Final Report: Compliant Thermo- Mechanical MEMS Actuators LDRD #52553 docx

... SAND2004-6635 Unlimited Release Printed December 2004 Final Report: Compliant Thermo- Mechanical MEMS Actuators LDRD #52553 Michael S. Baker, Richard A. Plass, Thomas J. Headley, Jeremy ... Figure 2-1. 2.3. Thermo -mechanical modeling From the electro-thermal modeling, the temperature profile of the heated actuator legs is obtained, and becomes the input for...

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... Reliability 99 Physics Symposium, Orlando, Florida, 2001 Non-Destructive Resonant Frequency Measurement on MEMS Actuators Norman F. Smith 1 , Danelle M. Tanner 1 , Scot E. Swanson 1 , and Samuel L. Miller 2 1 Sandia ... 87109 A BSTRACT Resonant frequency measurements provide useful insight into the repeatability of MicroElectroMechanical Systems (MEMS) manu- facturing processes. Several t...

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... Reliability 99 Physics Symposium, Orlando, Florida, 2001 Non-Destructive Resonant Frequency Measurement on MEMS Actuators Norman F. Smith 1 , Danelle M. Tanner 1 , Scot E. Swanson 1 , and Samuel L. Miller 2 1 Sandia ... 87109 A BSTRACT Resonant frequency measurements provide useful insight into the repeatability of MicroElectroMechanical Systems (MEMS) manu- facturing processes. Several t...

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