The MEMS Handbook (1st Ed) - M Gad el Hak Part 13 pps

... cells are also active areas of research.Before multiphase flow in microchannels becomes a reality, however, several fundamental problemsthat arise from the small dimension of the channels must ... Most of these problems originatefrom the large curvature of the interface between two phases in these small channels. As a result, capillaryeffects and other related phenomena dominate in multiphase ... microelectromechanical systems (MEMS) applications for two reasons. First, as electromechanicalsystems, MEMS devices often must be controlled in order to be utilized in an effective manner. Second,important...

... R111 the etch rate in nm/min and Rv the groove widening, also in nm/min. The V-groove wideningexperiment then results in a R111 of 2.55 ± 0.15 nm/min. In practice, this etch rate implies a maskunderetching ... only 0.9 m for an etch depth of 360 m. For a 1-mm-long V-groove and a 1° misalign-ment angle, a total underetching of 18 m is theoretically expected, with 95% due to misalignment andonly ... 360 m. For a 1-mm-long V-groove and a 1° misalign-ment angle, a total underetching of 18 m is theoretically expected, with 95% due to misalignment andonly 5% due to etching of the {111} sidewalls...