An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 11 pptx

... discrete inductors (in addition to even more capacitors and resistors) along with only 15 integrated circuits [12]. To alleviate the self-resonance shortcoming and to reduce the part count and space ... of expansion mismatch factor into substrate selection. Passive Electrical Components: Capacitors and Inductors Quality Factor and Parasitics in Passive Components All capacit...

Ngày tải lên: 10/08/2014, 01:22

... Vector algebra (using a dot product) shows that the angles between {100} and {110 } planes are 45º or 90º, and the angles between {100} and {111 } planes are 54.7º or 125.3º. Similarly, {111 } and ... and ( )111 . Silicon-Compatible Material System 15 ( b ) (a) (010) (110 ) (111 ) z, [001] y, [010] x, [100] z, [001] y, [010] x, [100] z, [001] y, [010] x, [100] (110 ) (110 ) (111...

Ngày tải lên: 10/08/2014, 01:22

... view {111 } 109.5° 70.5° Slanted {111 } Slanted {111 } Figure 3.7 Illustration of the anisotropic etching in {110 }-oriented silicon. Etched structures are delineated by four vertical {111 } planes and two slanted {111 } ... is because any slight ero - sion of the convex corner exposes fast-etching planes (especially { 411} planes) other Basic Process Tools 49 {110 } Vertical {111 } V...

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... 9.81 m/s 2 ), sensitivity (V/G), reso - lution (G), bandwidth (Hz), cross-axis sensitivity, and immunity to shock. The range and bandwidth required vary significantly depending on the application. Accelerometers ... bottom handle wafer. Silicon-fusion bonding of a p-type top wafer with an n-type epixatial layer encapsulates and seals the cavity. Electrochemical etching or standa...

Ngày tải lên: 10/08/2014, 01:22

... student alike to an understanding of how MEMS are designed and fabricated. Dr. Maluf s book concentrates mostly on how to design and manufacture MEMS. This is to be expected of Dr. Maluf, who has ... of Morrison and Foerster. Evan Green and Carter Hand of New Focus were kind enough to review portions of the manuscript. Thanks go to our editor, Mark Walsh, for his unwa...

Ngày tải lên: 10/08/2014, 01:22

... meaning lithography, elec - troplating, and molding. both PSG and BPSG soften and flow to conform with the underlying surface topog - raphy and to improve step coverage. LTO films are used for passivation ... Zorman, C. A., and M. Mehregany, “Materials for Microelectromechanical Systems,” in The MEMS Handbook, Chapter 15, M. Gad-el-Hak (ed.), Boca Raton, FL: CRC Press,...

Ngày tải lên: 10/08/2014, 01:22

... regularly produced. The cured material is resis - tant to most chemicals and is thermally stable. SU-8 has been used to form microflu - idic channels and optical waveguides. It has also been used ... Characteristics and Profile Control in a Time Multiplexed Inductively Coupled Plasma Etcher,” Tech. Digest Solid-State Sensor and Actuator Work - shop, Hilton Head Island,...

Ngày tải lên: 10/08/2014, 01:22

... )]°⋅sHz ; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat- ter two being functions of noise and bandwidth. Short- and long-term drift of the output, known as bias drift, is another ... dioxide insulator TaAl resistor Al conductor 1. Grow oxide for insulator, sputter TaAl and Al, pattern Al and TaAl, pattern Al again to form resistor and conductive trace. 2. PEC...

Ngày tải lên: 10/08/2014, 01:22

... fashion similar to the electronic transistor. development activities appears to be. An application for micropumps is likely to be in the automated handling of fluids for chemical analysis and drug delivery systems. Stand-alone ... Netherlands, January 29–February 2, 1995, pp. 19–24. Selected Bibliography Frank, R., Understanding Smart Sensors, Norwood, MA: Artech House, 1996. Gad-El...

Ngày tải lên: 10/08/2014, 01:22

... unloaded actuator on the right-hand side is equal to the mass of the loaded actuator (left-hand side) and the mirror. Externally applied in-plane accelerations cause equal but opposite torques on ... (known as the L-Band). The International Telecommunication Union (ITU) of Geneva, Switzerland, has specified the use to be on a grid of discrete channels throughout the C- and L-Bands at...

Ngày tải lên: 10/08/2014, 01:22