Introduction To Microelectromechanical System P1
Tài liệu An Introduction to Microelectromechanical Systems Engineering P1 pdf
... Capacitors 192
Bulk-Micromachined Variable Capacitors 195
Micromachined Inductors 197
Microelectromechanical Resonators 200
Comb-Drive Resonators 201
Beam Resonators 203
Coupled-Resonator Bandpass ... Publication Data
Maluf, Nadim.
An Introduction to microelectromechanical systems engineering–2nd ed. –(Artech House
microelectromechanical library)
1. Microelectromechanical systems...
Từ khóa: