... surface region of thickness t4). One of the films tl or t3 may consist of microscopic (less than 100 nm size) mixtures of two materials, such as SiO, and Si3N4. The volume ratios of these ... Eng. 11 86, 110, 1989. Mater. 18,379, 1989. 7.2 Modulation Spectroscopy 399 A .a73 - B .15- a : .m- C .018 - rn I I I I I I I I I 16w 1 466 1935 1199 1 066 992 799 ... in considerable depth. Alterovitz. J ofAppl. Pbys. 60 ,3293, 19 86. First use of computer drawn three-dimensional surfaces (in wavelength and angle of incidence space) for ellipsometric...