Design and fabrication of dipole antenna at optical frequency

MINISTRY OF EDUCATION AND TRAINING HANOI UNIVERSITY OF SCIENCE AND TECHONOLOGY - NGUYEN NGOC SON DESIGN AND FABRICATION OF DIPOLE ANTENNA AT OPTICAL FREQUENCY MASTER THESIS OF SCIENCE MATERIALS SCIENCE Hanoi – 2018 MINISTRY OF EDUCATION AND TRAINING HANOI UNIVERSITY OF SCIENCE AND TECHONOLOGY - NGUYEN NGOC SON DESIGN AND FABRICATION OF DIPOLE ANTENNA AT OPTICAL FREQUENCY Science and Engineering of Electronic Materials MASTER THESIS OF SCIENCE MATERIALS SCIENCE SUPERVISOR Assoc Prof Chu Manh Hoang Hanoi – 2018 ACKNOWLEDGEMENT Firstly, I would like to thank my supervisor Assoc Prof Chu Manh Hoang for his guidance, support, and encouragement during the time of learning and working at ITIMS I sincerely thank all the teachers in the International Training Institute for Materials Science for their support and interest throughout the learning and implementation of this project The acknowledgment would be also sent to all the members of MEMS group for helped me in difficult conditions In addition, I would like to thank my colleagues Mr Tam, Mr Chinh, Mrs Thai, Mr Ngo Minh, Mr Hoang and Mrs Thuy for the knowledge and experience that has helped me in the last two years Finally, I would like to thank my parents, my brother and my wife for their invaluable support and encouragement in terms of finance as well as the spirit that is the main motivation for me to overcome all challengers I LIST OF PUBLICATIONS Nguyen Van Minh, Nguyen Ngoc Son, Nghiem Thi Ha Lien, Chu Manh Hoang, (2017), “Non-close packaged monolayer of silica nanoparticles on silicon substrate using HF vapor etching”, IET Micro & Nano Letters, (IET, ISSN 17500443), doi: 10.1049/mnl.2016.0825, pp 656–659 Nguyen Ngoc Son, Nguyen Van Minh, Chu Manh Hoang, (2017), “Absorption and scattering of goldshell semi-sphere nanoparticles”, Advances in Optics Photonics Spectroscopy & Applications IX, Ninh Bình 7-10/11/2016, ISBN:978604-913-578-1, pp 385–388 Nguyen Ngoc Son, Chu Manh Hoang, (2017), “Modeling and simulation of dipole nanoantenna based on semisphere nanoparticles”, Hội nghị Vật liệu Công nghệ nano tiên tiến, Hà Nội 14-15/8/2017 ISBN: 978-604-95-0298-9, pp 225-229 Nguyen Ngoc Son, Vu Thi Ngoc Thuy, Chu Manh Hoang, (2017), “Influence of incident light on optical characteristics of the nanoparticle-based nanoantenna”, Hội nghị toàn quốc Vật lý chất rắn Khoa học vật liệu lần thứ 10 (SPMS2017), Huế 19-21/10/2017, ISBN:978-604-95-0326-9, pp 512-514 Nguyen Van Minh, Do Thi Hue, Nguyen Ngoc Son, Nghiem Thi Ha Lien, Chu Manh Hoang, (2017), “Plasmonic nanostructures based on monolayer of closepackaged silica nanoparticles”, Advances in Optics Photonics Spectroscopy & Applications IX, Ninh Bình 7-10/11/2016, ISBN:978-604-913-578-1, pp 206-209 II STATEMENT OF ORIGINAL AUTHORSHIP I hereby declare that the results presented in the thesis are performed by the author The research contained in this thesis has not been previously submitted to meet requirements for an award at this or any higher education institutions Date: 30/9/2018 Signature III TABLE OF CONTENTS ABSTRACT CHAPTER INTRODUCTION 1.1 RF antennas and optical nano-antennas 1.2 Applications of optical nano-antennas 1.2.1 Optical nano-antennas as solution of nanoscale imaging and spectroscopy 1.2.2 Optical nano-antennas for solar energy harvesting 1.2.3 Optical nano-antennas for biosensors applications 11 1.3 Fabrication methods 13 1.3.1 Electron-beam lithography 14 1.3.2 Focused-ion beam milling 16 1.3.3 Self-assembly methods 17 1.4 Purpose of this thesis 19 CHAPTER THEORETICAL BACKGROUND 20 2.1 Theoretical of surface plasmons 20 2.1.1 Surface plasmon polaritons 20 2.1.2 Localized surface plasmons 24 2.2 Optical characterization of nano-antennas 26 2.2.1 Far-field scattering 27 2.2.2 The near-field intensity