Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 13 pdf

... methacrylate)-co- ethylacrylate] (COP) Dichloropropyl acrylate and glycidyl methacrylate-co-ethyl acrylate (DCOPA) Lithography Optical Optical Optical E-beam and X ray E-beam and X ray Xray Type Negative Positive Positive Positive Negative Negative vi ... (um) 0. 1-1 0 0. 3-1 00 0. 1-0 .5 0. 1-0 .3 Bake temperature (°C) 9 0-1 50 35 0-4 50 50 0-9 00 650 Solvent Weak b...

Ngày tải lên: 27/06/2014, 18:20

... soild-state device physics, micro- electronics, material science, MEMS/ Smart structures, and mechanics. Prior to joining About the Authors INTRODUCTION Dimension of object -1 0 -9 -8 – 7-6 - 5-4 ... 129809 Library of Congress Cataloguing-in-Publication Data Gardner, J. W. (Julian W.), 195 8- Microsensors, MEMS, and smart devices / Julian...

Ngày tải lên: 10/08/2014, 05:20

... etc. 0, 1,2,3, ,(n- 1) -l,-l + 1, -l + 2, ,-! , 0, l, l-2,l- 1,l + ior-I number m s , which takes two values +| and — |. Therefore, four quantum numbers n, l, m, and m s are required ... methacrylate)-co- ethylacrylate] (COP) Dichloropropyl acrylate and glycidyl methacrylate-co-ethyl acrylate (DCOPA) Lithography Optical Optical Optical E-beam and X ray E-bea...

Ngày tải lên: 10/08/2014, 05:20

... (mm) Total thickness variation (u,m) Surface orientation 0.5 0-0 .55 3 0-3 5 1 6-2 0 0.6 0-0 .65 4 0-4 5 2 5-3 0 70 65 0.6 5-0 .70 5 5-6 0 3 5-4 0 60 50 (100) or (111) (100) or (111) (100) or (111) "Wafer ... Electronics and Optoelec- tronics, Chapman and Hall, London, p. 351. Culshaw, B. (1996). Smart Structures and Materials, Artech Hous...

Ngày tải lên: 10/08/2014, 05:20

... test Reworkability Die attach and wire bond 1 30 0-5 00 2 0-1 00 2. 0-3 .5 4-7 Excellent DC Poor TAB >2 50 0-7 00 3-4 4. 0-5 .0 3-4 Fair AC Poor/Fair Flip TAB >2 50 0-7 00 3-4 4. 0-5 .0 3-4 Fair AC Fair Flip Chip 0.8 1000 10 <1.0 10 Poor AC Poor basic ... 102 COP PMMA PBS Lithography Optical Optical Optical Optical E-beam and X-ray E-beam...

Ngày tải lên: 10/08/2014, 05:20

... c [ p-S'i s etc ^^\ I**,: , , ,| , i ::::•:•:• •:• !&*( )Wth | :!:|R:j: - Mi )n /!!!!! hed m m •^ - - - -= ^ Oxide growth S] on p-Si and IE passivation m ^-4 -_ _-_ _-_ ^fllrSSvt f_ ... conductivity Units % - 1 0- 6 /°C g/cm 3 - 10 –3 kV/mm GPa ft-cm J/g.°K W/m.°K AI 2 O 3 99.5 White 7.6 3.87 9.9 0.1 24 400 10 14 - 2 0-3 5...

Ngày tải lên: 10/08/2014, 05:20

... types of MEMS RADIATION SENSORS 241 Radition sensors Number particles X ray X ray - Plastic film - Thermoluminescent - Solid-state -Photoconductive -Photovoltaic -Photoconductive - Photovoltaic " ... Pyroelectric - Microantenna (SAW) — Wire antenna Energy increasing L.2GeV-1.2MeV(x ray) 1.2MeV- 1.2keV(;r ray) 1.2keV-1.2eV 1.2eV-1.2MeV 1.2MeV- 1.2 1.2jie...

Ngày tải lên: 10/08/2014, 05:20

... density (mg/Hz) Package" Price(€)* Motorola XMMAS4 01G1D 1 ±40 g 20 g -4 0 to 105 5 400 0.5 N/A 7.8 16-pin DIP, SIP 11 Bosch SMB050 1 ±35 g - - 7 400 0.5 N/A - 28-pin PLCC N/A Bosch SMB060 2 ±35 g - - 12 400 0.5 1 - 28-pin PLCC N/A Analog devices ADXL50JH 1 ±50 ... control 9 9 9 9 n/a 7 9 30 100 3.3 97 455 14 19 0-1 05 5 0-1 05 0-1 05 0-1 05 500 20000...

Ngày tải lên: 10/08/2014, 05:20

... SnO 2 Undoped oxide Undoped oxide Measurand Methane Hydrogen sulfide Air quality (smoke) Toxic gas - CO Hydrocarbons Chlorine Ozone Range (PPM) 50 0-1 0000 5-1 00 <10 1 0-1 000 1 0-1 000 0-5 0-0 .3 (Power mW) 835 660 660 120 400 650 800 Cost a (euro) 13 50 13 13 15 25 25 a Price ... Sensors and Actu- ators B, 27, 261–266. Gardner, J. W. et al. (1995). &q...

Ngày tải lên: 10/08/2014, 05:20

... operation Device type Love SAW Rayleigh SAW SH-SAW SH-APM FPW Substrate Typical frequency (MHz) ST-quartz ST-quartz LiTaO 3 ST-quartz Si x N y /ZnO 9 5-1 30 8 0-1 000 9 0-1 50 160 1-6 Ua U b t Media Transverse Parallel Ice ... Surface-Wave Devices for Signal Processing, Elsevier, The Netherlands. Nakamura, N., Kazumi, M. and Shimizu, H. (1977). "SH-type and R...

Ngày tải lên: 10/08/2014, 05:20