Smart Material Systems and MEMS - Vijay K Varadan Part 2 pot

... V .K. Varadan and O.O. Awadelkarim, Micro- sensors MEMS and Smart Devices, John Wiley & Sons, Ltd, London, UK (20 02) . 11. V .K. Varadan, X. Jiang and V.V. Varadan, Microstereolitho- graphy and ... Engineering, 37, 29 87–3003 (1994). 19. V .K. Varadan, K. J. Vinoy and K. A. Jose, RF MEMS and their Applications, John Wiley & Sons, Ltd, London, UK (20 02) . 2...

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... Techniques for MEMS 25 7 10.1 Introduction 25 7 10 .2 Fabrication processes for silicon MEMS 25 7 10 .2. 1 Lithography 25 7 10 .2. 2 Resists and mask formation 25 8 10 .2. 3 Lift-off technique 25 9 10 .2. 4 Etching ... (1995). 13. V .K. Varadan, and V.V. Varadan, ‘Three-dimensional poly- meric and ceramic MEMS and their applications’, Proceed- ings of SPIE, 27 22, 156–...

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... 4Q 44 T 6 D 2 À 4Q 44 T 5 D 3 ð4:100Þ E 2 ¼ D 2 À P 2 0 ffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi ðe 0 e T 22 Þ 2 À aðe T 22 Þ 2 w q À 4Q 44 T 6 D 1 À 2Q 33 T 2 D 2 À 2Q 13 T 3 D 2 À 2Q 13 T 1 D 2 À 4Q 44 T 4 D 3 ð4:101Þ E 3 ¼ D 3 À ... Physics, 32, 23 76 23 79 (1993). 23 . V .K. Varadan and V.V. Varadan, ‘Microsensors, actuators, MEMS and electronics for smar...

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... rV 2 m 12 m 13 m 14 m 12 m 22 À rV 2 m 23 m 24 m 13 m 23 m 33 À rV 2 m 34 m 14 m 24 m 34 m 44 À rV 2 2 6 6 4 3 7 7 5 Â a 1 a 2 a 3 a 4 2 6 6 4 3 7 7 5 ¼ 0 ð5 :28 Þ where: m 11 ¼ c 55 b 2 þ 2c 15 b ... coefficient and k is the wave number. By using Equations (5.71) and (5. 72) , Equation (5.73) can be rewritten as follows: Áv v þ K 2 s 2  2 þ Áa k À...

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... e eff 33 E z ð8:107Þ where: C 33 eff ¼ð " " C 33 V 1 p þC 22 V 1 m ÞÀ V 1 p V 1 m ðC 12 À " " C 13 Þ 2 C 22 V 1 p þ " " C 11 V 1 m ð8:108Þ e eff 33 ¼ " " e 33 V 1 p þ " " e 31 V 1 p V 1 m ðC 12 À " " C 13 Þ C 22 V 1 p þ " " C 11 V 1 m ð8:109Þ " " C 11 ¼ð " C 11 V 2 p þC 22 V 2 m ÞÀ V 2 p V...

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... Advanced Packaging, 23 , 6 02 607 (20 00). 28 . H.H. Oppermann, C. Kallmayer, C. Klein, R. Aschenbrenner and H. Reichl, ‘Advanced Flip chip technologies in RF, 322 Smart Material Systems and MEMS loy ... is used to Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 20 06 John Wiley & Son...

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... 0 s 1 s 2 k Ln 2 k sn  rk Ln k n 2 k sn 2  i A 13 A 11 k n 0 k n 2  k sn 2 Þik n o n 2 I 1 A 55  B 55 A 55 k n 2  rk sn 2 k n 2 k Ln k Bn 2  s 1 s 2 k sn  ik n s 1 2  1  k sn 2 k n 2 k Bn 4  iðB 55  B 13 k n 2 A 55  i A 13 A 33 k n o n 2 I 1 A 33  B 55 A 33 k n 2  iðB 55  ... Q 11 C 4 2 Q 12 þ2Q...

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... approximate Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 20 06 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 936 1-7 7.7.1 Factors governing ... U 1j ¼ K 1j U 11 U ii ¼ K ii  X i1 k 1 U ki 2 ! 0:5 ðfor i > 1Þ U ij ¼ K ij  P i1 k 1 U ki U kj  U ii ðfor i > 1 j > 1Þ The Gau...

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... by: k 11 ¼ R Á ; k 12 ¼ ÀaLS Á ; k 13 ¼ k 11 ; k 14 ¼ k 12 k 22 ¼ L 2 aðR 2 þ S 2 À 2naRSÞ 2nSÁ ; k 23 ¼ k 12 ; k 24 ¼ L 2 aðR 2 À S 2 À 2naRSÞ 2nSÁ k 33 ¼ k 11 ; k 34 ¼ k 12 ; k 44 ¼ k 22 R ... A e31 @E @x ¼ 0 ð8:45Þ  I 2 zs þ I 2 ys  @ 2 v 0 @t 2 À  I 2 zsq À I 2 ysr  @ 2 c @t 2 À A ys16 @ 2 u 0 @x 2 À  A 2 ys66...

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... Applications Smart Material Systems and MEMS: Design and Development Methodologies V. K. Varadan, K. J. Vinoy and S. Gopalakrishnan # 20 06 John Wiley & Sons, Ltd. ISBN: 0-4 7 0-0 936 1-7 to a non-zero initial ... subvectors 24 2 Smart Material Systems and MEMS and [C], respectively. Equation (9 .29 ) represents a 2n  2n system. That is, an n Ân secon...

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