An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 11 pptx
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 11 pptx
... discrete
inductors (in addition to even more capacitors and resistors) along with only 15
integrated circuits [12]. To alleviate the self-resonance shortcoming and to reduce
the part count and space ... of expansion mismatch factor into substrate
selection.
Passive Electrical Components: Capacitors and Inductors
Quality Factor and Parasitics in Passive Components
All capacit...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 2 pptx
... Vector
algebra (using a dot product) shows that the angles between {100} and {110 } planes
are 45º or 90º, and the angles between {100} and {111 } planes are 54.7º or 125.3º.
Similarly, {111 } and ... and
( )111
.
Silicon-Compatible Material System 15
(
b
)
(a)
(010) (110 ) (111 )
z, [001]
y, [010]
x, [100]
z, [001]
y, [010]
x, [100]
z, [001]
y, [010]
x, [100]
(110 )
(110 )
(111...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 4 pptx
... view
{111 }
109.5°
70.5°
Slanted {111 }
Slanted {111 }
Figure 3.7 Illustration of the anisotropic etching in {110 }-oriented silicon. Etched structures are
delineated by four vertical {111 } planes and two slanted {111 } ... is because any slight ero
-
sion of the convex corner exposes fast-etching planes (especially { 411} planes) other
Basic Process Tools 49
{110 }
Vertical {111 }
V...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 6 pptx
... 9.81 m/s
2
), sensitivity (V/G), reso
-
lution (G), bandwidth (Hz), cross-axis sensitivity, and immunity to shock. The
range and bandwidth required vary significantly depending on the application.
Accelerometers ... bottom handle wafer. Silicon-fusion bonding of a p-type top wafer with
an n-type epixatial layer encapsulates and seals the cavity. Electrochemical etching
or standa...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 1 doc
... student alike to an understanding of how MEMS are
designed and fabricated. Dr. Maluf s book concentrates mostly on how to design
and manufacture MEMS. This is to be expected of Dr. Maluf, who has ... of
Morrison and Foerster. Evan Green and Carter Hand of New Focus were kind
enough to review portions of the manuscript. Thanks go to our editor, Mark Walsh,
for his unwa...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 3 pps
... meaning lithography, elec
-
troplating, and molding.
both PSG and BPSG soften and flow to conform with the underlying surface topog
-
raphy and to improve step coverage. LTO films are used for passivation ... Zorman, C. A., and M. Mehregany, “Materials for Microelectromechanical Systems,” in
The MEMS Handbook, Chapter 15, M. Gad-el-Hak (ed.), Boca Raton, FL: CRC Press,...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 5 doc
... regularly produced. The cured material is resis
-
tant to most chemicals and is thermally stable. SU-8 has been used to form microflu
-
idic channels and optical waveguides. It has also been used ... Characteristics and Profile Control in a Time Multiplexed
Inductively Coupled Plasma Etcher,” Tech. Digest Solid-State Sensor and Actuator Work
-
shop, Hilton Head Island,...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 7 pot
... )]°⋅sHz
; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat-
ter two being functions of noise and bandwidth. Short- and long-term drift of the
output, known as bias drift, is another ... dioxide
insulator
TaAl resistor
Al conductor
1. Grow oxide for insulator, sputter TaAl and Al, pattern Al and TaAl,
pattern Al again to form resistor and conductive trace.
2. PEC...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 8 ppt
... fashion similar to the electronic transistor.
development activities appears to be. An application for micropumps is likely to
be in the automated handling of fluids for chemical analysis and drug delivery
systems.
Stand-alone ... Netherlands, January 29–February 2, 1995,
pp. 19–24.
Selected Bibliography
Frank, R., Understanding Smart Sensors, Norwood, MA: Artech House, 1996.
Gad-El...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 9 pps
... unloaded actuator on the right-hand side is equal to the
mass of the loaded actuator (left-hand side) and the mirror. Externally applied
in-plane accelerations cause equal but opposite torques on ... (known as the L-Band).
The International Telecommunication Union (ITU) of Geneva, Switzerland, has
specified the use to be on a grid of discrete channels throughout the C- and L-Bands
at...
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