Study of optical properties of insulator – metal insulator structure for application on thin film filter

VIETNAM NATIONAL UNIVERSITY, HANOI VIETNAM JAPAN UNIVERSITY DAO DUY CUONG STUDY OF OPTICAL PROPERTIES OF INSULATOR - METAL - INSULATOR STRUCTURE FOR APPLICATION ON THIN FILM FILTER MASTER’S THESIS Hanoi, 2018 VIETNAM NATIONAL UNIVERSITY, HANOI VIETNAM JAPAN UNIVERSITY - DAO DUY CUONG STUDY OF OPTICAL PROPERTIES OF INSULATOR – METAL - INSULATOR STRUCTURE FOR APPLICATION ON THIN FILM FILTER MAJOR: NANOTECHNOLOGY SUPERVISOR: Dr Pham Tien Thanh Hanoi, 2018 Acknowledgement First and foremost, I wish to express my gratitude to my supervisor, Dr Pham Tien Thanh for his patient guidance and encouragement during my study and research at the Vietnam-Japan University I would like to thank Prof Kajikawa and his students at the Kajikawa Lab, Faculty of Electrical and Electronics Engineering, Tokyo Institute of Technology who helped me facilitate to perform experiments and measurements I also would like to send my sincere thanks to the teachers of the Nanotechnology Program, Vietnam-Japan University, who have taught and interested me over the past two years Besides, I am grateful to my friends and my family who are always there to share their experiences that help me overcome the obstacles of the student‘s life Hanoi, 8th June, 2018 Author Dao Duy Cuong TABLE OF CONTENT INTRODUCTION CHAPTER 1: LITERATURE REVIEW 1.1 Metal-Insulator-Metal Diode 1.1 Surface Plasmon Resonance in the MIM structure 1.2 MIM structure application for Biosensors 1.3 Optical interference filters CHAPTER 2: EXPERIMENTAL METHODS 2.1 Optical filter 2.1.1 Principle of Optical filter 2.1.2 Interference effect in multilayer structures 2.1.3 Optical filter 10 2.1.4 Band-pass filter 12 2.2 Transfer matrix for multilayer optics 14 2.2.1 Calculation method 14 CHAPTER 3: IMI STRUCTURAL CALCULATION 17 3.1 Calculation of transmittance in IMI structure 17 3.1.1 Transmittance Properties of IMI film using TiO2 and Ag 18 3.1.2 Transmittance Properties of IMI film using MoO3 and Ag 18 3.1.3 Transmittance Properties of IMI film using TiO2 and Au 19 3.1.4 Transmittance Properties of IMI film using MoO3 and Au 20 3.2 Investigation of optical properties of MoO3/Ag/MoO3/Glass structure 20 3.2.1 Transmittance property 20 3.2.2 Reflectance property 21 3.2.3 Absorption property 22 3.3 Optimization of filters 23 3.3.1 Transmittance spectrum with different upper and lower MoO3 layers 23 3.3.2 Optimizing of MoO3 thin film thickness 24 3.3.3 Optimizing of Ag film thickness 25 3.4 Application of IMI on filter 26 CHAPTER 4: EXPERIMENT 27 4.1 Physical vapor deposition 27 4.1.1 Samples preparation 27 4.1.2 Vacuum evaporation 27 4.2 The measurement of reflectance and transmittance 28 CHAPTER 5: RESULTS AND DISCUSSION 30 5.1 Optical properties 30 5.1.1 Transmittance spectrum of each layer in IMI structure 30 5.1.2 Comparision of calculation results with experiments MoO3 31 5.1.3 Comparison of calculation results with experiment of Ag layer 32 5.1.4 Comparison of calculation results with experiment of Ag/MoO3 33 5.1.5 Comparison of calculation results with experiment of MoO3/Ag/MoO3 33 5.2 Transmittance spectra of changing thickness of IMI structure 34 5.2.1 Effect of thickness of MoO3 to transmittance spectra of IMI structure 34 5.2.2 Effect of Ag film thickness to transmittance spectra of IMI 35 5.2.3 Reflectance spectrum of IMI 36 5.2.4 Application on filter 37 5.3 The difference between calculation and experiment results 38 CONCLUSION 40 REFERENCES 41 LIST OF FIGURES Figure 1.1 Simple MIM diode structure used from 1960s Figure 1.2 Current density versus voltage relationship of (Al/Al2O3/Cr) MIM diode [3] Figure 1.3 Biosensor based on MIM structure[19] Figure 1.4 Single Fabry-Perot Cavity Figure 1.5 The transmission of an etalon as an element of wavelength Figure 2.1 Interference effect showing instances of reflection between layers Figure 2.2 