Bsi bs en 62047 25 2016

BS EN 62047-25:2016 BSI Standards Publication Semiconductor devices — Micro-electromechanical devices Part 25: Silicon based MEMS fabrication technology — Measurement method of pull-press and shearing strength of micro bonding area BRITISH STANDARD BS EN 62047-25:2016 National foreword This British Standard is the UK implementation of EN 62047-25:2016 It is identical to IEC 62047-25:2016 The UK participation in its preparation was entrusted to Technical Committee EPL/47, Semiconductors A list of organizations represented on this committee can be obtained on request to its secretary This publication does not purport to include all the necessary provisions of a contract Users are responsible for its correct application © The British Standards Institution 2016 Published by BSI Standards Limited 2016 ISBN 978 580 85615 ICS 31.080.99 Compliance with a British Standard cannot confer immunity from legal obligations This British Standard was published under the authority of the Standards Policy and Strategy Committee on 30 November 2016 Amendments/corrigenda issued since publication Date Text affected BS EN 62047-25:2016 EUROPEAN STANDARD EN 62047-25 NORME EUROPÉENNE EUROPÄISCHE NORM November 2016 ICS 31.080.99 English Version Semiconductor devices - Micro-electromechanical devices Part 25: Silicon based MEMS fabrication technology Measurement method of pull-press and shearing strength of micro bonding area (IEC 62047-25:2016) Dispositifs semiconducteurs - Dispositifs microélectromécaniques - Partie 25: Technologie de fabrication de MEMS base de silicium - Méthode de mesure de la résistance la traction-compression et au cisaillement d'une micro zone de brasure (IEC 62047-25:2016) Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 25: Siliziumbasierte MEMSHerstellungstechnologie - Messverfahren zur Zug-Druckund Scherfestigkeit gebondeter Flächen im Mikrometerbereich (IEC 62047-25:2016) This European Standard was approved by CENELEC on 2016-10-03 CENELEC members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CENELEC member This European Standard exists in three official versions (English, French, German) A version in any other language made by translation under the responsibility of a CENELEC member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus, the Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom European Committee for Electrotechnical Standardization Comité Européen de Normalisation Electrotechnique Europäisches Komitee für Elektrotechnische Normung CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels © 2016 CENELEC All rights of exploitation in any form and by any means reserved worldwide for CENELEC Members Ref No EN 62047-25:2016 E BS EN 62047-25:2016 EN 62047-25:2016 European foreword The text of document 47F/249/FDIS, future edition of IEC 62047-25, prepared by SC 47F “Microelectromechanical systems” of IEC/TC 47 “Semiconductor devices" was submitted to the IECCENELEC parallel vote and approved by CENELEC as EN 62047-25:2016 The following dates are fixed: • latest date by which the document has to be implemented at national level by publication of an identical national standard or by endorsement (dop) 2017-07-03 • latest date by which the national standards conflicting with the document have to be withdrawn (dow) 2019-10-03 Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights CENELEC [and/or CEN] shall not be held responsible for identifying any or all such patent rights Endorsement notice The text of the International Standard IEC 62047-25:2016 was approved by CENELEC as a European Standard without any modification BS EN 62047-25:2016 EN 62047-25:2016 Annex ZA (normative) Normative references to international publications with their corresponding European publications The following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application For dated references, only the edition cited applies For undated references, the latest edition of the referenced document (including any amendments) applies NOTE When an International Publication has been modified by common modifications, indicated by (mod), the relevant EN/HD applies NOTE Up-to-date information on the latest versions of the European Standards listed in this annex is available