... space and launch environments.Chapter 13 is entirely devoted to handling and contamination controlsfor MEMS in space applications due to the importance of the topic areaOsiander / MEMS and microstructures ... mission, and have tried to convey this experience in thesechapters, hoping to create a basic understanding of the complexities while dealing with MEMS devices and the difference to well understood ... introduction, and should be used in conjunction with the sections of this book covering reliability,packaging, contamination, and handling concerns.Osiander / MEMS and microstructures in Aerospace applications...