the mems handbook mems applications 2nd ed m gad el hak doc

... New York Edited by Mohamed Gad- el- Hak The MEMS Handbook Second Edition MEMS Applications © 2006 by Taylor & Francis Group, LLC than stiffness about the other axes. The outer ring and the inner ... transferred from the drive mass to the sense mass in an efficient way; yet the feed- back from the motion of the sense mass to the drive mass is kept to a minim...