Smart Material Systems and MEMS - Vijay K Varadan Part 9 pdf
Smart Material Systems and MEMS - Vijay K. Varadan Part 9 pdf
... Applications
Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan
# 2006 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 93 6 1-7
to a non-zero initial ... microelectronics and
MEMS. The process of transferring a geometrical
Smart Material Systems and MEMS: Design and Development Methodologies...
Smart Material Systems and MEMS - Vijay K. Varadan Part 1 pot
... catalogue record for this book is available from the British Library
ISBN-13 97 8-0 -4 7 0-0 93 6 1-0 (HB)
ISBN-10 0-4 7 0-0 93 6 1-7 (HB)
Typeset in 9/ 11 pt Times by Thomson Digital
Printed and bound in Great Britain ... real-world, wherein the uncertainties are so much that
Introduction to Smart Systems 9
Smart Material Systems and MEMS:
Design and Deve...
Smart Material Systems and MEMS - Vijay K. Varadan Part 2 pot
... V .K. Varadan and O.O. Awadelkarim, Micro-
sensors MEMS and Smart Devices, John Wiley & Sons, Ltd,
London, UK (2002).
11. V .K. Varadan, X. Jiang and V.V. Varadan, Microstereolitho-
graphy and ... 37, 298 7–3003 ( 199 4).
19. V .K. Varadan, K. J. Vinoy and K. A. Jose, RF MEMS and their
Applications, John Wiley & Sons, Ltd, London, UK (2002).
20. V .K. Varada...
Smart Material Systems and MEMS - Vijay K. Varadan Part 3 pot
... follows:
Z
0
¼
ffiffiffi
m
e
r
¼
ffiffiffiffiffiffi
L
1
C
1
r
ð4:6Þ
Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan
# 2006 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 93 6 1-7
force, ... 617–688 ( 199 7).
24. J.W. Grate, S.J. Martin and R.M. White, ‘Acoustic wave
microsensors, Part 1’, Analytical Chemistry, 65,...
Smart Material Systems and MEMS - Vijay K. Varadan Part 4 pot
... u
t
i
e
i
Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan
# 2006 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 93 6 1-7
Equation (6. 49) , we ... smart
structures and systems , Smart Materials and Structures, 9,
95 3 97 2 (2000).
11. M.J. Vellekoop, ‘Acoustic wave sensors and their techno...
Smart Material Systems and MEMS - Vijay K. Varadan Part 5 pps
... becomes
k
n
2
k
Ln
2
Þ 0
s
1
s
2
k
Ln
2
k
sn
rk
Ln
k
n
2
k
sn
2
i
A
13
A
11
k
n
0 k
n
2
k
sn
2
Þik
n
o
n
2
I
1
A
55
B
55
A
55
k
n
2
rk
sn
2
k
n
2
k
Ln
k
Bn
2
s
1
s
2
k
sn
ik
n
s
1
2
... as:
N
x
N
y
N
xy
8
<
:
9
=
;
¼
ð
h=2
h=2
s
xx
s
yy
t
xy
8
<
:
9
=
;
k
dz ¼
X
N
k ¼1
ð
z
k
z
k 1
s
xx
s
yy
t
xy
8
<
:
9
=
;
k
dz
ð6:...
Smart Material Systems and MEMS - Vijay K. Varadan Part 6 docx
... approximate
Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan
# 2006 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 93 6 1-7
7.7.1 Factors governing ... 888 89
4 0.86113 63115 94 053
0.3 399 8 20435 84856
0.34785 48451 37454
0.65214 51548 62546
5 0 .90 617 98 4 59 38664
0.53846 93 101 05683
0.00...
Smart Material Systems and MEMS - Vijay K. Varadan Part 7 ppt
... given by:
k
11
¼
R
Á
; k
12
¼
ÀaLS
Á
; k
13
¼ k
11
; k
14
¼ k
12
k
22
¼
L
2
aðR
2
þ S
2
À 2naRSÞ
2nSÁ
; k
23
¼ k
12
;
k
24
¼
L
2
aðR
2
À S
2
À 2naRSÞ
2nSÁ
k
33
¼ k
11
; k
34
¼ k
12
; k
44
¼ k
22
R ... is its thickness.
Thin piezoelectric electrodes are placed on the top and
Smart Material Systems and MEMS: Design and Development Methodologies V. K....
Smart Material Systems and MEMS - Vijay K. Varadan Part 8 pot
... g 9: 15Þ
234 Smart Material Systems and MEMS
These equations are polynomials in k, whose general
form is:
f k ¼
X
N
p¼0
a
p
k
4p
where the coefficients a
p
are dependent on material
properties and ... optimum capacitances and voltages
(Schrag et al. [21]). In recent times, there has been
216 Smart Material Systems and MEMS
Stokbro and N. Gippius, ‘Status and pe...
Smart Material Systems and MEMS - Vijay K. Varadan Part 10 ppsx
... overall dimen-
sional stability (allowing local mobility) and long-term
Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan
# ... 1586–
1 593 ( 199 8).
6. Y. Xia and G.M. Whitesides, ‘Soft lithography’, Angewandte
Chemie, International Edition, 37, 550–575 ( 199 8).
7. V .K. Varadan and V.V. Varadan, ‘...