fabrication of mems pressure sensor

Ngày tải lên: 13/11/2014, 08:38

... evaluate performance, fabrication and testing. Reviews of the modeling and test results enable optimization of the performance of the MEMS device. Fig. 1-6. A typical approach to MEMS application ... complexity of the design, it’s often difficult to predict the performance of MEMS devices intuitively. In these cases computer simulations may provide a means to study the performance of MEMS devices ... Role of numerical simulation A typical approach to MEMS application from concept to devices can be shown in Fig. 1-6. The approach consists of several steps such as specifications of MEMS device,...

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Ngày tải lên: 27/07/2014, 22:21

... 109 5.7 Smart Sensors 109 References 112 CHAPTER 6 Pressure Sensors 113 6.1 Introduction 113 6.2 Physics of Pressure Sensing 114 6.2.1 Pressure Sensor Specifications 117 6.2.2 Dynamic Pressure Sensing ... the largest slice of the pie of the overall MEMS market. This is likely to be the case in the immediate future as well. The main emphasis of this text is on mechanical sensors, including pressure, force, ... flow sensors. Various types of actuation mechanism, relevant to MEMS, will also be addressed together with examples of the fundamental techniques used for mechanical sensors. The main methods of...

Ngày tải lên: 22/12/2013, 21:17

... physical etch 2.3 Fabrication Techniques 21 Resist profile over narrow trench Resist profile over wide trench Figure 2.9 Profiles of resist over wide and narrow trenches. Note the thinning of the resist ... World’s Smallest Pressure Sensor, ” Transducers ’01, Munich, Germany, June 10–14, 2001, pp. 490–493. 38 Materials and Fabrication Techniques offered by a selection of packages. Chapter 4 describes some of ... of these courses. The main subject area of the text is that of mechanical microsensors, and in order to assist the reader in this respect, we have covered some of the fundamental principles of...

Ngày tải lên: 25/12/2013, 19:15

... 2 Atmospheric pressure Atmospheric pressure P-3 P-4 Pressure Pressure ON ON OFF OFF Applied pressure (kPa) Display value (kPa) Set value (kPa) Comparative Output 1 Comparative Output 2 Applied pressure ... head. Positive pressure and compound pressure types Positive pressure and compound pressure types Vacuum pressure type Vacuum pressure type Applied pressure ex- ceeds the upper limit of displayable ... Positive pressure type : Vacuum pressure type International System of Units (SI) Note: ‘MPa’ in case of combining with DPH-A02, DPH-A12 or DPH-A22 positive pressure sensor head. Pressure Pressure 2digits...

Ngày tải lên: 15/02/2014, 10:02

... D1 a t high pressure. Figure 2B shows that the spectra of the apo- and Mg 2+ forms of enolase at high pressure are identical and differ from that of the Mn 2+ enzyme. As the spectrum of Mn 2+ -enolase ... enzyme. This article presents a study of the pressure- induced dissociation of yeast enolase in the presence of Mn 2+ .We demonstrate the ability of hydrostatic pressure to produce native monomers ... high pressures. The values of D2 were used to calculate K d for dissociation o f t he dimer into monomers, assuming that the low pressure value of D2is that of dimeric enzyme and the high pressure...

Ngày tải lên: 19/02/2014, 16:20

... agglomeration (merging of two particles into one), breakage (division of one particle to two) as well as nucleation of particles of size r ≥0 and particle feed and removal. The rate of change of the continuous-phase variables ... is the subject of Chaps. 7 through 9. Position control of MEMS actuators is presented in Chap. 7, closed-loop operation of precision MEMS gyroscopes is covered in Chap. 8, and the control of particle ... molding method for the fabrication of micro-components [69]. A representative diagram of the HVOF thermal spray process is shown in Fig. 2.12. The high -pressure combustion of a fuel (typically...

Ngày tải lên: 05/03/2014, 11:20

... SU8-50 ldNi nickel sulfamate electrolyte. The value of applied current density was in the range of 1-10ASD. Temperature of 52 o C and pressure of 4Kg/cm 2 would help to make a better interface ... angular rate sensor of linewidth and thickness of 50àm and 120àm, respectively. Keywords: UV-LIGA, HAR, SU8, comb structure 1. Introduction The LIGA process (Lithographie, Galvanoformung, Abformung) ... work. Reference 1. Marc Madou, Fundamentals of Microfabrication. CRC Press, 1997. 2. Chien-Hung Ho and Wensyang Hsu. Experimental Investigation of an Embedded Root Method for Stripping SU-8...

