An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 4 pptx

... Wet etchants in aqueous solution offer the advantage of low-cost batch fabrication—25 to 50 100-mm-diameter wafers can be etched simultaneously and can be either of the isotropic or anisotropic ... uniform and controlled etch depths. Some applications, such as bulk-micromachined pressure sensors, demand a thin ( 5- to 2 0- m) silicon mem - brane with dimensional thickness cont...

Ngày tải lên: 10/08/2014, 01:22

... components for identify-friend-or-foe systems Head- and night-display systems Low-power, high-density mass data storage devices Embedded sensors and actuators for condition-based maintenance Integrated ... Vector algebra (using a dot product) shows that the angles between {100} and {110} planes are 45 º or 90º, and the angles between {100} and {111} planes are 54. 7º or 125.3º. Sim...

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... Structures and Systems in Industrial and Automotive Applications Bondpad Metal conductors P-type diffused piezoresistor Etched cavity N-type epitaxial layer P-type substrate and frame Anodically bonded Pyrex ... 9.81 m/s 2 ), sensitivity (V/G), reso - lution (G), bandwidth (Hz), cross-axis sensitivity, and immunity to shock. The range and bandwidth required vary significantly...

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... of expansion mismatch factor into substrate selection. Passive Electrical Components: Capacitors and Inductors Quality Factor and Parasitics in Passive Components All capacitors and inductors ... are 24 discrete inductors (in addition to even more capacitors and resistors) along with only 15 integrated circuits [12]. To alleviate the self-resonance shortcoming and to reduce t...

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... student alike to an understanding of how MEMS are designed and fabricated. Dr. Maluf s book concentrates mostly on how to design and manufacture MEMS. This is to be expected of Dr. Maluf, who has ... affecting the validity of any trade - mark or service mark. International Standard Book Number: 1-5 805 3-5 9 0-9 109876 543 21 To our families Tanya, Ella, and Ja...

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... abformung, meaning lithography, elec - troplating, and molding. both PSG and BPSG soften and flow to conform with the underlying surface topog - raphy and to improve step coverage. LTO films are ... inferred (see Figure 2 .4) . Most the resistance change in metals is due to 24 Materials for MEMS RF planar sputtering and ion-beam methods work for the deposition of bo...

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... Benecke, and P. Lange, “TMAHW Etchants for Silicon Micromachining,” Proc. 1991 Int. Conf. on Solid-State Sensors and Actuators, San Fran- cisco, CA, June 24 27, 1991, pp. 815–818. [9] Ammar, E. S., and ... Characteristics and Profile Control in a Time Multiplexed Inductively Coupled Plasma Etcher,” Tech. Digest Solid-State Sensor and Actuator Work - shop, Hilton Head Island, SC,...

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... )]°⋅sHz ; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat- ter two being functions of noise and bandwidth. Short- and long-term drift of the output, known as bias drift, is another ... dioxide insulator TaAl resistor Al conductor 1. Grow oxide for insulator, sputter TaAl and Al, pattern Al and TaAl, pattern Al again to form resistor and conductive trace. 2. PEC...

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... the Future,” R. R. Ragan (ed.), IEEE Transactions on Aerospace and Electronic Systems, Vol. AES-20, No. 4, July 19 84, pp. 41 4 44 4. [25] Emiliani, C., The Scientific Companion, 2nd ed., New York: ... 19 94, pp. 41 45 . [41 ] “Under-Glass Controls: Creative Cooktop Delivers High Power and Fast Boiling,” Appli - ance Manufacturer, July 1996, pp. 61–63. [42 ] Anderson, R. C., et a...

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... unloaded actuator on the right-hand side is equal to the mass of the loaded actuator (left-hand side) and the mirror. Externally applied in-plane accelerations cause equal but opposite torques on ... (known as the L-Band). The International Telecommunication Union (ITU) of Geneva, Switzerland, has specified the use to be on a grid of discrete channels throughout the C- and L-Bands at...

Ngày tải lên: 10/08/2014, 01:22