... available as pressure sensors and accelerometers, biosensors, chemical sensors, optical sensors, magnetic sensors, etc. Intelligent vision systems and parallel processor-based sensors are typical ... Another subset of MST is the microelectro-optical systems(MEOMS) and system-on-chip (SOC) devices. Most of the sensors manufac-tured by MEMS and MEOMS are three-dimensional devices with dimensionson ... together with nonelec-tronic miniaturized subsystems. These chips can be categorized as MOEMS,MEMS, lab-on-chip, radio frequency (RF) MEMS, system-on-chip, data stor-age MEMS, and so on. For each...