Interference effect of (a) enhanced interference and (b) destructive interference [34] Figure 2.3 Ways of light with it comes to a multilayer structure [21] 10 Figure 2.4 Working guideline of two diverse optical filters which support the transmission of the green part of light [40] 11 Figure 2.5 Transmission bends for various sorts of dichroic filters [42] 12 Figure 2.6 Basic characteristics of a band-pass filter [44] 13 Figure 2.7 Schematic of multilayer nonlinear medium 14 Figure 3.1 Metal (15 nm), Metal (15 nm) -Insulator (100 nm), Insulator (100 nm) – Metal (15 nm) – Insulator (100nm) (IMI) structure 17 Figure 3.2 Transmittance of structures: Ag, Ag/TiO2, TiO2/Ag/TiO2 18 Figure 3.3 Transmittance of structures: Ag, Ag/MoO3, MoO3/Ag/MoO3 19 Figure 3.4 Transmittance of structures: Au, Au/TiO2, TiO2/Au/TiO2 19 Figure 3.5 Transmittance of structures: Au, Au/MoO3, MoO3/Au/MoO3 20 Figure 3.6 Comparison of transmittance spectrum of IMI structure with the different MoO3 film thickness 21 Figure 3.7 Comparison of reflectance spectrum of IMI structure with different MoO3 film thickness 22 Figure 3.8 Comparison of absorption spectrum of IMI structure with different MoO3 film thickness 23 Figure 3.9 Transmittance spectrum of IMI structure which MoO3 top layer is 50nm, MoO3 bottom layer 80nm, 100nm, 150nm 24 Figure 3.10 Transmittacnce spectrum of MoO3 film with different thickness 25 Figure 3.11 Transmittance spectrum of IMI film with different Ag layer thickness 26 Figure 3.12 Transmittance of IMI structure with bandwidth of 70 nm 26 Figure 4.1 The cleaning process of glass substrate 27 Figure 4.2 Schematic of thermal evaporation system [39] 28 Figure 5.1 Experimental results of transmitance of Ag, MoO3, Ag/MoO3, and IMI 31 Figure 5.2 (a) Comparison of transmittance spectrum of MoO3 (102 nm)/Glass thin film between calculation and experiment, (b) schematic of MoO3 layer, (c) surface of MoO3 thin film 32 Figure 5.3 (a) Comparison of transmittance spectrum of Ag/Glass film between calculation and experiment (b) schematic of Ag layer, (c) surface of Ag thin film 32 Figure 5.4 (a) Fitting transmittance spectrum of the Ag/MoO3/Glass film via experiment and calculation (b) schematic of Ag/MoO3 layer, (c) surface of Ag/MoO3 thin film 33 Figure 5.5 (a) Comparison of transmittance spectrum of the MoO3 (100 nm)/Ag (10 nm)/MoO3 (100 nm) thin film via experiment and calculation, (b) schematic of IMI multilayer, (c) surface of IMI thin film 34 Figure 5.6 Experimental spectra of IMI with different thickness MoO3 of 80, 100 and 120 nm, respectively 35 Figure 5.7 Transmittance Spectra passing through IMI with different thicknesses of Ag of 10, 15 and 20 nm, respectively 36 Figure 5.8 Transmittance spectra passing through IMI film with different Ag film thickness of 10, 15 and 20 nm, respectively 37 Figure 5.9 Experiment of transmittance of IMI structure for band pass filters 37 Figure 5.10 SEM Image of IMI’surface 38 Figure 5.11 Comparison of the absorption characteristics of IMI film wich MoO3 thickness as parrameter 39 LIST OF TABLES Table 3.1 The parameters of materials used for calculation 17 Table 5.1 Parameters of materials used in evaporation 30 LIST OF ABBREVIATIONS ATR Attenuated Total Reflection FP Fabry-Perot IMI Insulator- Metal- Insulator IR Infrared MIM Metal- Insulator- Metal MOM Metal – Oxide – Metal NSOM Near-Field Scanning Optical Microscopy QCM Quartz Crystal Microbalance SPR Surface Plasmon Resonance TTR Transmittance/Reflectance INTRODUCTION Transition metal oxides form the solid group primarily ions have many optical and electrical properties Many of these oxides have been used extensively in electronic and magnetic equipment, during heterogeneous catalysis and in a number of other applications The necessity of transparent conductive coatings are increasing continuously due to many of these coatings applications in optoelectronic devices such as electrochromic [27] The thin