here: www.cenelec.eu Publication Year Title EN/HD Year IEC 62047-1 - Semiconductor devices - Microelectromechanical devices Part 1: Terms and definitions EN 62047-1 - ISO 10012 - Measurement management systems EN ISO 10012 Requirements for measurement processes and measuring equipment - –2– BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 CONTENTS FOREWORD Scope Normative references Terms and definitions Requirements 4.1 Testing structure design requirements 4.2 Testing structure fabrication requirements 4.3 Testing environment requirements Testing method 5.1 General 5.2 Pull-press testing method 5.2.1 Imposing the loading force 5.2.2 Pull-press testing method operation process 5.2.3 Pull-press testing method result process 10 5.3 Shearing testing method 10 5.3.1 Shearing testing method operation process 10 5.3.2 Shearing testing method result process 12 Annex A (informative) Dimensions for testing structure and tensile/compressive strength 13 A.1 Dimensions for testing structure 13 A.2 Tensile strength and compressive strength 13 Annex B (informative) Pull-press testing method example 21 B.1 B.2 Dimensions for testing structure 21 Tensile strength and compressive strength 21 Figure − Pull-press testing structure Figure − Shearing testing structure Figure − Pull-press testing method operation process 10 Figure − Shearing testing method operation process 11 Table – Dimensions for shearing testing structure 12 Table A.1 – Dimensions for testing structure 13 Table A.2 – Tensile strength and compressive strength (bonding area: 10 µm × 10 µm) 13 Table A.3 – Tensile strength and compressive strength (bonding area: 20 àm ì 20 µm) 14 Table A.4 – Tensile strength and compressive strength (bonding area: 30 àm ì 30 àm) 14 Table A.5 – Tensile strength and compressive strength (bonding area: 40 àm ì 40 àm) 15 Table A.6 Tensile strength and compressive strength (bonding area: 50 àm ì 50 µm) 15 Table A.7 – Tensile strength and compressive strength (bonding area: 60 àm ì 60 àm) 15 Table A.8 – Tensile strength and compressive strength (bonding area: 70 àm ì 70 àm) 16 Table A.9 – Tensile strength and compressive strength (bonding area: 80 µm × 80 µm) 16 Table A.10 – Tensile strength and compressive strength (bonding area: 90 àm ì 90 àm) 17 Table A.11 – Tensile strength and compressive strength (bonding area: 100 àm ì 100 µm) 17 BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 –3– Table A.12 – Tensile strength and compressive strength (bonding area: 110 àm ì 110 àm) 18 Table A.13 – Tensile strength and compressive strength (bonding area: 120 àm ì 120 àm) 18 Table A.14 – Tensile strength and compressive strength (bonding area: 130 àm ì 130 àm) 19 Table A.15 – Tensile strength and compressive strength (bonding area: 140 àm ì 140 àm) 19 Table A.16 – Tensile strength and compressive strength (bonding area: 150 àm ì 150 àm) 20 Table B.1 – Dimensions for testing structure 21 Table B.2 – Tensile strength and compressive strength (bonding area: 110 àm ì 110 àm) 21 BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 –4– INTERNATIONAL ELECTROTECHNICAL COMMISSION SEMICONDUCTOR DEVICES – MICRO-ELECTROMECHANICAL DEVICES – Part 25: Silicon based MEMS fabrication technology – Measurement method of pull-press and shearing strength of micro bonding area FOREWORD 1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising all national electrotechnical committees (IEC National Committees) The object of IEC is to promote international co-operation on all questions concerning standardization in the electrical and electronic fields To this end and in addition to other activities, IEC publishes International Standards, Technical Specifications, Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC Publication(s)”) Their preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with may participate in this preparatory work International, governmental and nongovernmental organizations liaising with the IEC also participate in this preparation IEC collaborates closely with the International Organization for Standardization (ISO) in accordance with conditions determined by agreement between the two organizations 2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international consensus of opinion on the relevant