An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 1 doc
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 1 doc
... Heads 11 6
Micromachined Valves 11 9
Micropumps 12 6
Summary 12 8
References 12 9
Selected Bibliography 13 1
CHAPTER 5
MEM Structures and Systems in Photonic Applications 13 3
Imaging and Displays 13 3
Infrared ... Capacitors and Inductors 19 0
Quality Factor and Parasitics in Passive Components 19 0
Surface-Micromachined Variable Capacitors 19 2
Bulk-Micromachined Variable...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 5 doc
... and P. Lange, “TMAHW Etchants for Silicon
Micromachining,” Proc. 19 91 Int. Conf. on Solid-State Sensors and Actuators, San Fran-
cisco, CA, June 24–27, 19 91, pp. 815 – 818 .
[9] Ammar, E. S., and T. ... Characteristics and Profile Control in a Time Multiplexed
Inductively Coupled Plasma Etcher,” Tech. Digest Solid-State Sensor and Actuator Work
-
shop, Hilton Head Island, S...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 14 docx
... Telecommunications
Test GR-63/463-CORE Reliability
Assurance for Optoelectronic Devices
GR -1 2 09 /12 2 1- CORE Reliability Assurance
for Branched and Passive Fiber-Optic Devices
Mechanical
shock
500G for 1 ms, 5 times/axis ... for optoelectronic and passive
fiber-optical components (see Table 8.8) explicitly reference the MIL-STD-202 and
883 standards. Procedures and methods also...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 2 pptx
... and
( )11 1
.
Silicon-Compatible Material System 15
(
b
)
(a)
( 010 ) (11 0) (11 1)
z, [0 01]
y, [ 010 ]
x, [10 0]
z, [0 01]
y, [ 010 ]
x, [10 0]
z, [0 01]
y, [ 010 ]
x, [10 0]
(11 0)
(11 0)
(11 1) = (11 1) (11 1) = (11 1)
(11 1) ... requires annealing at elevated temperatures (>900ºC).
Silicon-Compatible Material System 17
(11 1)
(c)
[10 0]
[ 010 ]
[0 01]
(11 1)
Surface
i...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 3 pps
... {10 0}
Wafers and Doping Levels Below 10
18
cm
-3
π
//
(10
-1 1
m
2
/N)
π
⊥
(10
-1 1
m
2
/N)
p-type 10 7 – 1 In < ;10 0> direction
17 2 –66 In < ;11 0> direction
n-type 10 2 –53 In < ;10 0> ... Zorman, C. A., and M. Mehregany, “Materials for Microelectromechanical Systems,” in
The MEMS Handbook, Chapter 15 , M. Gad-el-Hak (ed.), Boca Raton, FL: CRC P...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 4 pptx
... rate
(µm/min)
1 to 20 0.5 to 3 0.75 0.5 to 1. 5 0 .1 to 0.5 1 to 15 0 .1 to 10
{11 1}/ {10 0}
Selectivity
None 10 0 :1 35 :1 50 :1 None None None
Nitride etch
(nm/min)
Low 1 0 .1 0 .1 200 200 12
SiO
2
Etch
(nm/min)
10 –30 ... view
{11 1}
10 9.5°
70.5°
Slanted {11 1}
Slanted {11 1}
Figure 3.7 Illustration of the anisotropic etching in {11 0}-oriented silicon...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 6 pptx
... capacitance values are on the order of 1
pF (10
12
F) and changes in capacitance can be as small as a few fF (10
15
F).
Yet another sensing approach utilizes electromagnetic signals to detect and
measure ... electronic
circuits to detect minute changes in capacitance (< ;10
15
F) and to translate them
into an amplified output voltage. Another common method uses piez...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 7 pot
... )]°⋅sHz
; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat-
ter two being functions of noise and bandwidth. Short- and long-term drift of the
output, known as bias drift, is another ... dioxide
insulator
TaAl resistor
Al conductor
1. Grow oxide for insulator, sputter TaAl and Al, pattern Al and TaAl,
pattern Al again to form resistor and conductive trace.
2. PE...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 8 ppt
... 718 –724.
[7] U.S. Patents 3,9 21, 916 , November 25, 19 75, and 3,949, 410 , April 6, 19 76.
[8] Peeters, E., and S. Verdonckt-Vandebroek, “Thermal Ink Jet Technology,” Circuits and
Devices, Vol. 13 , ... “Genetic Analysis Systems: Improvements and Methods,” Tech.
Digest Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 8 11 ,
19 98, pp. 7 10 .
[43] U.S. Pa...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 9 pps
... processing and routing of data and voice. The use of tunable lasers in
telecommunications has been primarily in the wavelength range of 1, 528 nm to
1, 565 nm (known as the C-Band) and 1, 570 nm to 1, 610 ... unloaded actuator on the right-hand side is equal to the
mass of the loaded actuator (left-hand side) and the mirror. Externally applied
in-plane accelerations cause eq...
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