Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 13 pdf
microsensors mems and smart devices gardner varadhan and awadelkarim pot
... methacrylate)-co-
ethylacrylate]
(COP)
Dichloropropyl acrylate
and
glycidyl
methacrylate-co-ethyl acrylate (DCOPA)
Lithography
Optical
Optical
Optical
E-beam
and X ray
E-beam
and X ray
Xray
Type
Negative
Positive
Positive
Positive
Negative
Negative
vi
... (um)
0. 1-1 0
0. 3-1 00
0. 1-0 .5
0. 1-0 .3
Bake temperature (°C)
9 0-1 50
35 0-4 50
50 0-9 00
650
Solvent
Weak
b...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 1 pdf
... soild-state device physics, micro-
electronics, material science, MEMS/ Smart structures,
and
mechanics. Prior
to
joining
About the Authors
INTRODUCTION
Dimension
of
object
-1 0
-9 -8
– 7-6 - 5-4
... 129809
Library
of
Congress
Cataloguing-in-Publication
Data
Gardner,
J. W.
(Julian W.), 195 8-
Microsensors,
MEMS,
and
smart devices
/
Julian...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 2 ppt
... etc.
0,
1,2,3,
,(n-
1)
-l,-l
+ 1, -l +
2, ,-! ,
0,
l, l-2,l-
1,l
+
ior-I
number
m
s
,
which takes
two
values
+| and
—
|.
Therefore,
four
quantum numbers
n, l,
m,
and m
s
are
required
... methacrylate)-co-
ethylacrylate]
(COP)
Dichloropropyl acrylate
and
glycidyl
methacrylate-co-ethyl acrylate (DCOPA)
Lithography
Optical
Optical
Optical
E-beam
and X ray
E-bea...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 3 pdf
... (mm)
Total thickness
variation
(u,m)
Surface
orientation
0.5 0-0 .55
3 0-3 5
1 6-2 0
0.6 0-0 .65
4 0-4 5
2 5-3 0
70
65
0.6 5-0 .70
5 5-6 0
3 5-4 0
60
50
(100)
or
(111)
(100)
or
(111)
(100)
or
(111)
"Wafer
... Electronics
and
Optoelec-
tronics,
Chapman
and
Hall,
London,
p.
351.
Culshaw,
B.
(1996).
Smart
Structures
and
Materials,
Artech
Hous...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 4 pdf
... test
Reworkability
Die
attach
and
wire
bond
1
30 0-5 00
2 0-1 00
2. 0-3 .5
4-7
Excellent
DC
Poor
TAB
>2
50 0-7 00
3-4
4. 0-5 .0
3-4
Fair
AC
Poor/Fair
Flip
TAB
>2
50 0-7 00
3-4
4. 0-5 .0
3-4
Fair
AC
Fair
Flip
Chip
0.8
1000
10
<1.0
10
Poor
AC
Poor
basic
... 102
COP
PMMA
PBS
Lithography
Optical
Optical
Optical
Optical
E-beam
and
X-ray
E-beam...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 5 pdf
... c
[
p-S'i
s etc
^^\
I**,:
, , ,| , i
::::•:•:•
•:•
!&*(
)Wth
|
:!:|R:j:
- Mi
)n
/!!!!!
hed
m m
•^ - - - -=
^
Oxide growth
S] on
p-Si
and
IE
passivation
m ^-4
-_ _-_ _-_
^fllrSSvt
f_ ... conductivity
Units
%
-
1 0-
6
/°C
g/cm
3
-
10
–3
kV/mm
GPa
ft-cm
J/g.°K
W/m.°K
AI
2
O
3
99.5
White
7.6
3.87
9.9
0.1
24
400
10
14
-
2 0-3 5...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 9 ppt
... types
of
MEMS
RADIATION
SENSORS
241
Radition
sensors
Number
particles
X
ray
X
ray
-
Plastic
film
-
Thermoluminescent
-
Solid-state
-Photoconductive
-Photovoltaic
-Photoconductive
-
Photovoltaic
"
... Pyroelectric
-
Microantenna
(SAW)
—
Wire
antenna
Energy
increasing
L.2GeV-1.2MeV(x
ray)
1.2MeV-
1.2keV(;r ray)
1.2keV-1.2eV
1.2eV-1.2MeV
1.2MeV-
1.2
1.2jie...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 10 docx
... density
(mg/Hz)
Package"
Price(€)*
Motorola
XMMAS4
01G1D
1
±40 g
20 g
-4 0 to 105
5
400
0.5
N/A
7.8
16-pin
DIP,
SIP
11
Bosch
SMB050
1
±35 g
-
-
7
400
0.5
N/A
-
28-pin
PLCC
N/A
Bosch
SMB060
2
±35 g
-
-
12
400
0.5
1
-
28-pin
PLCC
N/A
Analog
devices
ADXL50JH
1
±50 ... control
9
9
9
9
n/a
7
9
30
100
3.3
97
455
14
19
0-1 05
5 0-1 05
0-1 05
0-1 05
500
20000...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 11 pps
... SnO
2
Undoped
oxide
Undoped
oxide
Measurand
Methane
Hydrogen
sulfide
Air
quality
(smoke)
Toxic
gas -
CO
Hydrocarbons
Chlorine
Ozone
Range
(PPM)
50 0-1 0000
5-1 00
<10
1 0-1 000
1 0-1 000
0-5
0-0 .3
(Power
mW)
835
660
660
120
400
650
800
Cost
a
(euro)
13
50
13
13
15
25
25
a
Price
... Sensors
and
Actu-
ators
B, 27,
261–266.
Gardner,
J. W. et al.
(1995). &q...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 12 pps
... operation
Device
type
Love
SAW
Rayleigh
SAW
SH-SAW SH-APM
FPW
Substrate
Typical
frequency
(MHz)
ST-quartz ST-quartz LiTaO
3
ST-quartz Si
x
N
y
/ZnO
9 5-1 30
8 0-1 000
9 0-1 50
160 1-6
Ua
U
b
t
Media
Transverse
Parallel
Ice ... Surface-Wave
Devices
for
Signal Processing, Elsevier,
The
Netherlands.
Nakamura,
N.,
Kazumi,
M. and
Shimizu,
H.
(1977). "SH-type
and
R...