subjects since each technical committee has representation from all interested IEC National Committees 3) IEC Publications have the form of recommendations for international use and are accepted by IEC National Committees in that sense While all reasonable efforts are made to ensure that the technical content of IEC Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any misinterpretation by any end user 4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications transparently to the maximum extent possible in their national and regional publications Any divergence between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in the latter 5) IEC itself does not provide any attestation of conformity Independent certification bodies provide conformity assessment services and, in some areas, access to IEC marks of conformity IEC is not responsible for any services carried out by independent certification bodies 6) All users should ensure that they have the latest edition of this publication 7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and members of its technical committees and IEC National Committees for any personal injury, property damage or other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC Publications 8) Attention is drawn to the Normative references cited in this publication Use of the referenced publications is indispensable for the correct application of this publication 9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of patent rights IEC shall not be held responsible for identifying any or all such patent rights International Standard IEC 62047-25 has been prepared by subcommittee 47F: Microelectromechanical systems, of IEC technical committee 47: Semiconductor devices The text of this standard is based on the following documents: FDIS Report on voting 47F/249/FDIS 47F/252/RVD Full information on the voting for the approval of this standard can be found in the report on voting indicated in the above table This publication has been drafted in accordance with the ISO/IEC Directives, Part BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 –5– The committee has decided that the contents of this publication will remain unchanged until the stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to the specific publication At this date, the publication will be • reconfirmed, • withdrawn, • replaced by a revised edition, or • amended IMPORTANT – The 'colour inside' logo on the cover page of this publication indicates that it contains colours which are considered to be useful for the correct understanding of its contents Users should therefore print this document using a colour printer –6– BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 SEMICONDUCTOR DEVICES – MICRO-ELECTROMECHANICAL DEVICES – Part 25: Silicon based MEMS fabrication technology – Measurement method of pull-press and shearing strength of micro bonding area Scope This part of IEC 62047 specifies the in-situ testing method to measure the bonding strength of micro bonding area which is fabricated by micromachining technologies used in silicon-based micro-electromechanical system (MEMS) This document is applicable to the in-situ pull-press and shearing strength measurement of the micro bonding area fabricated by microelectronic technology process and other micromachining technology Micro anchor, fixed on the substrate through the micro bonding area, provides mechanical support of the movable sensing/actuating functional components in MEMS devices With the devices scaling, the bonding strength degradation, induced by defects, contaminations and thermal mismatch stress on bonding surface, becomes severer This standard specifies an insitu testing method of the pull-press and shearing strength based on a patterned technique This document does not need intricate instruments (such as scanning probe microscopy and nanoindenter) and to prepare the test specimen specially Since the testing structure in this standard can be implanted in device fabrication as a standard detection pattern, this document can provide a bridge, by which the fabrication foundry can give some quantitative reference for the designer Normative references The following documents are referred to in the text in such a way that some