An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 3 pps
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 3 pps
... 15
Polyvinylidene-fluoride
(PVDF)
d
31
= 23
d
33
= 33
12 1.78 3 2.7
LiNbO
3
d
31
=−4, d
33
= 23 28 4.6 245 34
BaTiO3 d
31
= 78, d
33
= 190 1,700 5.7 30
PZT d
31
=−171 d
33
= 37 0 1,700 7.7 53 30
zinc oxide (ZnO) d
31
= 5.2, d
33
= ... abformung, meaning lithography, elec
-
troplating, and molding.
both PSG and BPSG soften and flow to conform with t...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 9 pps
... unloaded actuator on the right-hand side is equal to the
mass of the loaded actuator (left-hand side) and the mirror. Externally applied
in-plane accelerations cause equal but opposite torques on ... (known as the L-Band).
The International Telecommunication Union (ITU) of Geneva, Switzerland, has
specified the use to be on a grid of discrete channels throughout the C- and L-Bands
at...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 1 doc
... affecting the validity of any trade
-
mark or service mark.
International Standard Book Number: 1-5 805 3- 5 9 0-9
1098765 432 1
To our families
Tanya, Ella, and Jad
Erika, Gordon, Brynn, and Reed
“It was the ... student alike to an understanding of how MEMS are
designed and fabricated. Dr. Maluf s book concentrates mostly on how to design
and manufacture MEMS. T...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 2 pptx
... components for identify-friend-or-foe
systems
Head- and night-display systems
Low-power, high-density mass data storage devices
Embedded sensors and actuators for condition-based maintenance
Integrated ... Vector
algebra (using a dot product) shows that the angles between {100} and {110} planes
are 45º or 90º, and the angles between {100} and {111} planes are 54.7º or 125 .3 .
Simil...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 4 pptx
... is a
simple process to join together a silicon wafer and a sodium-containing glass
substrate (e.g., Corning Pyrex
®
7740 and 7070, Schott 833 0 and 832 9). It is used in
the manufacturing of a variety ... mask
a
0.707a
54.74°
{100}
{111}
{100}
{111}
Self-limiting
etches
Membrane
<100>
{110}
Figure 3. 6 Illustration of the anisotropic etching of cavities in {100}-oriented silico...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 5 doc
... over free space
or can overlap the bottom wafer (or both, as in this example).
Package
bottom wafer
Actuator overlaps
Bottom wafer
Top
wafer
Freestanding
actuator
Figure 3. 33 Scanning electron microscope ... 137 , No. 11, November 1990, pp. 36 12 36 32.
[8] Schnakenberg, U., W. Benecke, and P. Lange, “TMAHW Etchants for Silicon
Micromachining,” Proc. 1991 Int. Conf. on Solid-State Senso...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 6 pptx
... 9.81 m/s
2
), sensitivity (V/G), reso
-
lution (G), bandwidth (Hz), cross-axis sensitivity, and immunity to shock. The
range and bandwidth required vary significantly depending on the application.
Accelerometers ... bottom handle wafer. Silicon-fusion bonding of a p-type top wafer with
an n-type epixatial layer encapsulates and seals the cavity. Electrochemical etching
or standa...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 7 pot
... )]°⋅sHz
; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat-
ter two being functions of noise and bandwidth. Short- and long-term drift of the
output, known as bias drift, is another ... dioxide
insulator
TaAl resistor
Al conductor
1. Grow oxide for insulator, sputter TaAl and Al, pattern Al and TaAl,
pattern Al again to form resistor and conductive trace.
2. PEC...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 8 ppt
... and Methods,” Tech.
Digest Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 8–11,
1998, pp. 7–10.
[ 43] U.S. Patent 6, 533 ,36 6, March 18, 20 03.
[44] U.S. Patents 4,824,0 73, ... Chronology of Thermal Ink-Jet Structures,” Tech. Digest Solid-State Sen
-
sor and Actuator Workshop, Hilton Head Island, SC, June 3 6, 1996, pp. 200–204.
[39 ] Allen, R. R., J. D....
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 10 potx
... 1991,
pp. 31 0 31 7.
[10] Jerman, H., and J. D. Grade, “A Mechanically-Balanced, DRIE Rotary Actuator for a
High-Power Tunable Laser,” Tech. Digest Solid-State Sensor and Actuator Workshop, Hil
-
ton ... it remains an enabling technology and a means to an end. It is impera
-
tive to understand the final application in order to assess the importance and
applicability...
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