film of transition metal oxide such as MoO3 has been studied because of many optical transition metal oxide properties special Therefore, the combination of the high transmission of MoO3 thin films and high conductivity of Ag thin film have been a promising approach In order to achieve high transmittance, a silver thin film sandwiched between two MoO3 films offers the reasonable solution [28] These results are confronted to those deduced from modeling by using codes based on Mathematica software The influence of the deposition rate of Ag onto the properties of the structures is also studied In this work, I combine both calculation and experiment methods to optimize the optical properties of IMI structure for the application on filters Research contents include: Calculation and analysis optical properties of the multilayer thin films Ag/Glass, Ag/MoO3/Glass, and MoO3/Ag/MoO3/Glass by the transfer matrix method Optimization of transmittance efficiency of MoO3/Ag/MoO3/Glass thin film Fabrication of the multilayer thin films of Ag/Glass, Ag/MoO3/Glass, and MoO3/Ag/MoO3/Glass by thermal vapor deposition method and evaluation of the capacity for applications of filter structure similar to the plasmonic effect The MI and I monolayer structure for the peak at 400 , however resonates with the IMI structure at 490 , indicating that the surface light resonance occurs depending on the MoO3 layer thickness in structure Figure 5.1 Experimental results of transmitance of Ag, MoO3, Ag/MoO3, and IMI 5.1.2 Comparision of calculation results with experiments MoO3 Figure 5.2 shows the transmittance spectra of MoO3 obtained from experiment and calculation The experimental thickness determined by QCM is 102 , the fitting result with calculation show that its matched well with the fitness of 105nm It can be seen that the transmittance peak at the wavelength of 420 obtained from calculation is very close to the experimental value Furthermore, the results also that the other transmittance peak at the wavelength of 630 from calculation is also matched with the experiment values Besides, the transmittance spectrum also indicated the different points between experiment and calculation The difference in calculation compared with experiment may be due to the uneven surface of MoO3 film in evaporated process After fabicating and determining the thickness several times It can be concluded that the thickness of MoO3 layer would 31 not close to the value of the thickness determined by Quartz Crystal Microbalance (QCM), with the diffrence arround 15 nm Figure 5.2 (a) Comparison of transmittance spectrum of MoO3 (102 )/Glass thin film between calculation and experiment, (b) schematic of MoO3 layer, (c) surface of MoO3 thin film 5.1.3 Comparison of calculation results with experiment of Ag layer The transmittance spectra of Ag thin film obtained from calculation and experiment indicated in Figure 5.3 with thickness is 10.5 nm As shown in Figure 5.3, the transmittance of Ag film decreases with increasing of the wavelength In addition, it can be seen that the transmittance spectra obtained from calculation is very close to that obtained from experiment Figure 5.3 (a) Comparison of transmittance spectrum of Ag/Glass film between calculation and experiment (b) schematic of Ag layer, (c) surface of Ag thin film 32 5.1.4 Comparison of calculation results with experiment of Ag/MoO3 According to the Transmittance spectra in Figure 5.4, the experiential spectra of Ag/MoO3 thin film is similar to the calculation In details, the experimental results of the thickness is 10.5/102nm, this thickness was fit to calculation at 10.5/105 nm, both spectra exhibits peak at the wavelength of 430 This proves that the as-prepared Ag/MoO3 have optical property matched well with the calculations In addition, we can observe the slightly difference in the transmittance in experiment and calculation, for example, the peak in calculation at 