or all of their content constitutes requirements of this document For dated references, only the edition cited applies For undated references, the latest edition of the referenced document (including any amendments) applies IEC 62047-1, Semiconductor devices – Micro-electromechanical devices – Part 1: Terms and definitions ISO 10012, Measurement management systems – Requirements for measurement processes and measuring equipment Terms and definitions For the purposes of this document, the terms and definitions given in IEC 62047-1 and ISO 10012 and the following apply ISO and IEC maintain terminological databases for use in standardization at the following addresses: • IEC Electropedia: available at http://www.electropedia.org/ • ISO Online browsing platform: available at http://www.iso.org/obp – 10 – Probe BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 Loading point A Testing structure Compressive fracture point B (not broken) Compressive fracture point B (not broken) Probe Tensile fracture point C (not broken) Probe Tensile fracture point C (broken) IEC Figure − Pull-press testing method operation process b) The loading should be perpendicular to the bottom surface and the loading process should be slow and stable The needle and whole testing structure should be present in the field of views under an optical microscopy When the arm contacts with the bottom surface (or the fracture occurs in the testing structure), the loading process should be stopped and the needle should be raised slowly until it is separated from the testing structure 5.2.3 Pull-press testing method result process During the testing structure arm design process, a table, about the maximum compressive and tensile stress value at the bonding area when every testing structure arm in the design deforms to contact with the bottom surface, should be built After the testing operation, the bonding strength can be referred to the table according to the arm length with which the anchor is broken In case that the stress cannot be obtained, the testing structure parameters in Annex A can be used And the reference stress tables are listed from Table A.2 to Table A.16 If the arm length is not listed in the reference tables, the relative stress can be interpolated from the table content If the fracture occurs in the bulk silicon structure first, the bonding strength can be known as bigger than the bulk silicon strength 5.3 5.3.1 Shearing testing method Shearing testing method operation process The shearing testing method operation process is as follows: a) During the operation process, the chip with testing structure is fixed on the probe station The loading force is imposed laterally at the loading point on the structure arm by the station needle (A) and the deformation is monitored by the microscopy, see Figure The rotation deflection can be read out from the ruler located at the end of the arm BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 Rotation – 11 – Loading point A Deflection ruler Testing structure Probe IEC a) Before probe loading Deflection ruler d Rotation Testing structure Probe IEC b) Dimension of the rotation deflection at a monitoring length by the deflection ruler Figure − Shearing testing method operation process b) The loading should be parallel with the bottom surface and the loading process should be slow and stable The needle and whole testing structure should be present in the field of views under the optical microscopy When the fracture occurs in the testing structure or at the bonding area, the loading process should be stopped and the needle should be retracted slowly until it is separated with the testing structure c) According to various bonding areas, the recommended testing structure dimensions are calculated in order to get a reasonable resolution and operation needle pressure, as listed in Table – 12 – BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 Table – Dimensions for shearing testing structure a ì a (àm ) w ì h (àm ) l (àm) 13 ì 13 33 ì 80 243 17 × 17 37 × 80 241 20 × 20 40 × 80 240 25 × 25 45 × 80 238 30 × 30 50 × 80 240 40 × 40 100 × 80 565 50 × 50 150 × 80 607 60 × 60 200 × 80 596 70 × 70 250 × 80 605 80 × 80 250 × 80 614 90 × 90 300 × 80 456 100 × 100 400 × 80 423 110 × 110 400 × 80 444 120 × 120 400 × 80 449 5.3.2 Shearing testing method result process The shearing stress τ max can be calculated as: h w3 d τmax = 0,14 × a 3l where h thickness of the testing structure arm a side length of the bonding area l length of the testing structure arm w width of the testing structure arm d rotation deflection If the fracture occurs in the bulk silicon structure first, the bonding strength can be known as bigger than the bulk silicon strength BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 – 13 – Annex A (informative) Dimensions for testing structure and tensile/compressive strength A.1 Dimensions for testing structure Ranges of dimensions for testing structure are described as Table A.1 Table A.1 – Dimensions for testing structure Dimensions in µ m l a 300 to 000 10 to 150 A.2 h2 20 (a 70) w 200 h1 d 80 (a 70) 100 Tensile strength and compressive strength Tensile strength σ L,T and compressive strength σ L,C are described in the following tables, from Table A.2 to Table A.16 Table A.2 – Tensile strength and compressive strength (bonding area: 10 àm ì 10 µm) l (µm) σ L,T (MPa) σ L,C (MPa) 800 072,1 -1 135,8 850 008,3 -1 067,9 900 951,6 -1 007,6 950 900,7 -953,5 000 855,1 -905,0 050 813,7 -861,0 100 776,0 -821,0 150 741,6 -784,4 200 710,0 -750,9 250 680,9 -720,0 300 654,2 -691,7 350 629,3 -665,3 400 606,2 -640,8 – 14 – BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 Table A.3 – Tensile strength and compressive strength (bonding area: 20 àm ì 20 àm) l (àm) σ L,T (MPa) σ L,C (MPa) 800 883,4 -1 751,9 850 699,4 -1 576,6 900 541,1 -1 426,5 950 403,8 -1 296,7 000 284,2 -1 184,1 050 179,4 -1 085,5 100 086,5 -998,6 150 004,5 -921,9 200 931,5 -853,8 250 866,0 -792,8 300 807,4 -738,3 350 754,4 -689,1 400 706,4 -644,7 Table A.4 – Tensile strength and compressive strength (bonding area: 30 µm × 30 µm) l (µm) σ L,T (MPa) σ L,C (MPa) 800 558,3 -1 598,8 850 416,3 -1 496,4 900 296,4 -1 328,1 950 188,5 -1 253,9 000 096,4 -1 121,7 050 012,2 -1 066,7 100 939,8 -960,5 150 874,0 -892,8 200 814,9 -832,1 250 760,7 -800,3 300 712,7 -749,5 350 669,1 -703,4 400 629,4 -661,5 BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 – 15 – Table A.5 – Tensile strength and compressive strength (bonding area: 40 àm ì 40 àm) l (àm) L,T (MPa) σ L,C (MPa) 500 036,2 -2 142,1 550 736,4 -1 882,0 600 499,2 -1 569,7 650 306,9 -1 365,9 700 149,8 -1 199,7 750 019,3 -1 062,1 800 910,0 -947,1 850 817,4 -849,8 900 738,4 -766,9 950 670,2 -695,5 000 611,1 -633,7 Table A.6 – Tensile strength and compressive strength (bonding area: 50 àm ì 50 àm) l (àm) L,T (MPa) σ L,C (MPa) 500 241,9 -1 294,9 550 046,0 -1 087,1 600 893,4 -926,1 650 770,9 -797,9 700 672,6 -694,8 750 592,3 -610,3 800 525,2 -540,4 850 469,0 -481,9 900 421,0 -432,5 950 380,3 -390,2 000 345,2 -353,8 Table A.7 – Tensile strength and compressive strength (bonding area: 60 àm ì 60 àm) l (àm) L,T (MPa) σ L,C (MPa) 300 690,1 -1 813,2 320 505,5 -1 608,7 340 351,1 -1 438,6 360 219,2 -1 294,1 380 104,3 -1 168,7 400 005,9 -1 061,9 420 920,1 -969,0 440 844,3 -887,2 460 777,9 -815,8 480 719,0 -752,7 500 666,0 -696,0 – 16 – BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 Table A.8 – Tensile strength and compressive strength (bonding area: 70 àm ì 70 àm) l (àm) L,T (MPa) σ L,C (MPa) 300 136,0 -1 206,6 320 008,2 -1 065,9 340 901,6 -949,4 360 811,3 -851,0 380 733,0 -766,3 400 665,9 -694,1 420 607,9 -631,8 440 556,6 -577,1 460 511,9 -529,4 480 472,3 -487,4 500 436,7 -449,8 Table A.9 – Tensile strength and compressive strength (bonding area: 80 àm ì 80 àm) l (àm) L,T (MPa) σ L,C (MPa) 800 547,6 -2 633,9 900 128,7 -2 189,6 000 804,8 -1 850,6 100 547,9 -1 585,4 200 346,3 -1 374,1 300 080,1 -1 202,3 400 043,2 -1 061,2 500 929,0 -943,7 600 831,5 -844,9 700 750,7 -761,0 800 680,3 -688,9 900 618,5 -626,7 000 566,4 -572,6 BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 – 17 – Table A.10 – Tensile strength and compressive strength (bonding area: 90 µm × 90 µm) l (µm) σ L,T (MPa) σ L,C (MPa) 800 170,8 -2 257,1 900 791,2 -1 854,4 000 503,7 -1 551,3 100 280,5 -1 317,2 200 103,7 -1 132,6 300 961,1 -984,2 400 844,6 -863,4 500 748,1 -763,5 600 667,3 -680,1 700 598,9 -609,7 800 540,5 -549,7 900 490,3 -498,1 000 446,8 -453,5 Table A.11 – Tensile strength