... methods and experimental results of two fabricated accelerometers. Majorparameters of the sensor are measured. Experimental results point out some design issues such as spring design and needs of offset ... sensor design, such as composite gap capacitance, common-centroid layout, proper routing of intercon-nections and design of electrostatic actuators are discussed. Low frequency noise, offset, and ... Systems, pp. 618-21, 1986.[11] Vandemeer, J., Kranz M. Fedder G.K., “Hierachical representation and simulation of micromachinedinertial sensors,” Modeling and Simulation of Microsystems Conference,...