... discusses molecular-based models and their relation to the
continuum models previously considered.
The most fundamental of the molecular models is a deterministic one. The motion of the molecules
is ... containing 34 20 0-
µ
m- wide
×
10 0-
µ
m- deep channels machined into the 20 0-
µ
m- thick stainless steel foils by the process of direct,
high-precisio...
... sensing,
computation, actuation, control, communication and power generation within the same microchip. The
small size, light weight and high-durability of MEMS, combined with the mass-fabrication ... super-Burnett
equations), or moment methods based on taking the moments of the Boltzmann equation with flow
variables (leading to Grad’s 13-moment equations or Levermore’ moment equati...
... R
111
the etch rate in nm/min and R
v
the groove widening, also in nm/min. The V-groove widening
experiment then results in a R
111
of 2. 55 ± 0.15 nm/min. In practice, this etch rate implies a mask
underetching ... R
111
the etch rate in nm/min and R
v
the groove widening, also in nm/min. The V-groove widening
experiment then results in a R
111
of 2. 55 ± 0.15 nm/min. In...
... fundamental problems
that arise from the small dimension of the channels must be solved. Most of these problems originate
from the large curvature of the interface between two phases in these small ... control. This topic is particularly important
in microelectromechanical systems (MEMS) applications for two reasons. First, as electromechanical
systems, MEMS devices often must be co...
... Actuators A, 25 , 559–563, 1991.
Bustgens, B., W. Bacher, W. Menz, and W. K. Schomburg, “Micropump Manufactured by Thermoplastic
Molding,” Proceedings. IEEE Micro Electro Mechanical Systems (MEMS ’94), ... Actuators A, 25 , 559–563, 1991.
Bustgens, B., W. Bacher, W. Menz, and W. K. Schomburg, “Micropump Manufactured by Thermoplastic
Molding,” Proceedings. IEEE Micro Electro Mechanical Syst...