enhancement 28 CHAPTER SIMULATION AND EXPERIMENT METHODS 33 3.1 Simulation method 33 3.1.1 Modeling 34 3.1.2 Boundary conditions 35 3.1.3 Meshing 36 3.1.4 Incident light 37 3.1.5 Simulation parameter 38 3.2 Fabrication method 39 IV 3.2.1 Self-assembly close-packed monolayer of silica nanoparticles 39 3.2.2 Tuning size of nano-antennas 41 3.3.3 Sintering the sample 41 3.3.4 Sputtering 42 CHAPTER RESULTS AND DISCUSSION 43 4.1 The influence of geometry parameters on resonance spectrum 43 4.1.1 The influence of antennas size on resonance spectrum 44 4.1.2 The influence of gap size on resonance spectrum 47 4.1.3 The influence of gold shell thickness on resonance spectrum 49 4.2 The influence of incident light on resonance spectrum 53 4.2.1 The influence of polarization angles on resonance spectrum 53 4.2.2 The influence of s-polarized light on resonance spectrum 54 4.2.3 The influence of p-polarized light on resonance spectrum 56 4.3 The influence of environment refractive index on resonance spectrum 59 4.4 Experimental results 62 4.4.1 Fabrication of a monolayer of silica nanoparticles 62 4.4.2 Controlling the antenna size by using HF vapor etching 63 CONCLUSIONS 64 SUGGESTED FUTURE WORKS 64 REFERENCES 65 V LIST OF FIGURES Figure 1.1 Working schematic of RF antennas Figure 1.2 Schematics of the experimental arrangement Figure 1.3 Examples of ORAs and of a stripe Figure 1.4 Schematic of different types of antenna effects in photovoltaics 10 Figure 1.5 Representation of biosensors configuration based on optical nanoantennas 12 Figure 1.6 Sketch of the main steps for standard EBL and FIB nanostructuring of nano-antennas 14 Figure 1.7 SEM image of optical nano-antennas 15 Figure 1.8 Images of Au core –Ag shell nanoprisms 17 Figure 2.1 Schematic representation of SPPs propagation at a metal-dielectric interface 21 Figure 2.2 Schematic illustration of a localized surface plasmon resonance 24 Figure 2.3 Typical dark-field setup for scattering measurements 27 Figure 2.4 Sketch of a standard confocal setup 29 Figure 2.5 Sketch of a standard apertureless SNOM 30 Figure 2.6 Sketch of a standard aperture SNOM 31 Figure 3.1 The 3D view of the antenna structures 34 Figure 3.2 Schematic explanation of the boundary conditions 35 Figure 3.3 Mesh used for the antenna simulations 36 Figure 3.4 Schematic of the propagation of an s-polarized wave light and an ppolarized wave light 37 Figure 3.6 Schematic of the principle of the drop coating method 40 Figure 3.7 The sputtering system used to deposite metal film 42 Figure 4.1 Regulations on marking position in the thesis 43 Figure 4.2 Resonance spectra of dipole antennas (a) and dipole combine antennas (b) (g = 10nm, t = 10nm) with different antenna size 44 Figure 4.3 Resonance intensity and resonance position of dipole antennas as a function of the antenna size 45 Figure 4.4 Resonance intensity (a) and resonance position (b) of dipole combine antennas as a function of the antenna size (g = 10 nm, t = 10nm) 46 Figure 4.5 Resonance spectra of dipole antennas (d0 = 170 nm, t = 10 nm) (a) and dipole combine antennas (d0 = 200 nm, t = 10 nm) (b) with different gap size 47 Figure 4.6 Resonance intensity and resonance position of dipole antennas as a function of the gap size (d0 = 170 nm, t = 10 nm) 48 Figure 4.7 Resonance intensity (a) and resonance position (b) of dipole combine antennas as a function of the gap size (d0 = 200 nm, t = 10 nm) 49 VI Figure 4.8 Resonance spectra of dipole antennas and dipole combine antennas with different gold shell thickness 50 Figure 4.9 The electric normalized of dipole antenna 50 Figure 4.10 Resonance intensity (a) and resonance position (b) of dipole antennas (d0 = 170 nm, g = 10 nm) as a function of the gold shell thickness 51 Figure 4.11 Resonance intensity (a) and resonance position (b) of dipole antennas