... (1998) 158 Ϯ 22 0. 32 Ϯ 0. 02 0. 52 Ϯ 0. 02 Te nsion LIGA 4 films Sharpe and McAleavey (1998) 1 82 Ϯ 22 0. 42 Ϯ 0. 02 0.60 Ϯ 0.01 Te nsion HI -MEMS films Sharpe and McAleavey (1998) 153 Ϯ 14 — 1 .28 Ϯ 0 .24 * Bending ... indeterminate set of equations. The continuum model is easier to handle mathematically (and is also more familiar to most fluid dynamicists) than the alternativ...
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... ( 12. 82) are unchanged. j 2 ᎏ ρ υ j 2 ᎏ ρ υ 2 1 ᎏ 2 2 π R υ ᎏ M w ϑ s 3 /2 ᎏ ˆ αρ υ L 1 2- 3 6 MEMS: Introduction and Fundamentals © 20 06 by Taylor & Francis Group, LLC This must match with the ... Stöckelhuber, 20 03; Richardson et al., 20 03; M ller-Buschbaum, 20 03; Green and Ganesan, 20 03; Oron, 20 03; Manghi and Aubouy, 20 03; Reiter, 20 03]. 1 ᎏ 3 2...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 14 doc
... to the recent reviews of Ho and Tai (1996, 1998), McMichael (1996), Gad- el- Hak (1996), and Löfdahl and Gad- el- Hak (1999). For a mathematical perspective, refer to the recent dedicated volumes compiled ... are 1 ᎏ Re ∂p ᎏ ∂z ∂ ᎏ ∂x 1 ᎏ Re ∂p ᎏ ∂y ∂ ᎏ ∂x 1 ᎏ Re ∂p ᎏ ∂x ∂ ᎏ ∂x ∂w ᎏ ∂z ∂v ᎏ ∂y ∂u ᎏ ∂x Model-Based Flow Control for Distributed Architectures 1 5-3 © 20 06 by Tayl...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 3 pptx
... process. The present section discusses molecular-based models and their relation to the continuum models previously considered. The most fundamental of the molecular models is deterministic. The motion ... along their MEMS channel to measure the pressure. Figure 4.4 shows their measured mass flowrateversus the inlet Flow Physics 4-1 5 600 400 20 0 20 0 > Kn > 17 17 &...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 4 pps
... LLC 5 Integrated Simulation for MEMS: Coupling Flow-Structure- Thermal-Electrical Domains 5.1 Introduction 5-1 Full-System Simulation • Computational Complexity of MEMS Flows • Coupled-Domain Problems • A ... 1) ᎏᎏ γρ RT w 3 ᎏ 4 1 ᎏᎏ ρ (2RT w / π ) 1 /2 2 Ϫ σ ν ᎏ σ ν 6 -2 MEMS: Introduction and Fundamentals © 20 06 by Taylor & Francis Group, LLC 6 Molecular-Based Microflu...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 5 ppsx
... of the Navier–Stokes equations, as well as the molecular interaction models of the MD and the DSMC methods. Although it may seem that the molecular simulation methods are more fundamental, they require ... 0.01 Slip flow Transitional flow Free molecular flow Continuum flow Navier−Stokes equations 10 3 10 2 10 1 10 0 10 -1 10 -2 10 -3 10 -4 10 -3 10 -2 10...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 6 potx
... and Ducts at Micro and Nano Scales,” Microscale Thermophys. Eng. 3, p. 43. Beskok, A. (20 02) “Molecular-Based Microfluidic Simulation Models,” in Handbook of MEMS, 1st ed., M. Gad- el- Hak, ed., CRC ... example, the 35-moment system of Brown [1996]) do not yield numerical solutions above Mach numbers of approximately two. Furthermore, the application of the 1 3- or 35-moment...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 7 pdf
... ∆t /2 1 ᎏ τ m ∂g i ᎏ ∂t 1 ᎏ 2 9 ᎏ 2 3 ᎏ 2 9 ᎏ 2 9-4 MEMS: Introduction and Fundamentals © 20 06 by Taylor & Francis Group, LLC Burnett Simulations of Flows in Microdevices 8 -2 5 x/c 0 10 .25 ... 1 m. The first-order 8 -2 8 MEMS: Introduction and Fundamentals y/y max 0.0 0.5 1.0 0.0 1.0 2. 0 3.0 4.0 5.0 x/y max FIGURE 8 .29 Microchannel geometry and grid. y/...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 9 ppsx
... Taylor & Francis Group, LLC 1 1 -2 MEMS: Introduction and Fundamentals attention of MEMS researchers since the early days of MEMS development, and there have been several demonstrations of micromotors ... by Devasenathipathy et al. (20 02) in two- and three-dimensional electrokinetic flows. 10 .2. 6 Electrokinetic Microchips The advent of microfabrication and microelectromec...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 10 pps
... pt. 1. Lubrication in MEMS 1 1 -2 7 © 20 06 by Taylor & Francis Group, LLC 1 1 -2 0 MEMS: Introduction and Fundamentals them undesirable in a practical MEMS rotor system. The primary difficulty is ... might inhibit their adoption. Because the MEMS constraint is the minimum gap dimension, the wave bearing in a MEMS machine can be implemented only by selectively enla...
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