430 have the value of 82%, which is higher than that in experiment spectra of 75% This can be explained by the surface of thin film, which is not as flat as expectation in calculation It can be concluded that the thickness of MoO3 layer would not close to the value of the thickness determined by QCM, with the diffrence arround 15 nm Figure 5.4 (a) Fitting transmittance spectrum of the Ag/MoO3/Glass film via experiment and calculation (b) schematic of Ag/MoO3 layer, (c) surface of Ag/MoO3 thin film 5.1.5 Comparison of calculation results with experiment of MoO3/Ag/MoO3 Figure 5.5 shows the experiment and calculation of Transmittance spectra of MoO3/Ag/MoO3 thin film The thickness of IMI thin film was determined by QCM with the thickness of the top and bottom MoO3 layers being 100 layer being 10.2 , and that of Ag However, as compared to the fitting result with calculations, the thickness of MoO3 top layer is 97 , and the bottom layer is 105 33 In the wavelength region from 380 – 520 peaks observed at 400 and 500 , the two spectra fit well to each other, with and high transmittance However, in the longer wavelength region, the two spectra is separated to each other The transmittance of experiment spectra is higher than the calculation, which would be due to the uncontrol scattering of light at the surface of thin film, which is ignore in the calculation It can be concluded that the thickness of MoO3 layer would not close to the value of the thickness determined by QCM, with the diffrence arround 15 Figure 5.5 (a) Comparison of transmittance spectrum of the MoO3 (100 )/Ag (10 )/MoO3 (100 ) thin film via experiment and calculation, (b) schematic of IMI multilayer, (c) surface of IMI thin film 5.2 Transmittance spectra of changing thickness of IMI structure 5.2.1 Effect of thickness of MoO3 to transmittance spectra of IMI structure Figure 5.6 indicates the transmittance spectra of IMI with changes of upper and lower insulator layers of 80 , 100 , 120 , the thickness was determined by QCM, but there were difference as compared to calculation results in the theckness of two layers The transmittance At thickness of 80 change in thickness of MoO3 resuts in , there is a peak at 400 of 80% When the thickness increases to 100 480 with transmittance , spectrum gives a sharp peak at with transmittance of 90% Then, thickness of MoO3 is 120 located at 520 , peaks is and transmittance is 88% During this process, the absorption of 34 Ag does not change, with small absoprtion of MoO3 Therefore, when the thickness of insulator changes, peak of transmittance move to higher region with no change in magnitude This explain to resonance of coming light and reflecting light between layers in IMI structure Figure 5.6 Experimental spectra of IMI with different thickness MoO3 of 80, 100 and 120 , respectively 5.2.2 Effect of Ag film thickness to transmittance spectra of IMI Figure 5.7 exhibits the transmittance spectra of IMI structure with different thickness of Ag layer The thickness of top and bottom MoO3 layer was fit at 100 , , however, the calculation of thickness is not completed the same, the thickness of Ag layer was varied at 10, 15, and 20 We can see that these spectra have similar pattern with the peak around 460 In addition, there were differences in the spectra of the samples The samples with higher thickness exhibit lower of transmittance This means that the thickness of Ag layer affects to the optical property, which can be explained by the ability to scatter the incident light of metals, which lead to the reduce in the value of transmittance 35 Figure 5.7 Transmittance Spectra passing through IMI with different thicknesses of Ag of 10, 15 and 20 , respectively 5.2.3 Reflectance spectrum of IMI Figure 5.8 indicates the reflection spectrum of IMI of different thickness of Ag layer The thickness of top and bottom MoO3 layer was fit at 100 , however, the calculation of thickness is not