... term RF MEMS refers to the design and fabrication of MEMS for RF integratedcircuits. It should not be interpreted as the traditional MEMS devices operating at RF fre-quencies. MEMS devices in RF ... the microelectronics industry. Three-dimensional microactuators in polymer RF MEMS and Their Applications12 MEMS AND RF MEMS CopiedstructureMouldReleaselayerElectroplatedmetalMasterMouldPlasticcastingCastingplateInjectionholesElectroplatedmetalMetalstructureSubstrateResistMaskSynchrotron-generatedX-raysResiststructure(1) ... Jose16 MEMS AND RF MEMS and much progress has been made (Cohen et al., 1999; Ikuta and Hirowatari, 1993; Jiang,Sun and Zhang, 1999; Takagi and Nakajima, 1993; Taylor et al., 1994; Zhang, Jiang and Sun,...