Introduction To Microelectromechanical System P1

Introduction To Microelectromechanical System P1

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Introduction To Microelectromechanical System P2

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Tài liệu An Introduction to Microelectromechanical Systems Engineering P1 pdf

... Capacitors 192 Bulk-Micromachined Variable Capacitors 195 Micromachined Inductors 197 Microelectromechanical Resonators 200 Comb-Drive Resonators 201 Beam Resonators 203 Coupled-Resonator Bandpass ... Publication Data Maluf, Nadim. An Introduction to microelectromechanical systems engineering–2nd ed. –(Artech House microelectromechanical library) 1. Microelectromechanical systems...

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