An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 12 pdf

... requirements, standards for MEMS packaging lack, and designs often remain proprietary to com - panies. Invariably, the difficulty and failure in adopting standards implies that pack - aging will remain engineering- resource ... al., “A Low-Noise RF Voltage-Controlled Oscillator Using On-Chip High-Q Three-Dimensional Inductor and Micromachined Variable Capacitor,” Technical...

Ngày tải lên: 10/08/2014, 01:22

... student alike to an understanding of how MEMS are designed and fabricated. Dr. Maluf s book concentrates mostly on how to design and manufacture MEMS. This is to be expected of Dr. Maluf, who has ... of Morrison and Foerster. Evan Green and Carter Hand of New Focus were kind enough to review portions of the manuscript. Thanks go to our editor, Mark Walsh, for his unwa...

Ngày tải lên: 10/08/2014, 01:22

... components for identify-friend-or-foe systems Head- and night-display systems Low-power, high-density mass data storage devices Embedded sensors and actuators for condition-based maintenance Integrated ... general support and for recognizing the value of an introductory book on MEMS. I would like to thank Greg Kovacs, Kirt Williams, and Denise Salles for reading the manuscript...

Ngày tải lên: 10/08/2014, 01:22

... meaning lithography, elec - troplating, and molding. both PSG and BPSG soften and flow to conform with the underlying surface topog - raphy and to improve step coverage. LTO films are used for passivation ... Zorman, C. A., and M. Mehregany, “Materials for Microelectromechanical Systems,” in The MEMS Handbook, Chapter 15, M. Gad-el-Hak (ed.), Boca Raton, FL: CRC Press,...

Ngày tải lên: 10/08/2014, 01:22

... the anisotropic etching of cavities in {100}-oriented silicon: (a) cavities, self-limiting pyramidal and V-shaped pits, and thin membranes; and (b) etching from both sides of the wafer can yield ... Wet etchants in aqueous solution offer the advantage of low-cost batch fabrication—25 to 50 100-mm-diameter wafers can be etched simultaneously and can be either of the isotropic or aniso...

Ngày tải lên: 10/08/2014, 01:22

... 1990, pp. 3 612 3632. [8] Schnakenberg, U., W. Benecke, and P. Lange, “TMAHW Etchants for Silicon Micromachining,” Proc. 1991 Int. Conf. on Solid-State Sensors and Actuators, San Fran- cisco, CA, ... regularly produced. The cured material is resis - tant to most chemicals and is thermally stable. SU-8 has been used to form microflu - idic channels and optical waveguides. I...

Ngày tải lên: 10/08/2014, 01:22

... orientation-dependent etching of grooves, wafer bonding, and dicing [8], and (b) nozzle formed by DRIE and wafer bonding. (After: [9].) Mandrel Photoresist 1. Make mandrel, pattern photoresist Metal 2. ... 9.81 m/s 2 ), sensitivity (V/G), reso - lution (G), bandwidth (Hz), cross-axis sensitivity, and immunity to shock. The range and bandwidth required vary significantly depend...

Ngày tải lên: 10/08/2014, 01:22

... )]°⋅sHz ; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat- ter two being functions of noise and bandwidth. Short- and long-term drift of the output, known as bias drift, is another ... dioxide insulator TaAl resistor Al conductor 1. Grow oxide for insulator, sputter TaAl and Al, pattern Al and TaAl, pattern Al again to form resistor and conductive trace. 2. PEC...

Ngày tải lên: 10/08/2014, 01:22

... fashion similar to the electronic transistor. development activities appears to be. An application for micropumps is likely to be in the automated handling of fluids for chemical analysis and drug delivery systems. Stand-alone ... Netherlands, January 29–February 2, 1995, pp. 19–24. Selected Bibliography Frank, R., Understanding Smart Sensors, Norwood, MA: Artech House, 1996. Gad-El...

Ngày tải lên: 10/08/2014, 01:22

... unloaded actuator on the right-hand side is equal to the mass of the loaded actuator (left-hand side) and the mirror. Externally applied in-plane accelerations cause equal but opposite torques on ... (known as the L-Band). The International Telecommunication Union (ITU) of Geneva, Switzerland, has specified the use to be on a grid of discrete channels throughout the C- and L-Bands at...

Ngày tải lên: 10/08/2014, 01:22