completed the same, the thickness of Ag layer was varied at 10, 15, and 20 In three cases, the reflection spectrum contains two sharp peaks As the thickness of film increases, the reflectivity of IMI film gradually increases That can be explained by the increase of reflectivity of Ag film as its thickness increases, then the light passing through IMI film would depend on metal film All three reflection spectra contain peak at region 500-550 wavelength is suitable for biosensor device fabrication 36 which Figure 5.8 Transmittance spectra passing through IMI film with different Ag film thickness of 10, 15 and 20 , respectively 5.2.4 Application on filter By analysing the transmittance spectrum of IMI structures in which insulation layer thickness is 100nm and metal layer is 10nm (Figure 5.9), bandwidth is 60nm, its peak reaches 90% IMI film, which made by vacuum evaporation for application to the band pass filter, gives similar results as the calculation with the most suitable optimized parameters Figure 5.9 Experiment of transmittance of IMI structure for band pass filters 37 5.3 The difference between calculation and experiment results Compared the calculated results with experimental results of each layer in IMI, it is obvious that they are in good agreement at short wavelengths (lower 500nm) and there are significant deviation in long wavelengths The difference is contributed to the difference in the surface of the layers For calculation, we assume that the surface separator at all layer is plane, then the transmittance light is perpendicular to surface and it has parts: transmittance, reflecting and absorption In measurement, the deposition of material to the base is not regular Figure 5.10 illustrates the SEM image of the IMI surface Under the effect of heat, the IMI film grows irregularly on the substrate, and scattering affects the interference for case of IMI, then the effect of reflecting part is significant, but can not be input to the calculation Figure 5.10 SEM Image of IMI’surface However, at short wavelengths, light has higher energy, then it is difficult to scatter but easier to transmit Thus, in lower region, the calculated and experimental results of IMI are similar 38 Figure 5.11 Comparison of the absorption characteristics of IMI film wich MoO3 thickness as parrameter 39 CONCLUSION In conclusion, the transmittance properties MoO3/Ag/MoO3/Glass multilayer structure was investigated based on the MoO3 and Ag layers thickness Calculation results are showed to those deduced from modelling by Mathematica software code based on a transfer matrix method for optical multilayer The influence of the evaluation of MoO3 thickness onto the structures properties were studied In addition, the optical properties of IMI were calculated with two metals of Au and Ag, two insulators of MoO3 and TiO2 The results indicated that with the Ag thickness of 10 nm, we show an expanding of the transmittance of the MoO3/Ag/MoO3 onto glass structures by optimizing the MoO3 and Ag layers thicknesses When the thickness of MoO3 of two layer is 100 nm, the maximum transmission is 86% at the wavelength of 445 nm, the averaged transmittance in the visible range (380 –780 ) is 75%, bandwidth range is 70 , then it is suitable to apply to band pass filter For experiment, MoO3/Ag/MoO3/Glass multilayer structures were deposited by thermal evaporation on glass substrate with MoO3 powder and Ag are sources Vacuum was kept at 10 Pa during evaporation process, the evaporated speed of MoO3 and Ag are 0.25 and 0.04 , respectively The transmittance of MoO3 thin film is over 85% with the film thickness of 80 – 120 in visible regions The transmittance of IMI films is over 70% at the wavelength of 445 nm with the thickness of 100/10/100 , which can apply in band pass filter When the variation of the thickness of Ag and MoO3 layers, the spectra peak shifted, and the peaks intensity was also varied A good qualitative