Smart Material Systems and MEMS - Vijay K Varadan Part 6 docx

... as: e xx e yy e zz g xy g yz g zx 8 > > > > > > > > < > > > > > > > > : 9 > > > > > > > > = > > > > > > > > ; ¼ @ @x 00 0 @ @y 0 00 @ @z @ @y @ @x 0 0 @ @z @ @y @ @z 0 @ @x 2 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 4 3 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 7 5 u v w 8 > < &...

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... like to quote (Webster’s) dictionary meanings of these terms [1]: Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 20 06 ... real-world, wherein the uncertainties are so much that Introduction to Smart Systems 9 Smart Material Systems and MEMS: Design and Development Methodologies Vijay...

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... 550–575 (1998). 5. V .K. Varadan and V.V. Varadan, ‘Three dimensional poly- meric and ceramic MEMS and their applications’, Proceed- ings of SPIE, 2722, 1 56 164 (19 96) . 6. K. Ikuta and K. Hirowatari, ... V .K. Varadan and O.O. Awadelkarim, Micro- sensors MEMS and Smart Devices, John Wiley & Sons, Ltd, London, UK (2002). 11. V .K. Varadan, X. Jiang and V.V....

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... constants. S 1 S 2 S 3 S 4 S 5 S 6 2 6 6 6 6 6 6 6 6 6 4 3 7 7 7 7 7 7 7 7 7 5 ¼ s 11 H s 12 H s 13 H 000 s 12 H s 11 H s 13 H 000 s 13 H s 13 H s 33 H 000 000s 44 H 00 0000s 55 H 0 00000s 66 H 2 6 6 6 6 6 6 6 6 6 4 3 7 7 7 7 7 7 7 7 7 5 T 1 T 2 T 3 T 4 T 5 T 6 2 6 6 6 6 6 6 6 6 6 4 3 7 7 7 7 7 7 7 7 7 5 þ 00d 31 00d 31 00d 33 0 d 15 0 d 15 00 000 2 6 6...

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... u t i e i Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 20 06 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 9 36 1-7 Equation (6. 49), ... transfer’,inProceed- ings of IEEE: MEMS 98, IEEE, Piscataway, NJ, USA, pp. 361 – 366 (1998). 10. V .K. Varadan and V.V. Varadan, ‘Microsensors, microel...

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... becomes: C 11 C 12 C 13 00C 16 C 12 C 22 C 23 00C 26 C 13 C 23 C 33 00C 36 000C 44 C 45 0 000C 45 C 55 0 C 16 C 26 C 36 00C 66 2 6 6 6 6 6 6 4 3 7 7 7 7 7 7 5 6: 65Þ 1 16 Smart Material Systems and MEMS dispersive at higher ... becomes: s xx s yy s zz t yz t xz t xy 8 > > > > > > > > < > > > > > > > > : 9 >...

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... thickness. Thin piezoelectric electrodes are placed on the top and Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 20 06 ... 0000 0 @N 1 @z 0 @N 2 @z 0 @N 3 @z 0 @N 4 @z 0000 @N 1 @z @N 1 @x @N 2 @z @N 2 @x @N 3 @z @N 3 @x @N 4 @z @N 4 @x 0000 00000000N 1 N 2 N 3 N 4 2 6 6 6 6 6 6 6 6 6 6 4 3...

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... ½0 :::::: :::::: :::::: ½ÀA 0 ½ÀA 1 ½ÀA 2  ::½ÀA lÀ1  2 6 6 6 6 6 6 6 6 4 3 7 7 7 7 7 7 7 7 5 ; ½B¼ ½I ½I : : ½I À½A l  2 6 6 6 6 6 6 6 6 4 3 7 7 7 7 7 7 7 7 5 and the relation between fxg and fzg is given by: fzg¼ n fxg T lfxg T ::; ... optimum capacitances and voltages (Schrag et al. [21]). In recent times, there has been 2 16 Smart Material Systems a...

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... Applications Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 20 06 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 9 36 1-7 to a non-zero initial ... microelectronics and MEMS. The process of transferring a geometrical Smart Material Systems and MEMS: Design and Development Methodologie...

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... dimen- sional stability (allowing local mobility) and long-term Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 20 06 John ... Low-aspect-ratio High-aspect-ratio High-aspect-ratio High-aspect-ratio nanostructures nanostructures microstructures ‘cm structures’ Photon energy range 500 eV–2 keV 2–5 keV 4–...

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