Control and signal processing for lithography

... equipment and process control (Moynes, 2006; Miyagi et al., 2006) This thesis will investigate the application of advanced control and signal processing to meet some stringent requirements for CD control ... resist thickness and CD uniformity by real-time control of post-apply bake processing 1.2 Contributions In this thesis, the application of advanced metrology, contr...

Ngày tải lên: 11/09/2015, 16:05

... manifold For further information on derivation and implementation of this hard constraint refer to [1] and references therein The closed form analytical expressions for first and second order information ... algorithms for first and third order TITO FIR demixing systems over 10 trials Figure 2-3 (a) and (b) are the two original signals, (c) and (d) are the convolutively mixe...

Ngày tải lên: 19/01/2014, 18:20

... SIGNAL PROCESSING FOR TELECOMMUNICATIONS AND MULTIMEDIA MULTIMEDIA SYSTEMS AND APPLICATIONS SERIES Consulting Editor Borko Furht Florida ... area of telecommunications, application of signal processing allows for new generations of systems to achieve performance close to theoretical limits, while in the area of multimedia, signal processing ... upper and lowercase...

Ngày tải lên: 19/01/2014, 18:20

... SIGNAL PROCESSING FOR TELECOMMUNICATIONS AND MULTIMEDIA MULTIMEDIA SYSTEMS AND APPLICATIONS SERIES Consulting Editor Borko Furht Florida ... area of telecommunications, application of signal processing allows for new generations of systems to achieve performance close to theoretical limits, while in the area of multimedia, signal processing ... upper and lowercase...

Ngày tải lên: 19/01/2014, 19:20

... manifold For further information on derivation and implementation of this hard constraint refer to [1] and references therein The closed form analytical expressions for first and second order information ... algorithms for first and third order TITO FIR demixing systems over 10 trials Figure 2-3 (a) and (b) are the two original signals, (c) and (d) are the convolutively mixe...

Ngày tải lên: 25/01/2014, 13:20

... SIGNAL PROCESSING FOR TELECOMMUNICATIONS AND MULTIMEDIA MULTIMEDIA SYSTEMS AND APPLICATIONS SERIES Consulting Editor Borko Furht Florida ... area of telecommunications, application of signal processing allows for new generations of systems to achieve performance close to theoretical limits, while in the area of multimedia, signal processing ... upper and lowercase...

Ngày tải lên: 25/01/2014, 17:20

... Discrete-Time Random Process Signal Modeling Wiener Filters Spectrum Estimation Adaptive Filters Applications in Communications and Signal Processing Textbook: M H Hayes, Statistical Digital Signal Processing ... with MATLAB To learn the techniques of applied probability and statistical signal processing and apply to communication and signal processing Credits: G...

Ngày tải lên: 10/06/2014, 09:29

... narrowband and lowdata rate implementation of eigenmode transmission with low cost of-the-shelf RF components and DSPs A further important contribution for the overall multiantenna system performance ... performed on bit and frame level as well and can be file-logged on the PC 3.3.6 Synchronization The synchronization between Tx and Rx was realized by two cables, one for...

Ngày tải lên: 22/06/2014, 23:20

... run in open-loop with very little real-time process control utilizing in situ sensors In this thesis, in- situ measurement and real-time control is applied to some aspects of lithography including ... Real-time control requires in- situ measurement [6, 15] The shift of metrology from off-line towards in- situ sensors, provides in- time data for active proces...

Ngày tải lên: 14/09/2015, 12:50

... 71 Chaotic Signals and Signal Processing Alan V Oppenheim Massachusetts Institute of Technology Kevin M Cuomo MIT Lincoln Laboratory 71. 1 71. 1 71. 2 71. 3 71. 4 Introduction Modeling and Representation ... classical signal processing a rich set of tools has evolved for processing signals that are deterministic and predictable such as transient and periodic si...

Ngày tải lên: 16/12/2013, 04:15

Ngày tải lên: 27/05/2014, 02:44