and compressive strength (bonding area: 100 àm ì 100 àm) l (àm) L,T (MPa) σ L,C (MPa) 800 883,4 -1 751,9 850 699,4 -1 576,6 900 541,1 -1 426,5 950 403,8 -1 296,7 000 284,2 -1 184,1 050 179,4 -1 085,5 100 086,5 -998,6 150 004,5 -921,9 200 931,5 -853,8 250 866,0 -792,8 300 807,4 -738,3 350 754,4 -689,1 400 706,4 -644,7 – 18 – BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 Table A.12 – Tensile strength and compressive strength (bonding area: 110 µm × 110 µm) l (µm) σ L,T (MPa) σ L,C (MPa) 800 411,3 -1 413,9 850 268,7 -1 267,7 900 147,4 -1 143,4 950 042,2 -1 036,3 000 950,9 -943,6 050 871,3 -862,8 100 801,0 -791,9 150 739,1 -729,5 200 684,0 -674,2 250 634,9 -624,9 300 590,8 -580,8 350 551,2 -541,3 400 515,5 -505,6 Table A.13 – Tensile strength and compressive strength (bonding area: 120 àm ì 120 µm) l (µm) σ L,T (MPa) σ L,C (MPa) 700 355,1 -1 309,5 750 199,5 -1 154,3 800 069,4 -1 025,5 850 959,3 -917,1 900 865,5 -824,9 950 784,2 -745,8 000 714,4 -677,7 050 653,3 -618,5 100 599,8 -566,7 150 552,6 -521,2 200 510,7 -480,9 250 473,4 -445,2 300 439,9 -413,1 BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 – 19 – Table A.14 – Tensile strength and compressive strength (bonding area: 130 àm ì 130 àm) l (àm) σ L,T (MPa) σ L,C (MPa) 600 636,1 -1 466,8 625 522,9 -1 361,1 650 419,7 -1 265,5 675 327,5 -1 180,3 700 244,1 -1 103,4 725 167,7 -1 033,4 750 098,6 -970,1 775 035,7 -912,8 800 977,7 -860,0 825 924,0 -811,4 850 875,2 -767,2 875 830,2 -726,6 900 788,5 -689,1 Table A.15 – Tensile strength and compressive strength (bonding area: 140 µm × 140 µm) l (µm) σ L,T (MPa) σ L,C (MPa) 600 340,4 -1 356,2 625 246,0 -1 256,6 650 160,9 -1 167,2 675 084,3 -1 087,3 700 014,9 -1 015,1 725 952,1 -949,7 750 894,9 -890,5 775 842,8 -836,9 800 795,1 -787,8 825 751,1 -742,8 850 710,9 -701,7 875 673,7 -663,8 900 639,3 -629,1 – 20 – BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 Table A.16 – Tensile strength and compressive strength (bonding area: 150 àm ì 150 àm) l (àm) L,T (MPa) σ L,C (MPa) 500 652,7 -1 538,9 525 515,2 -1 449,6 550 393,7 -1 285,5 575 286,8 -1 220,4 600 191,6 -1 125,8 625 106,8 -1 009,3 650 030,2 -966,7 675 961,6 -871,3 700 899,4 -812,6 725 843,0 -784,1 750 791,9 -734,8 775 745,3 -668,3 800 702,7 -628,6 825 663,5 -592,1 850 627,5 -577,0 875 594,4 -545,6 900 563,9 -500,5 BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 – 21 – Annex B (informative) Pull-press testing method example B.1 Dimensions for testing structure To test the bonding strength of a silicon-glass-bonding sample with 110 àm ì 110 àm bonding area, the dimension parameters are listed in Table B.1 The arm sequence is designed from 800 µm to 400 µm, with an interval of 50 µm Table B.1 – Dimensions for testing structure Dimensions in µ m l a h2 w h1 d 800 to 400 10 to 150 70 200 80 100 B.2 Tensile strength and compressive strength The testing begins with the longest arm structure The test should be carried out as given in 5.2.1 a) If no fracture occurs, raise the needle slowly, and continue to compress the next testing structure with shorter length Repeat the above operation The bonding area does not fracture with 050 µm length arm but fractures with 000 µm length arm The bonding strength is 950,9 MPa referred to the data of Table B.2 Table B.2 – Tensile strength and compressive strength (bonding area: 110 àm ì 110 àm) l (µm) σ L,T (MPa) σ L,C (MPa) 800 411,3 -1 413,9 850 268,7 -1 267,7 900 147,4 -1 143,4 950 042,2 -1 036,3 000 950,9 -943,6 050 871,3 -862,8 100 801,0 -791,9 150 739,1 -729,5 200 684,0 -674,2 250 634,9 -624,9 300 590,8 -580,8 350 551,2 -541,3 400 515,5 -505,6 – 22 – BS EN 62047-25:2016 IEC 62047-25:2016 © IEC 2016 The higher resolution can be achieved when the smaller arm length interval is employed If the fracture occurs in the bulk silicon structure first, the bonding strength can be known as bigger than the bulk silicon strength _ This page deliberately left blank NO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAW British Standards Institution (BSI) BSI is the national body responsible for preparing British Standards and other standards-related publications, information and services BSI is incorporated by Royal Charter British Standards and 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