06 by Taylor & Francis Group, LLC 1 1 -2 4 MEMS: Applications 0 40 80 120 160 20 0 24 0 28 0 0 ... the dynamic and frictional pressure drops in the 1 1-3 0 MEMS: Applications Methanol,  =10 degree 0.0 4. 0 8.0 12. 0 16.0 20 .0 24 .0 0 20 40 60 80 100...

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... associated with the CHF condition is the corresponding 1 2- 2 0 MEMS: Applications 75 70 65 60 55 50 45 40 35 1 10 100 1000 T (°C) q (W/cm 2 ) (b) 25 0 20 0 150 100 50 0 5 10 15 20 25 30 0 T (°C) q ... 1 2- 1 1 (a) Pressure microsensors Microchannel Inlet/outlet hole 0 5 10 15 20 25 30 35 40 0 50 0 1000 150 0 20 00 25 00 3000 350 0 4000 450 0 ∆P (...

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... others, Bushnell (1983; 1994); Wilkinson et al. (1988); Bushnell and McGinley (1989); Gad- el- Hak (1989; 20 00); Bushnell and Hefner (1990); Fiedler and Fernholz (1990); Gad- el- Hak and Bushnell ... direction, 9 2 w y 2 w y à y p z w y 2 v y 2 p y 2 u y 2 à y à y p x u y 2 U 2 o 2 U 2 o U o x 1 U o * v w U o * x (U o *) t 2...

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