as a function of the gold shell thickness (d0 = 200 nm, g = nm) 52 Figure 4.12 Resonance spectra (a) and resonance intensity, resonance position (b) of dipole antennas (d0 = 170 nm, g = 10 nm, t = 10 nm) with different polarization angles 53 Figure 4.13 Resonance spectra of dipole antennas (d0 = 170 nm, g = 10 nm, t = 10 nm) (a) and dipole combine antennas (d0 = 200 nm, g = nm, t = 10 nm) (b) with different incident angles (s-polarization) 54 Figure 4.14 Resonance intensity and resonance position of dipole antennas (d0 = 170 nm, g = 10 nm, t = 10 nm) as a function of incident angles (s-polarization) 55 Figure 4.15 Resonance intensity (a) and resonance position (b) of dipole antennas as a function of incident angles (d0 = 200 nm, g = nm) (s-polarization) 56 Figure 4.16 Resonance spectra of dipole antennas (d0 = 170 nm, g = 10 nm, t = 10 nm) (a) and dipole combine antennas (d0 = 200 nm, g = nm, t = 10 nm) (b) with different incident angles (p-polarization) 56 Figure 4.17 Resonance intensity and resonance position of dipole antennas (d0 = 170 nm, g = 10 nm, t = 10 nm) as a function of incident angles (p-polarization) 57 Figure 4.18 Resonance intensity (a) and resonance position (b) of dipole antennas as a function of incident angles (d0 = 200 nm, g = nm) (p-polarization) 58 Figure 4.19 Resonance spectra of dipole antennas (d0 = 170 nm, g = 10 nm, t = 10 nm) (a) and dipole combine antennas (d0 = 200 nm, g = nm, t = 10 nm) (b) with different surrounding environment 59 Figure 4.20 Resonance intensity and resonance position of dipole antennas (d0 = 170 nm, g = 10 nm, t = 10 nm) as a function of refractive index of environment 60 Figure 4.21 Resonance intensity (a) and resonance position (b) of dipole antennas ) as a function of refractive index of environment (d0 = 200 nm, g = nm) 61 Figure 4.22 SEM imagines of monolayer silica nanoparticles size 235 nm with the magnification of (a) x600 and (b) x40000 63 Figure 4.23 SEM imagines of monolayer silica nanoparticles with size 235 nm, cross-section view(a),and cross-section view after etching HF vapor 120s (b) 63 LIST OF TABLES Table 3.1 Parameters and materials used for simulating 37 VII GLOSSARY OF TERM AND ABBREVIATIONS SPPs Surface Plasmon Polaritons LSPs Localized Surface Plasmons SNOM Scanning Near-field Optical Microscopy FEM Finite Element Method EBL E-beam Lithography FIB Focus Ion-beam Lithography OM Optical Microscopy RF Radio Frequency WLSC White-light Supercontinuum TERS Tip-enhanced Raman Spectroscopy SOI Silicon-on-insulator PV Photovoltaic NPs Nanoparticles RIU Refractive Index Unit VIII of view, but it is expected to observe the same spectra with a higher incident angle but still obtain a stronger resonance Based on the results of the study, we find that the incident light strongly influences on resonance properties of both proposed antenna models Changing the illumination angle results in the change in the electric field excites the nano-antenna which greatly affects the intensity of the resonance However, the effect of the illumination angle on the resonance position of the antenna is negligible The results also show that p-polarized light excites the antenna better than s-polarized light 4.3 The influence of environment refractive index on resonance spectrum As presented in the objectives of the thesis, we propose nano-antennas for biosensing applications So, the study of the effects of the refractive index of the environment on the resonance of nano-antennas is necessary In this section, we will report on the changing trend of the resonance spectrum with different environments Figure 4.19 Resonance spectra of dipole antennas (d0 = 170 nm, g = 10 nm, t = 10 nm) (a) and dipole combine antennas (d0 = 200 nm, g = nm, t = 10 nm) (b) with different surrounding environment As indicated in Figure 4.19(a,b), the