The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 14 doc

... (1997) 155 — 2. 26 Tension Electroplated Greek and Ericson (1998) — 1.83 2. 20 2. 26 2. 49 Tension HI -MEMS films Sharpe and McAleavey (1998) â 20 06 by Taylor & Francis Group, LLC onto the structure. ... Microstructures: Experiments and Theory,” Proc. SPIE 322 5, pp. 12 22 . El Khakani, M.A., Chaker, M., Jean, A., Boily, S., and Kieffer, J.C. (1993) “Hardness and Young’s Modulu...

Ngày tải lên: 10/08/2014, 02:21

... molecular-based models and their relation to the continuum models previously considered. The most fundamental of the molecular models is deterministic. The motion of the molecules is gov- erned by the ... of state relating the different thermodynamic properties are needed. The stress–rate-of-strain relation and the heat-flux–temperature-gradient relation are approximately li...

Ngày tải lên: 10/08/2014, 02:21

... Microchannels,” in The Handbook of MEMS, M. Gad- el- Hak, ed., CRC Press, Boca Raton, Florida. Shih, J.C., Ho, C M., Liu, J., and Tai, Y C. (1995) “Non-Linear Pressure Distribution in Uniform Microchannels,” ... Smoluchowski, M. (1898) “Ueber Wärmeleitung in verdünnten Gasen,” Ann. Phys. Chem. 64, pp. 101–30. Went, F.W. (1968) The Size of Man,” Am. Sci. 56, pp. 40 0 41 3. 4-...

Ngày tải lên: 10/08/2014, 02:21

... applied elec- tric field 4. Sedimentation potential: electric field created by the motion of charged particles relative to a sta- tionary liquid (opposite of electrophoresis). 6.3.2 The Electro-Osmotic ... reason, the model with b ϭ Ϫ1 results in 10% error in the slip velocity 6-1 4 MEMS: Introduction and Fundamentals Boltzmann DSMC data b = 0 b = −1 0 .5 0 0.01 0. 05 0.1 0...

Ngày tải lên: 10/08/2014, 02:21

... Equation Including Thermal Creep Flow,” J. Tribol. 110, p. 253. Gad- el- Hak, M. (2002) “Flow Physics,” in Handbook of MEMS, 1st ed., M. Gad- el- Hak, ed., CRC Press, Boca Raton. Gallis, M.A., Rader, D.J., ... gas, the ther- mophoretic force can be calculated by integrating the momentum flux imparted by the molecules strik- ing the particle. The particle can be consider...

Ngày tải lên: 10/08/2014, 02:21

... between the Navier–Stokes solutions and the augmented Burnett solu- tions at the entrance, but as the local Knudsen number increases toward the exit of the channel, the dif- ference between the Navier–Stokes ... compute the super- sonic flow in a microchannel. The geometry and grid of the microchannel are shown in Figure 8.29. As the flow enters the channel, the ta...

Ngày tải lên: 10/08/2014, 02:21

... B. (2004) “Electrokinetically Driven Micro Flow Cytometers with Integrated Fiber Optics for On-Line Cell/Particle Detection,” Anal. Chim. Acta 507, pp. 163– 69. Gad- el- Hak, M. ( 199 9) The Fluid ... from the high-field–high-drift-velocity of the sample region to the low-field–low-drift-velocity region and accumulate, or stack, at the interface between the low and high conduc...

Ngày tải lên: 10/08/2014, 02:21

... in MEMS 1 1-1 5 10 0 10 −1 10 −2 10 −3 10 −4 10 −5 10 −1 10 0 10 1 ␨ Λ ␧ = 0.8 ␧ = 0.6 ␧ = 0.4 ␧ = 0.2 Λ 90 70 50 30 10 10 −1 10 0 10 1 0 φ (deg) ␧ = 0.8 ␧ = 0.8 ␧ = 0.9 FIGURE 11 .10 ... 701) Continuum flow Slip flow Molecular flow 10 10 10 8 10 6 10 4 10 2 10 −2 10 0 10 0 10 2 10 4 10 6 FIGURE 11.2 (See color insert following...

Ngày tải lên: 10/08/2014, 02:21

... problem, the dimensionless fluid velocities in the x- and y- directions are defined as U ϭ , V ϭ . (12.8d) Then the continuity Equation (12.2) requires that the z-component of the velocity field w ... energy in the thicker part of the film is greater than in its thin- ner part. Thus, the interfacial temperature at the depression is lower than at the crest of the inter...

Ngày tải lên: 10/08/2014, 02:21

... and thermal conductivity of the vapor with respect to the respective prop- erties of the liquid. The vapor dynamics are ignored in the one-sided model, and only the mass conser- vation and the ... respectively, the densities of the vapor and the liquid; v υ and v f are the vapor and liquid velocities at z ϭ h; and v i is the velocity of the interface. Equation (12....

Ngày tải lên: 10/08/2014, 02:21

... changes in the elements in the first column of the array. One aspect of performance concerns the steady-state error exhibited by the system. For example, from the time-domain solution of the previous ... 1948, 1950]. Because the real part of the pole corresponds to exponential solutions, if all the poles are in the left-half plane, the poles closest to the j ω -axi...

Ngày tải lên: 10/08/2014, 02:21

... refer to several other chapters in this handbook and to the recent reviews of Ho and Tai (1996, 1998), McMichael (1996), Gad- el- Hak (1996), and Löfdahl and Gad- el- Hak (1999). For a mathematical perspective, ... downstream. The estimation convolution kernels shown in Figure 15.9, on the other hand, extend well downstream of the measurement point. This accounts for the d...

Ngày tải lên: 10/08/2014, 02:21

... reviewed the applications of MEMS to flow con- trol. Gad- el- Hak (1999) discussed the fluid mechanics of microdevices, and Löfdahl and Gad- el- Hak (1999) provided an overview of the applications of MEMS ... Gradient The identity Equation (15. 13) is now simplified using the equations defining the state field Equation (15. 11), the perturbation field Equation (15....

Ngày tải lên: 10/08/2014, 02:21

... 16. 26 and 16. 27. Figure 16. 26 illustrates the response of the pendulum angle, and Figure 16. 27 illustrates the velocity of the pendulum. Figure 16. 28 illustrates the control effort. Because the ... V.V., and Vellekoop, M.J. (1997) “Design and Fabrication of Wireless Remotely Readable MEMS Based Microaccelerometers,” Smart Mater. Struct. 6(6), pp. 7308. 1 6-3 4 MEMS:...

Ngày tải lên: 10/08/2014, 02:21