match up between the calculations and experiment results of the variation of the optical transmittance and reflectance of the MoO3/Ag/MoO3/Glass structures is also highlighted However, it is difficult for this method to control accurately the thickness between top and bottom layer 40 REFERENCES [1] Subramanian Krishnan (2004) Design, Fabrication and Characterization of Thin-Film M-I-M Diodes for Rectenna Array Ph.D thesis, Department of Electrical Engineering, University of South Florida [2] W Tantraporn (1964) “Electron current through metal-insulator-metal sandwiches” Solid-State Electronics, Vol 7, Iss 1, pp 81-91 [3] L O Hocker, D R Sokoloff, V Daneu and A Javan (1968) “Frequency mixing in the infrared and far-infrared using a metal-to-metal point contact diode” Appl Phys., Vol 12, Iss 12, pp 401-402 [4] R L Bailey (1972) “A proposed new concept for a solar energy convertor” J Eng Power, Vol 94, Iss 2, pp 73-77 [5] C Fumeaux, W Herrmann, F K Kneubühl and H Rothuizen (1998) “Nanometer thin-film Ni–NiO–Ni diodes for detection and mixing of 30 THz radiation” Infrared Phys Tech., Vol 39, Iss 3, pp 123-183 [6] M Sarehraz (2005) Novel rectenna for collection of infrared and visible radiation Ph.D Thesis, Department of Electrical Engineering, University of South Florida [7] A Sanchez, C F Davis, K C Liu, A Javan (1978) “The MOM tunneling diode: theoretical estimate of its performance at microwave and infrared frequencies” J Appl Phys., Vol 49, Iss 10, p 5270 [8] B J Eliasson (2001) Metal–insulator–metal diodes for solar energy conversion Ph.D Thesis, Department of Electrical and Computer Engineering, University of Colorado at Boulder [9] Jacob, J Babu, A Mathew, Mathew (2008) “Propagation of surface plasmon polaritons in anisotropic MIM and IMI structures” Super lattices Microstructures, Vol 44, Iss 3, pp 282-290 [10] J Jamnik and J Maier (2003) “Nanocrystallinity effects in lithium battery materials- aspects of nano-ionics Part IV” Phys Chem Chem Phys., Vol 5, Iss 23, pp 5215–5220 41 [11] P Balaya, A J Bhattacharyya, J Jamnik, Yu F Zhukovskii, E A Kotomin and J Marier (2006) “Nano-ionics in the context of lithium batteries” Journal of Power Sources, Vol 159, Iss 1, pp 171–178 [12] J Wang, J Polleux, J Lim and B Dunn (2007) “Pseudocapacitive contributions to electrochemical energy storage in TiO2 (anatase) nanoparticles” J Phys Chem C, Vol 111, Iss 40, pp 14925–14931 [13] S Hayashi, Y Ishigaki and M Fujii (2012) “Plasmonic effects on strong exciton-photon coupling in metal-insulator-metal micro-cavities” Phys Rev B, Vol 86, Iss 4, p 045408 [14] F Villa, T Lopez-Rios, and L E Regalado (2011) “Electromagnetic modes in metal-insulator-metal structures” Phys Rev B, Vol 63, p 165103 [15] M Tian, P Lu, L Chen, D Liu, and N Peyghambarian (2012) “Plasmonic Bragg reflectors based on metal embedded MIM structure,” Opt Comm., Vol 285, pp 5122-5127 [16] Domenico Pacifici, Henri J Lezec and H A A (2007) “All-optical modulation by plasmonic excitation of CdSe quantum dots” Nature Photonics, Vol 1, pp 402-406 [17] Hryciw, A Jun, Y Brongersma (2010) “Plasmonics: Electrifying plasmonics on silicon” Nat Mater, Vol 9, pp 3–4 [18] R J Walters, R V A van Loon, I Brunets, J Schmitz and A Polman (2010) “A silicon-based electrical source of surface plasmon polaritons” Nat Mater, Vol 9, pp 21–25 [19] H Raether (1988) Surface Plasmons, Springer Tracts in Modern Physics Springer [20] K H Choi, H J Nam, J A Jeong, S W Cho, H K Kim, J W Kang, D G Kim, and W J Cho (2008) Appl Phys Lett., Vol 92, p 223302 [21] F Abeles (2008) "Recherches sur la propagation des ondes electromagnetiques sinusoidales dans les milieux stratifies: application aux couches minces" Ann Phys (Paris), Vol 5, p 598 [22] E D Palik (2010) Handbook of Optical Constants of Solids, New York 42 [23] S Heavens, Optical Properties of Thin Films (Butterworth, London; Dover, New York, 5) [24] J Giergiel, C E Reed, S Ushioda, and J C Hemminger (2005) "Attenuated-total-reflection study of pyridine overlayers on silver films" Phys Rev B, Vol 31, p 3323 [25] A K Ghatak, K Thyagarajan, and M R Shenoy (2007) “Numerical Analysis of planar optical waveguides using matrix approach" IEEE J Lightwave Technol LT-5, 660 [26] D Zhang, P Wang, R Murakami, and X Sang (2010) “Effect of an interface charge density wave on surface plasmon resonance in ZnO/Ag/ZnO thin films”.Appl Phys Lett Vol 96, Iss 23, p 233114 [27] M Philipp, M Knupfer, B Beuchner, and H Gerardin (2011) “Plasmonic excitations in ZnO/Ag/ZnO multilayer systems” J Appl Phys., Vol 109, p 063710 [28] T Winkler, H Schmidt, H Fleugge, F Nikolayzik, I Baumann, S Schmale, T Weimann, P Hinze, H H Johannes, T Rabe, S Hamwi, T Riedl, and W Kowalsky (2011) Org Electron., Vol 12, pp 1612–1618 [29] D R Sahu and J L Huang (2007) Thin Solid Films, Vol 516, p 208 [30] D R Sahu, S Y Lin, and J L Huang (2008) Thin Solid Films, Vol 516, p 4728 [31] J Mayer, S Hamwi, T Beulow, H.-H Johannes, T Riedl, and W Kowalsky (2007) Appl Phys Lett., Vol 91, p 113506 [32] S Y Ryu, J H Noh, B H Hwang, C S Kim, S J Jo, J T Kim, H S Jeong, C H Lee, S Y Song, S H Choi, and S Y Park (2008) Appl Phys Lett., Vol 92, p 02306 [33] M Fahland, T Vogt, W Schoenberger, and N Schiller (2008) “Thin Solid Films”, Vol 516, p 5777 [34] https://en.wikipedia.org/wiki/Free_spectral_range [35] Arianna Tozzi (2014) The Dutch Photovoltaic Energy Portal (MSc thesis) Tech rep Delft University of Technology, The Netherlands, 2014 43 [36] Britannica Snell’s law - physics 2017 URL: https://www.britannica.com/ science/Snells-law [37] Juan Camilo Ortiz Lizcano (2014) Optic Filters for Built-integrated Photovoltaic (BIPV) applications MSc thesis, Tech.rep.Delft, University of Technology, The Netherlands, p 110 [38] H A Macleod (2001) Thin-Film Optical Filters Third ed Tucson, Arizona: Institute of Physics Publishing [39] Boundless Interference and Diffraction May 2016 URL: https://www Boundless.com/chemistry/ textbooks/boundless - chemistry textbook/introductionto-quantum-theory-7/the-nature-oflight-63/interference-and-diffraction-295-3665/ [40] Optical Filters Information| Engineering360 URL: Http://www.globalspec.com/learnmore/optical{\_}components{\_}optics/optical{\_ } components/optical {\_}filters [41] What is a Dichroic Filter? : Abrisa Technologies URL: http:// abrisatechnologies.com/2014/10/what-is-a-dichroic-filter/ [42] Dichroic filters URL: http://www.knightoptical.com/stock/opticalcomponents/uvvisniroptics/filters/dichroic-filters/ [43] Wavelength Selection Filters: Abrisa Technologies URL: http://abrisatechnologies.com/products-services/coating-solutions/coatingscapabilities/wavelength-selection-filters/ [44] S I Bozhevolnyi, I I Smolyaninov, and A V Zayats (1995) “Near-field microscopy of surface-plasmon polaritons - localization and internal interface imaging” Phys Rev B, Vol 51, Iss 24, p 17916 [45] E Verhagen, J A Dionne, L Kuipers, H A Atwater, and A Polman (2008) “Near field visualization of strongly confined surface plasmon polaritons in metalinsulator-metal waveguides” Nano Lett., Vol 8, Iss 9, p 2925 [46] J W Goodman and McGraw-Hill (1968) “Introduction to Fourier Optics” 44 [47] G Veronis and S H Fan (2005) “Bends and splitters in metal-dielectricmetal sub wavelength plasmonic waveguides” Appl Phys Lett., Vol 87, Iss 13, p 131102 45 ... NATIONAL UNIVERSITY, HANOI VIETNAM JAPAN UNIVERSITY - DAO DUY CUONG STUDY OF OPTICAL PROPERTIES OF INSULATOR – METAL - INSULATOR STRUCTURE FOR APPLICATION ON THIN FILM FILTER. .. low Therefore, this structure of IMI of MoO3 and Au is not suitable for filter Figure 3.5 Transmittance of structures: Au, Au/MoO3, MoO3/Au/MoO3 3.2 Investigation of optical properties of structure. .. the properties of the structures is also studied In this work, I combine both calculation and experiment methods to optimize the optical properties of IMI structure for the application on filters