refractive index of environment has a strong influence on the resonance spectrum of both antenna models Overall, the number of resonances of both antenna models is unchanged with different 59 environments However, the intensity enhancement and resonance position of nanoantennas highly fluctuate when the surrounding environment changes Figure 4.20 Resonance intensity and resonance position of dipole antennas (d0 = 170 nm, g = 10 nm, t = 10 nm) as a function of refractive index of environment Figure 4.20 shows the resonance intensity and resonance position of dipole antennas as a function of refractive index of an environment As can be seen, the resonance intensity tends to increase with an increase in the refractive index of the environment When the refractive index of the environment is at 1.0, the resonance intensity is over 30 The increase in the refractive index of the environment from 1.0 to 1.5 result in a sharp increase of this value, reaches the highest value of 55 On the other hand, the resonance position of dipole antennas experiences a strong increase, as a linear function of the refractive index of the environment It is over 30 times for resonance position of the dipole of antennas at 1.0 of a refractive index of the environment When the refractive index of the environment increases, it rises linearly and gets the highest value at 60 times 60 Figure 4.21 Resonance intensity (a) and resonance position (b) of dipole antennas ) as a function of refractive index of environment (d0 = 200 nm, g = nm) Figure 4.21(a) presents the refractive indexes of environment dependence of the resonance intensities of three peaks 1, and in the case of dipole model Overall, the resonance intensities of three peaks fluctuate when the refractive indices of environment change from 1.0 to 1.5 The resonance intensities of the peak and peak tend to grow up with an increase in the refractive indexes of the environment, whereas the values for peak decline The resonance intensity of the first and third peaks has the same values (about 150 times of incident light intensity) at the 1.0 value of the environmental refractive index, while it is less than 100 times for peak at the same environment As a result of increasing refractive index to 1.5, the value of peak rises up to 200 times and peak has an inconsiderable increase In contrary, it is a decline in the figure for the value of the first peak to 100 times After that, the values of the first peak decrease strongly with a decrease in the refractive index of the environment, the lowest value is smaller than 50 times at the refractive index value of the environment of 1.4 In contrast, values for peak experience a sharp increase to the highest of around 230 times when the value of the refractive index of the environment is 1.3 Figure 4.21(b) shows the resonance position of dipole antennas ranging from 650 nm to 1000 nm as a function of the refractive index of the environment from 61 1.0 to 1.5 In general, all the resonance positions of peaks tested tend to increase with an increase in the values of refractive indices of the environment, as a linear dependence Based on the research results, we can calculate the sensitivity to the environment is 150 nm/RIU for the dipole model In case of combined dipole model, the sensitivity of the first peak is 200 nm/RIU, 340 nm/RIU for the second peak and 400 nm/RIU for the third resonance This sensitivity is significant when compared with other previously published results and can be used to detect biological compounds in the visible region [15, 35] 4.4 Experimental results In this section, I will report the experimental results achieved in the process of completing the thesis These results include a monolayer of silica nanoparticles manufactured by dip coating method and adjust a size of antennas using