Ngày tải lên: 05/03/2014, 14:20

... the fabrication of SOI wafers, but also in device fabrication processes, such as the bonding together of wafers to form the vacuum cavity of an absolute pressure sensor, as well as at the end of ... 109 5.7 Smart Sensors 109 References 112 CHAPTER 6 Pressure Sensors 113 6.1 Introduction 113 6.2 Physics of Pressure Sensing 114 6.2.1 Pressure Sensor Specifications 117 6.2.2 Dynamic Pressure Sensing ... x gas pressure (microns*atm) Figure 1.1 A plot of breakdown voltage against electrode separation (in air at 1 atmosphere of pressure) . order of 1,000:1 [11]. An illustration of the use of etch...

Ngày tải lên: 05/03/2014, 15:20

... application of these wires was recently demonstrated for the fabrication of electrodes for thin lithium-ion batteries [38]. The binding of gold to the viruses followed by reduction of the cobalt ... formation of ordered metallic assemblies at the nano-scale have involved the strepavidin protein array of a 2D array of biotinylated DNA, followed by metallization of the array [17]. Use of the ... D (2005) Structure of the cross- beta spine of amyloid-like fibrils. Nature 435, 773–778. 25 Inouye H, Sharma D, Goux WJ & Kirschner DA (2006) Structure of core domain of fibril-forming PHF...

Ngày tải lên: 16/03/2014, 12:20

... These are attributed to the change of the evaporating rate of SiO powders with the change of the ambient gas pressure. A lower pressure not only enhances the yield of SiNWs, but also ensures the ... surface of SiNWs is easier than forming a new independent nucleus. In the case of SiNWs depositing in an open system, there is a continual supply of SiO vapor, and the ambient pressure has less of ... virtual partial pressure of the vapor and P e is the equi- librium vapor pressure at the site of deposition, T is the deposition temperature, R is the gas con- stant, and V m is the molar volume of the...

Ngày tải lên: 16/03/2014, 15:05

... Fabrication of a porous polyimide membrane using a silicon nanowire array as a template Woong Kim ⁎ , Myung-Ki Lee Department of Materials Science and Engineering, ... polyimide membr ane intact, XeF 2 etching was c arried out over 5 0–200 cy cles of exposure t o 4 Torr of XeF 2 and 2 Torr of N 2 for 60 s . Polyimide membr anes were e ither detached from silicon ... be adjusted by simply altering the amount of solution applied. About 5–10 μl of polyimide solution was found to be appropriate for a silicon substrate of 0.5 by 0.5 cm. Substrates treated with...

Ngày tải lên: 16/03/2014, 15:10

... principles of the conductometric sensors is the varia- tion of free carriers density of the active layer exposed to a gas concentration which can be correlated to a change in conduc- tance G of the ... and of the electrodes were 40 nm and 50 ␮m, respectively, the area of the Fig. 1. AFM (3 m ì3 m) micrograph of the bare WO 3 surface annealed in dry air (1 h at 450 ◦ C). active part of the sensor ... effect. The transient responses of Fig. 4b, suggested that one of the two steps of the reaction (8) resulting of the O 3 dissociation is enhanced by the presence of the metal particles [33–35]. p 2 O 2 +∗↔O p(ads) adsorption...

Ngày tải lên: 19/03/2014, 16:48

... Publishers All rights reserved Printed in the United States of America Journal of Nanoscience and Nanotechnology Vol. 10, 4259–4265, 2010 Fabrication of Free Standing Anodic Titanium Oxide Membranes with ... morphology of the top- surface TiO 2 membrane. The image clearly reveals that the entire surface of the ATO layer is covered with a layer of nanowires, which is attributed to the long time split of the ... important roles in the fabrication of functional nanodevices. 1 Recently, special interest has been focused on TiO 2 nanostructures, which have many potential applications in gas sensors 2 and biocompatible, 3 photovoltaic, 4 and...

Ngày tải lên: 19/03/2014, 16:48