ADVANCED PROCESS AND EQUIPMENT CONTROL FOR
ADVANCED PROCESS AND EQUIPMENT CONTROL FOR
... application of advanced process control and equipment control to reduce the process variation in lithography is investigated This thesis addresses these areas: 1) Real-time monitoring and control of ... device speed and performance (Edgar et al., 2000) CD control is required for obtaining adequate transistor, interconnect and consequently overall circuit performance...
Ngày tải lên: 13/09/2015, 21:42
Tài liệu EFFECTIVE POLICIES FOR SMALL BUSINESS: A GUIDE FOR THE POLICY REVIEW PROCESS AND STRATEGIC PLANS FOR MICRO, SMALL AND MEDIUM ENTERPRISE DEVELOPMENT pptx
... EFFECTIVE POLICIES FOR SMALL BUSINESS A GUIDE FOR THE POLICY REVIEW PROCESS AND STRATEGIC PLANS FOR MICRO, SMALL AND MEDIUM ENTERPRISE DEVELOPMENT About the OECD The Organisation for Economic ... policy development and establish strategic plans for micro, small and medium enterprise development It is a further tool an...
Ngày tải lên: 18/02/2014, 00:20
high precision dynamic alignment and gap control for optical near field nanolithography
... High precision dynamic alignment and gap control for optical near- field nanolithography Xiaolei Wen School of Mechanical Engineering and Birck Nanotechnology Center, ... http://avspublications.org/jvstb/about/rights _and_ permissions 041601-4 Wen et al.: High precision dynamic alignment and gap control 041601-4 FIG Illustration of alignment using the...
Ngày tải lên: 06/05/2014, 08:53
Advanced silicon and germanium transistors for future p channel MOSFET applications
... etch recipes for poly Si gate etch (main etch for removing poly Si in planar region) and poly Si spacer removal etch (over etch step) The poly Si over etch recipe employs HBr and smaller power to ... compares material characteristics of potential channel materials for future CMOS applications, showing 10 Table 1.1 Material characteristics of potential channel materials for...
Ngày tải lên: 08/09/2015, 17:50
Locomotion trajectory generation and dynamic control for bipedal walking robots
... general method for joint trajectory generation to achieve optimized stable locomotion for bipedal robots is first proposed and referred to as Genetic Algorithm Optimized Fourier Series Formulation ... profile The entire bipedal walking control algorithm proposed in this thesis has shown to be general for different walking postures and for robots with different me...
Ngày tải lên: 11/09/2015, 09:02
Advanced materials and novel devices for CMOS applications
... p-FET performance i In summary, novel devices employing novel strain engineering techniques were studied They show promising potential for augmenting the performance of conventional CMOS transistors ... describe to my daddy, my mummy and my lovely brother, Henry I thank them for their care and love in my entire life, and thank daddy and mummy for the sacrifices they have...
Ngày tải lên: 14/09/2015, 08:37
Formation and reconfiguration control for multi robotic systems
... proposes an algorithm for tracking of the desired trajectory 1.4.1 Flocking, Swarming and Formation Control Achieving an specific formation and developing a control law that guarantees formation stability ... FORMATION AND RECONFIGURATION CONTROL FOR MULTI- ROBOTIC SYSTEMS Mohsen Zamani (B.Sc., Shiraz University of Technology) A THESIS SUBMITTED FOR THE DEGREE...
Ngày tải lên: 16/10/2015, 15:34
process modeling simulation and control for chemical engineers - 2nd ed
... MR Controlled variables Manipulated variables Uncontrolled variables i i FIGURE 1.6 10 PROCESS MODELING, Disturbance SIMULATION, AND CONTROL FOR CHEMICAL ENGINEERS c Manipulated variable Controlled ... Congress Cataloging-in-Publlcatlon William L Luyben .-2 nd ed p cm Bibliography: p Includes index ISBN 6-6 7-6 3915 9-9 Chemical process- Math data processing., Chemi...
Ngày tải lên: 01/04/2014, 11:12
Advanced process control and relay auto tuning
... sensitivity and stability margins Conventional controllers like PID and many advanced control method are useful to control linear processes In practice, most processes are nonlinear and using only PID controller, ... saturation, and disturbance characteristics Increased demand for process control has paved the way for advanced control solutions that can automatically an...
Ngày tải lên: 15/09/2015, 21:48
English for industrial machinery and equipment(Tiếng anh chuyên ngành máy móc và thiết bị
... paper The paper is formed in vertical convolutions (wrinkles) and in a cylindrical pattern It is reinforced on the inside and outside and is equipped with a seal on the top and the bottom Sometimes ... location and movement Indefinite and definite articles Expressing design and function 18 UNIT 4: ENERGY, HEAT AND WORK A UNDERSTANDING A PRINTED TEXT The following text will giv...
Ngày tải lên: 01/03/2013, 17:01
Process technology equipment and systems chapter 1 & 2
... Problems and Solutions 20 8 Cooling Tower Symbols 21 0 Summary 21 1 Review Questions 21 2 Chapter Boilers 21 3 Key Terms 21 4 Boiler Applications and Basic ... 2 21 Steam Generation System 22 3 Steam System Symbols 22 5 Summary 22 6 Review Questions 22 7 Chapter 10 Furnaces 22 9 Key Terms 23 0 Furnace ... 21 5 Fire-Tube Boilers 21 5 Water-Tube Boilers 21 5 Main Componen...
Ngày tải lên: 15/08/2013, 07:50
Process technology equipment and systems chapter 3 & 4
... 43 . 77 49 .56 53. 52 65 .42 73. 15 88. 63 107 .32 125 .49 139 .67 160.27 52.65 52.25 51.07 49 . 74 49.00 48 .50 46 .92 46 .00 44 . 04 41.66 39 .33 37 .52 34 .89 3. 338 3. 338 3. 338 3. 338 3. 338 3. 338 3. 338 3. 338 3. 338 ... 0 83 120 237 33 7 43 8 531 6 74 4 .33 4 4.260 4. 026 3. 826 3. 6 24 3. 43 8 3. 152 1.152 1.651 3. 1 74 4 .40 7 5.595 6.621 8.101 14....
Ngày tải lên: 16/08/2013, 15:29