vapor HF etching 4.4.1 Fabrication of a monolayer of silica nanoparticles SEM imagines of monolayer silica nanoparticles size 235 nm with the magnification of x600 and x40000 are shown in Figure 4.22 The monolayer silica nanoparticles are fabricated by a drop coating method with a different angle of substrates for each particle size With 235 nm silicon particles, the angle of inclination of the substrate in the optimal case is 45 degrees At a magnification of 600 times, Figure 4.22a shows that monolayer silica nanoparticles are continuously spread over a relatively large area Clearly to see that the silica particles are arranged close together and form the array has a hexagonal structure In the pictures, the particles are not uniform in size due to the synthesis process, not by arrangement causes 62 (a) (b) Figure 4.22 SEM imagines of monolayer silica nanoparticles size 235 nm with the magnification of (a) x600 and (b) x40000 4.4.2 Controlling the antenna size by using HF vapor etching Next step, monolayer silica nanoparticles are corroded in HF vapor for 120(s) The cross-sectional image of the monolayer silica nanoparticles before and after etching is shown in Figure 4.23 (a, b) respectively After 120s etching, the shape of the particles is still very uniform In addition, the bond between the particle and the silicon substrate still exists (a) (b) Figure 4.23 SEM imagines of monolayer silica nanoparticles with size 235 nm, cross-section view(a),and cross-section view after etching HF vapor 120s (b) 63 CONCLUSIONS In this thesis, we have proposed two optical nano-antenna models for biosensing applications that based on the surface plasmon polaritons and the localized surface plasmon Theoretical results suggest that both proposed nanoantennas can operate in the visible light region This thesis also has carried out a simulation analysis on the influence of the geometry parameters on the resonance spectrum of nano-antennas By selecting the geometry parameters, we can adjust the resonance position of the antenna resonance as desired in the visible regime We find that the incident light strongly influences on resonance properties of both proposed antenna models Changing the illumination angle results in the change in the electric field exciting the nanoantenna, which greatly affects the intensity of resonance The results also show that p-polarized light excites the antenna better than s-polarized light The sensitivity of the dipole antenna model is 150 nm/RIU whereas the average sensitivity of the combined dipole model is 340 nm/RIU We also describe a simple, fast and low cost method to fabricate array optical nano-antennas based on self-assembly techniques The geometry parameters of the structures are controlled at the nanoscale Especially, this method can fabricate nano-antennas with gap sizes smaller than 10 nm SUGGESTED FUTURE WORKS - Developing the proposed model to obtain higher sensitivity - Establish a measurement setup to verify the obtained results from the simulation - Explore a possible solution for integrating the nano-antennas into optical sensor 64 REFERENCES [1] Al̀, A and N Engheta, (2008), “Tuning the scattering response of optical nanoantennas with nanocircuit loads”, Nat Photonics, vol 2, no 5, pp 307– 310 [2] Babar, S and J H Weaver, (2015), “Optical constants of Cu, Ag, and Au revisited”, Appl Opt., vol 54, no 3, pp 477–481 [3] Bachelot, R., P Gleyzes, and A C Boccara, (1995), “Near-field optical microscope based on local perturbation of adiffraction spot”, Opt Lett., vol 20, no 18, pp 1924–1926 [4] Barnes, W L., A Dereux, and T W Ebbesen, (2003), “Surface plasmon subwavelength optics”, Nature, vol 424, no 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we compared different kinds of antennas and the potential enhancement of dipole antennas