Micromachining Techniques for Fabrication of Micro and Nano Structures Part 1 ppt

... dimension is increased from 1. 1 to 1. 9, the value of a c *= a c /A a decreases from 10 16 to 10 16 , respectively, for the above values of G * and φ. Therefore, for D = 1. 1, all the contact spots ... evaluated for experimentally observed values of D = 1. 38 (Majumdar and Bhushan, 19 90) and φ = 0.05 (Bhushan and Doerner, 19 89) for disk type C, and...

Ngày tải lên: 18/10/2013, 09:15

... c Si (10 0) 0 .12 0.03 0 .18 SiO 2 /Si 0. 21 0.03 0 .19 C 18 single-grafted/SiO 2 /Si 0 .16 0.04 0.23 C 18 double-grafted/SiO 2 /Si 0 .16 0. 018 0.07 Au/Si 1. 16 0.04 0 .13 ODT/Au/Si ... M., Ogletree, D. F., and Sautet, P. (19 93), “Viscoelastic and Electrical Properties of Self-Assembled Monolayers on Au (11 1) Films,” Langmuir 9, 3600–3 611 . Ulma...

Ngày tải lên: 18/10/2013, 09:15

... directions in Figures 14 .13 and 14 .15 ). TABLE 14 .2 Surface Roughness (σ and P-V distance), Micro- and Macroscale Friction, Microscratching/Wear, and Nano- and Microhardness Data for Various Samples Surface ... graphite on a microscale have been measured by Kaneko et al. (19 88, 19 91a), Miyamoto et al. (19 90, 19 91a,c), Mate (19 93a,b), Bhushan et al. (19 94a–c,e, 19...

Ngày tải lên: 18/10/2013, 09:15

... — Polysilicon 1. 07 0.04 18 — — Polysilicon (lapped) 0 .16 0.05 18 25 12 .5 PECVD-oxide coated Si (11 1) 1. 50 0. 01 8 5 18 .0 Dry-oxidized Si (11 1) 0 .11 0.04 16 14 17 .0 Wet-oxidized Si (11 1) 0.25 0.04 17 18 14 .4 C ... Coefficient of Macroscale Friction b Si (11 1) 0 .11 0.03 0 .18 C + -implanted Si (11 1) 0.33 0.02 0 .18 a Versus Si 3 N 4 tip, t...

Ngày tải lên: 25/10/2013, 12:15

... force upon separation of the tip and sample is often referred to as the pull-off force. Unfortunately, measuring the pull-off force does not directly give the work of adhesion. The pull-off force ... equations Hertz DMT BCP JKRS Maugis PA A = = 3 2 ∆ PA A =− = 3 2 2 ∆ PA A A A =− − =− 3 2 3 2 1 1∆ PA A A A A =− =− 3 2 6 26 3 ∆ 1 2 12 1 4 3 11 1 11 4 3 1 2 22 2 2 22 322 2 2...

Ngày tải lên: 09/11/2013, 03:15

... solvation force at surface separations below a few molecular diameters (Snook and van Megan, 19 79, 19 80, 19 81; van Megan and Snook, 19 79, 19 81; Kjellander and Marcelja, 19 85a,b; Tarazona and Vincente, ... (Marcelja and Radic, 19 76; Marcelja et al., 19 77; Gruen and Marcelja, 19 83; Jönsson and Wennerström, 19 83; Schiby and Ruckenstein, 19 83; Luzar et al.,...

Ngày tải lên: 17/12/2013, 11:15

... scale. Figure 6 .16 shows two images of the friction force corresponding to the (10 0) and the (11 1) surface taken at an estimated loading force of 15 nN. Both images show stick-slip-like variations of the ... 1/ R 1 + 1/ R 2 and E * is an effective modulus of elasticity such that 1/ E* = (1 ν 2 1 )/E 1 + (1 ν 2 2 )/E 2 , with E the modulus of elasticity and ν Poi...

Ngày tải lên: 25/12/2013, 23:18

... Perry, 19 81, 19 83; Jacobson et al., 19 83; Valli, 19 86; Bhushan, 19 87; Steinmann et al., 19 87; Stone et al., 19 88; Wu et al., 19 89, 19 90b; Wu, 19 90, 19 91; Bhushan et al., 19 95, 19 96, 19 97; Bhushan and ... Townsend et al., 19 93; Bhushan et al., 19 95, 19 96, 19 97; Bhushan and Gupta, 19 95; Gupta and Bhushan ,19 95a, b; Bhushan, 19 96; Patton and Bhush...

Ngày tải lên: 25/12/2013, 23:18

... al., 19 91, 19 93; Bhushan, 19 95; Bhushan et al., 19 94b–e, 19 95a–f, 19 96, 19 97a,b; Koinkar and Bhushan, 19 96a,b, 19 97b,c; Kulkarni and Bhushan, 19 96a,b, 19 97; DeVecchio and Bhushan, 19 97). AFMs ... dedicated issues of the Journal of Vacuum Science Technolology (B9, 19 91, pp. 4 01 12 11) and Ultramicroscopy (Vol. 42–44, 19 92). TABLE 1. 1 Comparison...

Ngày tải lên: 23/01/2014, 04:20

... 1. 9E-05 10 0 nm 0.78 0.05 0.003 7.63E-04 1. 91E-04 1 µm 7. 81 0.49 0.0 31 0.008 0.002 10 µm 78 .13 4.88 0. 31 0.08 0.02 10 0 µm 7 81. 25 48.83 3.05 0.76 0 .19 250 µm 19 53 .13 12 2.07 7.63 1. 91 0.48 © 19 99 by ... (in nanometers) as a Function of the Scan Range and the Converter Resolution 8 Bit 12 Bit 16 Bit 18 Bit 20 Bit 1 nm 0.008 4.9E-04 3.1E-05 7.6E-06 1. 9E-...

Ngày tải lên: 27/01/2014, 14:20