VNU Journal of Science Mathematics – Physics, Vol 37, No 3 (2021) 74 81 74 Original Article Impact of Geometry Dimension on Quality Factor and Mass Sensitivity of PZT Thin Film based Microcantilevers Nguyen Thi Quynh Chi1,3, Nguyen Duc Minh1,2, Vu Ngoc Hung1,* 1International Training Institute for Materials Science, Hanoi University of Science and Technology, 1 Dai Co Viet, Hai Ba Trung, Hanoi, Vietnam 2MESA+ Institute for Nanotechnology, University of Twente, P O Box 217, 7500AE Enschede, The[.]