Fabrication of high aspect ratio metallic micro structures by reverse exposure method

... FABRICATION OF HIGH- ASPECT- RATIO METALLIC MICRO- STRUCTURES BY REVERSE EXPOSURE METHOD AMIR TAVAKKOLI KERMANI GHARIEHALI A THESIS SUBMITTED FOR THE DEGREE OF MASTER OF ENGINEERING DEPARTMENT OF ... fabricate high- aspect- ratio metallic microstructure, three objectives are targeted They are as follows: For the fabrication of high- aspect- ratio meta...

Ngày tải lên: 06/10/2015, 20:42

... Fabrication of high-aspect-ratio micro structures using 21 (HARM) for a variety of MEMS applications Modifications and/or improvements of the UV lithography system and processing ... Fabrication of high-aspect-ratio micro structures using 25 The SU8 mold was then removed by heating in PG Remover in 10hrs Fig illustrates the SEM image of nickel comb structure with the f...

Ngày tải lên: 05/03/2014, 14:20

... cijk , 10 10 Pa; q, kg/m3 ) c 11 Si Ge c12 c44 q c 111 c 112 c123 c144 c155 c456 16 .5 12 .9 6.4 4.8 7.92 6. 71 2329 5323.4 )72 )38 )3 )1 )30.5 )4.5 H Liu et al / Mechanics Research Communications 31 (2004) ... , and C 11 ¼ cà þ r0 À q0 c2 þ cà b2 ; 11 11 55 C12 ¼ 0; C13 ¼ ðcà þ cà Þb; 13 55 C22 ¼ cà b2 þ r0 À q0 c2 ; 44 11 ð9Þ C23 ¼ 0; C33 ¼ cà þ r0 À q0 c2 þ cà b2 ; 55 11 33 wh...

Ngày tải lên: 03/12/2014, 23:41

... lithography, the tapered SAS fabrication could be easily extended to wafer scale larger area In Fig 6, the SEM image of the angled view of the tapered SAS array fabricated in the large area is shown Since ... smallest average reflectance value of 3.17% In visible wave range 123 Fig An SEM image (60° angle) of a high aspect ratio, large area subwavelength antireflection...

Ngày tải lên: 22/06/2014, 01:20

... spinning 29 4.3 Fabrication of flat sheet membranes In order to investigate the effect of different coagulants on the surface porosity and roughness of the PVDF membranes, PVDF flat sheet membranes ... review on membrane fabrication for MD The membranes commonly applied in membrane distillation literature have been the commercially available membranes actually fabrica...

Ngày tải lên: 04/10/2015, 10:24

... 1 Fabrication of transparent lead-free KNN glass ceramics by incorporation method Ploypailin Yongsiri1, Sukum Eitssayeam1,2, Gobwut ... crystallization of the KNN phase occurred in all temperatures lower than the observed Tc of 648°C from the DTA trace It is likely that the incorporation method using 75 mol% of calcined KNN powder ... quantity of the glass ceramics...

Ngày tải lên: 22/06/2014, 00:20

... cells on a large scale This thesis focuses on broadband enhancement of light absorption for solar cells by silicon surface texturing using laser micro/ nano -processing Laser technology has become ... fabrication of silicon micro/ nano -structures arrays by laser processing is presented Chapter Four investigated the fabricated silicon surface structures...

Ngày tải lên: 05/10/2015, 21:23

... differential equations with variable delays Proc Am Math Soc 136, 909–918 (2008) 19 Ardjouni, A, Djoudi, A: Fixed points and stability in linear neutral differential equations with variable delays ... TA: Stability by fixed point theory or Liapunov’s theory: a comparison Fixed Point Theory 4, 15–32 (2003) 10 Zhang, B: Fixed points and stability in di...

Ngày tải lên: 20/06/2014, 22:20

... (1974)  As the wave number ka increases The wave forces on the cylinders oscillate around the wave forces on an isolated cylinder  As the cylinder spacing increases, the wave force on the cylinders ... Remarks  The wave forces acting on two cylinders and three cylinders are computed by using boundary element method The numerical r...

Ngày tải lên: 26/07/2014, 07:20

... influenza vRNPs We conclude that selective exposure and masking of the NLS1 on the vRNP constitutes a critical mechanism to regulate the directionality of the nuclear transport of vRNPs during the influenza ... complexes is mediated by two nuclear localization sequences on viral nucleoprotein Virol J 2007, 4:49 Wu WWH, Weaver LL, Panté N: Ultrastr...

Ngày tải lên: 12/08/2014, 04:21

... beam lithography and the Micromachining Techniques for Fabrication of Micro and Nano Structures minimal feature size accessible by these techniques is typically limited to tens of nanometers, thus ... 3-D sensor structures (Kim, 2008, 19 99) 2 Micromachining Techniques for Fabrication of Micro and Nano Structures In this chapter, the focused ion b...

Ngày tải lên: 21/06/2014, 02:20

... Techniques for Fabrication of Micro and Nano Structures Fig Depth profiles for 35 5 nm Nd:YAG laser micromachining of sapphire with fluence of 9.27 J/cm2 and virious scan speeds 3. 2 Laser micromachining ... which emits at 30 8 nm, is prototypical of these in which a pulsed electric discharge ionizes the Xe into a Xe+ state and 38 Micromachining Techniqu...

Ngày tải lên: 21/06/2014, 02:20

... 50 Micromachining Techniques for Fabrication of Micro and Nano Structures Fig The ablation rates for laser micromachining versus laser fluences for Pyrex with different ... 64 Micromachining Techniques for Fabrication of Micro and Nano Structures and (c), respectively There is a frequency interval, in which one effective parameter is negative ε′ f...

Ngày tải lên: 21/06/2014, 02:20

... applications of this laser micromachining technique will also be discussed  96 Micromachining Techniques for Fabrication of Micro and Nano Structures 3.1 Trench micromachining in air The laser micromachining ... subsection 100 Micromachining Techniques for Fabrication of Micro and Nano Structures 3.2 Trench micromachining in DI water The charac...

Ngày tải lên: 21/06/2014, 02:20

... Zeng, et al., 2003] A threshold of 33.8 mJ/cm2 is reported for PMMA at 193 nm by Chen, Y-T, et al (2005) 114 Micromachining Techniques for Fabrication of Micro and Nano Structures Group C=C C=O Si-Si, ... led in the microvia technology, are also key figures in the OI 116 Micromachining Techniques for Fabrication of Micro and Nano Structures deployment [...

Ngày tải lên: 21/06/2014, 02:20